Invention Grant
- Patent Title: System and method for a capacitive thermometer
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Application No.: US14284198Application Date: 2014-05-21
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Publication No.: US09939331B2Publication Date: 2018-04-10
- Inventor: Jonathan Silvano de Sousa , Tobias Frischmuth , Peter Irsigler , Ulrich Schmid , Thomas Grille , Ursula Hedenig , Sylvicley Figueira da Silva
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: G01K7/00
- IPC: G01K7/00 ; G01K7/34 ; G01K1/02 ; B81B3/00 ; G01K13/00
Abstract:
Various embodiments disclosed herein include a capacitive thermometer including a deflectable membrane and a sense electrode. The deflectable membrane is configured to adjust a capacitive value based on a temperature of the deflectable membrane.
Public/Granted literature
- US20150338285A1 System and Method for a Capacitive Thermometer Public/Granted day:2015-11-26
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