发明授权
US09076653B2 Substrate for growing single crystal diamond layer and method for producing single crystal diamond substrate
有权
用于生长单晶金刚石层的基板和用于生产单晶金刚石基底的方法
- 专利标题: Substrate for growing single crystal diamond layer and method for producing single crystal diamond substrate
- 专利标题(中): 用于生长单晶金刚石层的基板和用于生产单晶金刚石基底的方法
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申请号: US12662616申请日: 2010-04-26
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公开(公告)号: US09076653B2公开(公告)日: 2015-07-07
- 发明人: Hitoshi Noguchi
- 申请人: Hitoshi Noguchi
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JP2009-122415 20090520
- 主分类号: C30B25/02
- IPC分类号: C30B25/02 ; H01L21/205 ; H01L21/02 ; H01L29/06 ; C30B25/18 ; C30B25/20 ; C30B29/02 ; C30B29/04 ; C30B33/06
摘要:
The present invention is a substrate for growing a single crystal diamond layer including: at least, a base material made of a single crystal diamond, and an iridium film or a rhodium film heteroepitaxially grown on a side of the base material where the single crystal diamond layer is to be grown; wherein a peripheral end portion of a surface of the base material on the side where the single crystal diamond layer is to be grown is chamfered with a curvature radius (r), the curvature radius satisfying (r)≧50 μm. As a result, there is provided a substrate for growing a single crystal diamond layer and a method for producing a single crystal diamond substrate, the substrate and the method in which a single crystal diamond having uniform and high crystallinity can be reproducibly produced at low cost.
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