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US09285416B2 Apparatus and method for manufacturing substrates 有权
用于制造基板的装置和方法

Apparatus and method for manufacturing substrates
Abstract:
A substrate manufacturing apparatus includes a test apparatus including a test handler module for performing a test process on a substrate. The test handler module may include a conveyor unit to transfer a substrate, a handler unit for performing a test process on the substrate, and a transfer unit for transferring the substrate between the conveyor unit and the handler unit. The conveyor unit may include a feed conveyor and a discharge conveyor spaced apart from the feed conveyor.
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