Some embodiments relate to a memory device comprising a charge-trapping layer disposed between a control gate and a select gate. A capping structure is disposed over an upper surface of the control gate, and a composite spacer is disposed on a source-facing sidewall surface of the control gate. The capping structure and the composite spacer prevent damage to the control gate during one more etch processes used for contact formation to the memory device. To further limit or prevent the select gate sidewall etching, some embodiments provide for an additional liner oxide layer disposed along the drain-facing sidewall surface of the select gate. The liner oxide layer is configured as an etch stop layer to prevent etching of the select gate during the one or more etch processes. As a result, the one or more etch processes leave the control gate and select gate substantially intact.