Invention Grant
- Patent Title: Flash cell structure and method of fabricating the same
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Application No.: US15361065Application Date: 2016-11-24
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Publication No.: US09780101B1Publication Date: 2017-10-03
- Inventor: Sheng Zhang , Wenbo Ding , Xiaofei Han , Chien-Kee Pang , Yu-Yang Chen , Jubao Zhang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/336 ; H01L29/788 ; H01L27/11521 ; H01L29/66

Abstract:
The present invention provides a flash cell structure and a method of fabricating the same. The flash cell structure includes a semiconductor substrate, a stacked gate structure disposed on the semiconductor substrate, a first doped region disposed in the semiconductor substrate at a side of the stacked gate structure, a first dielectric layer, a second dielectric layer, and an erase gate. The stacked gate structure includes a floating gate insulated from the semiconductor substrate and a control gate disposed on the floating gate and insulated from the floating gate. The first dielectric layer is disposed on a sidewall of the floating gate. The second dielectric layer is disposed on the first doped region. A thickness of the first dielectric layer is less than a thickness of the second dielectric layer.
Information query
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