公开(公告)号：EP1636877B1

公开(公告)日：2012-09-12

申请号：EP04776566.4

申请日：2004-06-14

申请人： Cymer, Inc.

发明人： SAETHRE, Robert, B. ,  MELCHER, Paul, C. ,  FERGUSON, George, X.

IPC分类号： H01R13/62

CPC分类号： H01R13/53

公开(公告)号：EP1339519A2

公开(公告)日：2003-09-03

申请号：EP01975156.9

申请日：2001-05-23

申请人： Cymer, Inc.

发明人： NEWMAN, Peter, C. ,  DUFFEY, Thomas, P. ,  PARTLO, William, N. ,  SANDSTROM, Richard, L. ,  MECHER, Paul, C. ,  JOHNS, David, M. ,  SAETHRE, Robert, B. ,  FLEUROV, Vladimir, B. ,  NESS, Richard, M. ,  RETTIG, Curtis, L. ,  SHANNON, Robert, A. ,  UJAZDOWSKI, Richard, C. ,  ROKNI, Shahryar ,  PAN, Xiaojiang, J. ,  KULGEYKO, Vladimir ,  SMITH, Scott, T. ,  ANDERSON, Stuart, L. ,  ALGOTS, John, M. ,  SPANGLER, Ronald, L. ,  Fomenkov, Igor V.

IPC分类号： B23H1/00

CPC分类号： H01S3/225 ,  G01J1/4257 ,  G01J3/027 ,  G01J9/0246 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70483 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/137 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2308

摘要： The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5mJ or greater. A preferred embodiments is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.

公开(公告)号：EP1391017A1

公开(公告)日：2004-02-25

申请号：EP02769658.2

申请日：2002-04-15

申请人： Cymer, Inc.

发明人： WITTAK, Christian, J. ,  PARTLO, William, N. ,  SANDSTROM, Richard, L. ,  MELCHER, Paul, C. ,  JOHNS, David, M. ,  SAETHRE, Robert, B. ,  NESS, Richard, M. ,  RETTIG, Curtis, L. ,  SHANNON, Robert, A. ,  UJAZDOWSKI, Richard, C. ,  ROKNI, Shahryar ,  SMITH, Scott ,  ANDERSON, Stuart, L. ,  ALGOTS, John, M. ,  SPANGLER, Ronald, L. ,  FOMENKOV, Igor ,  STEIGER, Thomas, D. ,  EMILO, Jerome, A. ,  TITUS, Clay, C. ,  IVASCHENKO, Alex P. ,  ZAMBON, Paolo ,  PADMABANDU, Gamaralalage G. ,  BRANHAM, Mark S. ,  PHATAK, Sanjay ,  CYBULSKI, Raymond

IPC分类号： H01S3/10 ,  H01S3/04 ,  H01S3/22 ,  H01S3/223

CPC分类号： G03F7/70025 ,  G03F7/70933 ,  H01S3/0057 ,  H01S3/036 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/0975 ,  H01S3/134 ,  H01S3/139 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2366

摘要： The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter (4K) with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror, which is in a line narrowing module (15K) and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors (16K and 17K) drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the the discharge region during the approximately 0.25 milliseconds between pulses.

公开(公告)号：EP1644945A2

公开(公告)日：2006-04-12

申请号：EP04776564.9

申请日：2004-06-14

申请人： Cymer, Inc.

发明人： NESS, Richard, M. ,  PARTLO, William, N. ,  MELCHER, Paul, C. ,  FERGUSON, George, X. ,  SAETHRE, Robert, B.

IPC分类号： H01F27/08

CPC分类号： H01F27/266 ,  H01F27/025 ,  H01F27/10 ,  H01S3/097

摘要： An apparatus and method for providing cooling to a magnetic circuit element having a magnetic core disposed around a centrally located core support member (200) having at least one core support member wall (210) is disclosed which may comprise a core support coolant inlet (282); a core support coolant outlet (283); a plurality of interconnected coolant flow passages (270) contained within the core support member wall and inter connected an arranged to pass coolant from one coolant flow passage to the next within the core support member wall along a coolant flow path within at least a substantial portion of the core support member wall from the core support coolant inlet to the core support coolant outlet. The apparatus may also comprise each core support coolant flow passage is in fluid communication with a fluid communication plenum at each end of each respective core support coolant flow passage, with each respective fluid communication plenum forming an outlet plenum for at least a first one of the respective core support coolant flow passages and an inlet plenum for at least a second one of the respective core support coolant flow passages along the coolant flow path from the core support coolant inlet to the core support coolant outlet.

公开(公告)号：EP1636877A2

公开(公告)日：2006-03-22

申请号：EP04776566.4

申请日：2004-06-14

申请人： Cymer, Inc.

发明人： SAETHRE, Robert, B. ,  MELCHER, Paul, C. ,  FERGUSON, George, X.

IPC分类号： H01R13/62

CPC分类号： H01R13/53

摘要： An apparatus and method for electrically connecting two closely positioned high voltage modules with little or no bend and without any loops in an electrical interconnecting coaxial cable, is disclosed, which may comprise a high voltage connector attached to at least a portion of the cable on at least one end of the cable; a push through high voltage connector receptor within one module; and a disconnection mechanism within the one module adapted to move the high voltage connector and the at least a portion of cable to which the high voltage connector is attached through the connector receptor from a contact position to a housed position in a direction away from the other module to which high voltage connection is to be made. The high voltage connector receptor may comprise an open cylindrical connector with a contacting surface contained on the interior wall of the cylindrical connector. The apparatus may further comprise an interlock mechanism in operative connection with the disconnection mechanism and adapted to provide an indication of the high voltage connector being in a position other than in the contact position relative to the connector receptor, and an engaging mechanism engaging the cable and holding the cable in a fixed position relative to the disconnection mechanism as the high voltage connector moves between the contact position and the housed position. The apparatus may further comprise a clamping mechanism in cooperative connection with the disconnection mechanism when the high voltage connector is in the contact position and cooperative with the clamping mechanism to prevent the high voltage connector from moving from the contact position. The invention may also include a retractable connector within a second module moveable toward the first module from a retracted position into an extended position, in which extended position electrical contact is made with the second hih voltage connector.