Invention Grant
- Patent Title: Plating apparatus, plating method and storage medium
- Patent Title (中): 电镀装置,电镀方法和储存介质
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Application No.: US14360984Application Date: 2012-11-12
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Publication No.: US09487865B2Publication Date: 2016-11-08
- Inventor: Yuichiro Inatomi , Takashi Tanaka , Mitsuaki Iwashita
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2011-259322 20111128
- International Application: PCT/JP2012/079204 WO 20121112
- International Announcement: WO2013/080778 WO 20130606
- Main IPC: C23C18/16
- IPC: C23C18/16 ; C23C18/42 ; C23C18/54

Abstract:
A plating apparatus 20 includes a substrate holding device 110 configured to hold a substrate W; a discharging device 21 configured to discharge a plating liquid 35 toward the substrate W held by the substrate holding device 110; and a plating liquid supplying device 30 connected to the discharging device 21 and configured to supply the plating liquid 35 to the discharging device 21. A gas supplying device 170 is configured to heat a heating gas G having a higher specific heat capacity than air and supply the heated heating gas G toward the substrate W held by the substrate holding device 110. Further, a controller 160 is configured to control at least the discharging device 21, the plating liquid supplying device 30, and the gas supplying device 170.
Public/Granted literature
- US20140356539A1 PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM Public/Granted day:2014-12-04
Information query
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