Invention Grant
- Patent Title: Methods of fabricating semiconductor devices
- Patent Title (中): 制造半导体器件的方法
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Application No.: US14519771Application Date: 2014-10-21
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Publication No.: US09299811B2Publication Date: 2016-03-29
- Inventor: Wook-Je Kim , Jae-Yup Chung , Jong-Seo Hong , Cheol Kim , Hee-Soo Kang , Hyun-Jo Kim , Hee-Don Jeong , Soo-Hun Hong , Sang-Bom Kang , Myeong-Cheol Kim , Young-Su Chung
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel & Sibley, P.A.
- Priority: KR10-2013-0145486 20131127
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8234 ; H01L29/78 ; H01L29/165

Abstract:
Semiconductor devices may include first and second fins that protrude from a substrate, extend in a first direction, and are separated from each other in the first direction. Semiconductor devices may also include a field insulating layer that is disposed between the first and second fins to extend in a second direction intersecting the first direction, an etch-stop layer pattern that is formed on the field insulating layer and a dummy gate structure that is formed on the etch-stop layer pattern.
Public/Granted literature
- US20150147860A1 METHODS OF FABRICATING SEMICONDUCTOR DEVICES Public/Granted day:2015-05-28
Information query
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