Invention Grant
- Patent Title: Sidewall image templates for directed self-assembly materials
- Patent Title (中): 用于定向自组装材料的侧壁图像模板
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Application No.: US14316988Application Date: 2014-06-27
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Publication No.: US09508562B2Publication Date: 2016-11-29
- Inventor: Ji Xu , Richard A. Farrell , Gerard M. Schmid , Moshe E Preil
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/3213
- IPC: H01L21/3213 ; H01L21/308 ; H01L21/027 ; H01L21/033 ; H01L21/768 ; H01L21/28 ; G03F7/00 ; H01L21/311 ; C08L53/00 ; G03F1/00
Abstract:
In one example, a method includes forming a template having a plurality of elements above a process layer and forming spacers on sidewalls of the plurality of elements. Portions of the process layer are exposed between adjacent spacers. At least one of the plurality of elements is removed. A mask structure is formed from a directed self-assembly material over the exposed portions. The process layer is patterned using at least the mask structure as an etch mask.
Public/Granted literature
- US20150380252A1 SIDEWALL IMAGE TEMPLATES FOR DIRECTED SELF-ASSEMBLY MATERIALS Public/Granted day:2015-12-31
Information query
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