摘要:
The present invention is a conductive polymer composition containing a π-conjugated conductive polymer, a polyanion, and a gemini surfactant. There can be provided a conductive polymer composition that has excellent antistatic performance and excellent application properties, does not adversely affect a resist, and can be suitably used in lithography using electron beam or the like.
摘要:
The present invention provides a conductive polymer composition which contains (A) a polyaniline-based conductive polymer having a repeating unit represented by the general formula (1), (B) a polyanion, and (C) a betaine compound,
wherein R A1 to R A4 independently represent a hydrogen atom, a halogen atom, or a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 20 carbon atoms and optionally containing a heteroatom; and R A1 and R A2 , or R A3 and R A4 may be bonded to each other to form a ring. There can be provided a conductive polymer composition that has excellent antistatic performance and applicability, does not adversely affect a resist, and can be suitably used in lithography using electron beam or the like.
摘要翻译:本发明提供一种导电性聚合物组合物,其含有(A)具有由通式(1)表示的重复单元,(B)聚阴离子和(C)甜菜碱化合物)的聚苯胺系导电性聚合物,其中,R A1〜 R A4独立地表示氢原子,卤素原子或具有1-20个碳原子并且任选地含有杂原子的直链,支链或环状的一价烃基; 并且R A1和R A2或R A3和R A4可以彼此键合形成环。 可以提供具有优异的抗静电性能和适用性的导电聚合物组合物,不会对抗蚀剂产生不利影响,并且可以适用于使用电子束等的光刻。
摘要:
The present invention is a conductive polymer composition containing: a composite containing a n-conjugated polymer (A) and a polymer (B) shown by the following general formula (2); H 2 O (D) for dispersing the composite; and a water-soluble organic solvent (C). This provides a composition which has favorable filterability and film formability, and which is capable of relieving acidity and forming a conductive film with high transparency. Moreover, since the H 2 O dispersion of the conductive polymer compound is mixed with an organic solvent, the surface tension and the contact angle are so low that leveling property on a substrate is imparted. The composition is usable in droplet-coating methods. Since an organic solvent having a higher boiling point than H 2 O is used as the organic solvent, the composition can avoid solid content precipitation around a nozzle and solid content precipitation due to drying between ejecting the liquid material from a nozzle tip and landing on a substrate.
摘要:
The present invention provides a conductive polymer composition which contains (A) a polyaniline-based conductive polymer having a repeating unit represented by the general formula (1), (B) a polyanion, and (C) a betaine compound, wherein R A1 to R A4 independently represent a hydrogen atom, a halogen atom, or a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 20 carbon atoms and optionally containing a heteroatom; and R A1 and R A2 , or R A3 and R A4 may be bonded to each other to form a ring. There can be provided a conductive polymer composition that has excellent antistatic performance and applicability, does not adversely affect a resist, and can be suitably used in lithography using electron beam or the like.