Invention Grant
- Patent Title: Polishing composition
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Application No.: US14359252Application Date: 2012-11-21
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Publication No.: US09688884B2Publication Date: 2017-06-27
- Inventor: Shuugo Yokota , Yasuyuki Yamato , Satoru Yarita , Tomohiko Akatsuka , Shuichi Tamada
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu-Shi
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu-Shi
- Agency: Foley & Lardner LLP
- Priority: JP2011-258342 20111125; JP2012-061155 20120316
- International Application: PCT/JP2012/080218 WO 20121121
- International Announcement: WO2013/077368 WO 20130530
- Main IPC: C09K13/00
- IPC: C09K13/00 ; C09G1/02 ; H01L21/306 ; B24B37/04 ; C09K3/14 ; H01L21/3105 ; H01L21/8258

Abstract:
A polishing composition of the present invention is to be used for polishing an object including a portion containing a high-mobility material and a portion containing a silicon material. The polishing composition comprises odd-shaped abrasive grains and an oxidizing agent having a standard electrode of 0.3 V or more, and preferably further contains a salt, such as an ammonium salt. The pH of the polishing composition is 1 or more and 6 or less, or 8 or more and 14 or less. The average degree of association of the abrasive grains, obtained by dividing the value of the average secondary particle diameter of the abrasive grains by the value of the average primary particle diameter of the abrasive grains, is preferably 1.6 or more.
Public/Granted literature
- US20140342562A1 POLISHING COMPOSITION Public/Granted day:2014-11-20
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