发明授权
- 专利标题: Manufacturing apparatus and manufacturing method of lighting device
- 专利标题(中): 照明装置的制造装置及制造方法
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申请号: US12721110申请日: 2010-03-10
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公开(公告)号: US09214632B2公开(公告)日: 2015-12-15
- 发明人: Shunpei Yamazaki
- 申请人: Shunpei Yamazaki
- 申请人地址: JP
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP
- 代理机构: Husch Blackwell LLP
- 优先权: JP2009-067048 20090318
- 主分类号: B44F1/00
- IPC分类号: B44F1/00 ; C09K11/00 ; H01J9/227 ; B28B19/00 ; E04D15/06 ; B05D5/06 ; B05D5/12 ; C23C16/00 ; B05D3/00 ; H01J9/00 ; H01J9/38 ; H01J9/46 ; H01J9/48 ; H01L51/00 ; C23C14/12 ; C23C14/22 ; C23C14/24 ; C23C14/56 ; H01L51/56 ; B29C65/78 ; B29C65/00 ; H01L51/50
摘要:
A manufacturing apparatus of a lighting device, including a vacuum chamber, an exhaust system by which the vacuum chamber is set to a reduced-pressure state, and a transfer chamber from which a substrate is transferred to the vacuum chamber is provided. The vacuum chamber of the manufacturing apparatus includes a plurality of deposition chambers in which a first electrode, a first light-emitting unit including at least a light-emitting layer, an intermediate layer, a second light-emitting unit including at least a light-emitting layer, a second electrode, a sealing film are formed, and a substrate transfer means by which the substrate is sequentially transferred to the deposition chambers.
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