摘要:
A method of forming semi-insulating gallium arsenide by oxygen doping in a metal-organic vapor phase epitaxy system. The metal organic reactant gas containing aluminum and oxygen is introduced into the reaction chamber (10) together with the gallium and arsenic containing reactant gases. A deep level oxygen impurity is incorporated into the growing gallium arsenide layer to form semi-insulating gallium arsenide.
摘要:
Picosecond response photoconductors and photoresponsive elements can be provided that retain high carrier mobility and yet have short lifetime by providing on a crystal mismatched substrate (1) a textured layer (2) of domain regions (3) wherein the domain size is such that the lifetime (t) is proportional to the square of the size (S²) divided by the diffusion coefficient (D) of the semiconductor (i.e. t ≈ S²/D) material. The crystalline orientation in the domains with respect to the substrate is maintained. An embodiment is an approximately 0.1 micron thick textured layer of GaAs (2) grown on a hexagonal monocrystalline Al₂O₃ substrate (1) having domains approximately 1.0 micron with a carrier lifetime about 5 picoseconds and a carrier mobility of about 80 cm² volt⁻¹ sec⁻¹.
摘要:
A portion of a first layer (14; 34) exposed through an opening (20; 40) in a second layer (18; 38) is chemically converted to a compound having properties different to those of the first layer. By arranging that the conversion to the compound extends beyond the boundary of the opening and removing the compound, further material (24) can be depositied onto the substrate (12) through the opening (201. In this manner, a self-aligned semiconductor device can be formed with the further material (24) serving as the gate of the device. If the conversion to the compound is limited to the portion of the first layer directly below the opening (40) and the compound has an index of refraction different from that of the first layer, the converted portion (36) can serve as an optical waveguide.
摘要:
A method of depositing III-V compounds like III-V semiconductor materials on a semiconductor substrate comprising the step of: introducing at least one organometallic compound containing a Group III metal and at least one compound of a Group V element into a reaction chamber at temperatures and pressures sufficient to epitaxially deposit at least one III-V compound on a substrate, like a semiconductor substrate. The method is further directed to selectively growing III-V compounds on a masked substrate.
摘要:
A method of depositing III-V compounds like III-V semiconductor materials on a semiconductor substrate comprising the step of: introducing at least one organometallic compound containing a Group III metal and at least one compound of a Group V element into a reaction chamber at temperatures and pressures sufficient to epitaxially deposit at least one III-V compound on a substrate, like a semiconductor substrate. The method is further directed to selectively growing III-V compounds on a masked substrate.
摘要:
A portion of a first layer (14; 34) exposed through an opening (20; 40) in a second layer (18; 38) is chemically converted to a compound having properties different to those of the first layer. By arranging that the conversion to the compound extends beyond the boundary of the opening and removing the compound, further material (24) can be depositied onto the substrate (12) through the opening (201. In this manner, a self-aligned semiconductor device can be formed with the further material (24) serving as the gate of the device. If the conversion to the compound is limited to the portion of the first layer directly below the opening (40) and the compound has an index of refraction different from that of the first layer, the converted portion (36) can serve as an optical waveguide.