发明授权
US09076653B2 Substrate for growing single crystal diamond layer and method for producing single crystal diamond substrate 有权
用于生长单晶金刚石层的基板和用于生产单晶金刚石基底的方法

Substrate for growing single crystal diamond layer and method for producing single crystal diamond substrate
摘要:
The present invention is a substrate for growing a single crystal diamond layer including: at least, a base material made of a single crystal diamond, and an iridium film or a rhodium film heteroepitaxially grown on a side of the base material where the single crystal diamond layer is to be grown; wherein a peripheral end portion of a surface of the base material on the side where the single crystal diamond layer is to be grown is chamfered with a curvature radius (r), the curvature radius satisfying (r)≧50 μm. As a result, there is provided a substrate for growing a single crystal diamond layer and a method for producing a single crystal diamond substrate, the substrate and the method in which a single crystal diamond having uniform and high crystallinity can be reproducibly produced at low cost.
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