Invention Grant
- Patent Title: Apparatus and method for manufacturing substrates
- Patent Title (中): 用于制造基板的装置和方法
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Application No.: US13799146Application Date: 2013-03-13
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Publication No.: US09285416B2Publication Date: 2016-03-15
- Inventor: Youngchul Lee , Semin Kwon , JinHwan Lee , Jea-Muk Oh , Kyungsook Lee , Nam-Hong Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR KR
- Assignee: Samsung Electronics Co., Ltd.,Semes Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.,Semes Co., Ltd.
- Current Assignee Address: KR KR
- Agency: Onello & Mello, LLP
- Priority: KR10-2012-0033785 20120402; KR10-2012-0033786 20120402; KR10-2012-0080715 20120724
- Main IPC: G01R31/26
- IPC: G01R31/26 ; G01R31/28

Abstract:
A substrate manufacturing apparatus includes a test apparatus including a test handler module for performing a test process on a substrate. The test handler module may include a conveyor unit to transfer a substrate, a handler unit for performing a test process on the substrate, and a transfer unit for transferring the substrate between the conveyor unit and the handler unit. The conveyor unit may include a feed conveyor and a discharge conveyor spaced apart from the feed conveyor.
Public/Granted literature
- US20130257471A1 APPARATUS AND METHOD FOR MANUFACTURING SUBSTRATES Public/Granted day:2013-10-03
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