Invention Application
WO2016111742A1 SPLIT GATE NON-VOLATILE FLASH MEMORY CELL HAVING METAL-ENHANCED GATES AND METHOD OF MAKING SAME
审中-公开
具有金属增强门的分离闸门非挥发性闪存存储单元及其制造方法
- Patent Title: SPLIT GATE NON-VOLATILE FLASH MEMORY CELL HAVING METAL-ENHANCED GATES AND METHOD OF MAKING SAME
- Patent Title (中): 具有金属增强门的分离闸门非挥发性闪存存储单元及其制造方法
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Application No.: PCT/US2015/059443Application Date: 2015-11-06
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Publication No.: WO2016111742A1Publication Date: 2016-07-14
- Inventor: CHEN, Chun-Ming , WU, Man-Tang , YANG, Jeng-Wei , SU, Chien-Sheng
- Applicant: SILICON STORAGE TECHNOLOGY, INC.
- Applicant Address: 450 Holger Way San Jose, CA 95134 US
- Assignee: SILICON STORAGE TECHNOLOGY, INC.
- Current Assignee: SILICON STORAGE TECHNOLOGY, INC.
- Current Assignee Address: 450 Holger Way San Jose, CA 95134 US
- Agency: LIMBACH, Alan, A.
- Priority: US14/589,656 20150105
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L27/115 ; H01L29/66 ; H01L29/788 ; G11C16/04
Abstract:
A non- volatile memory cell including a substrate having first and second regions with a channel region therebetween. A floating gate is disposed over and insulated from a first portion of the channel region which is adjacent the first region. A select gate is disposed over and insulated from a second portion of the channel region which is adjacent to the second region. The select gate includes a block of polysilicon material and a work function metal material layer extending along bottom and side surfaces of the polysilicon material block. The select gate is insulated from the second portion of the channel region by a silicon dioxide layer and a high K insulating material layer. A control gate is disposed over and insulated from the floating gate, and an erase gate is disposed over and insulated from the first region, and disposed laterally adjacent to and insulated from the floating gate.
Information query
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