Invention Grant
- Patent Title: Composition and method for polishing memory hard disks
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Application No.: US14156201Application Date: 2014-01-15
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Publication No.: US09909032B2Publication Date: 2018-03-06
- Inventor: Selvaraj Palanisamy Chinnathambi , Michael White
- Applicant: Cabot Microelectronics Corporation
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas Omholt; Erika S. Wilson
- Main IPC: C09G1/02
- IPC: C09G1/02 ; H01L21/321 ; H01L21/306 ; B24B1/00 ; C09G1/00 ; C09G1/04 ; C09C1/06 ; C09K13/00 ; C09K13/06 ; G11B5/84 ; C09C1/30

Abstract:
The invention provides a chemical-mechanical polishing composition containing aluminate-modified silica particles, a polyacrylamide, a heterocyclic film-forming agent, and water. The invention also provides a method of chemically-mechanically polishing a substrate, especially a nickel-phosphorous substrate, by contacting a substrate with a polishing pad and the chemical-mechanical polishing composition, moving the polishing pad and the polishing composition relative to the substrate, and abrading at least a portion of the substrate to polish the substrate.
Public/Granted literature
- US20150197669A1 COMPOSITION AND METHOD FOR POLISHING MEMORY HARD DISKS Public/Granted day:2015-07-16
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