METHOD FOR PRODUCING METAL FILTERS
    3.
    发明公开
    METHOD FOR PRODUCING METAL FILTERS 有权
    HERSTELLUNGSVERFAHRENFÜRMETALLFILTER

    公开(公告)号:EP2767618A1

    公开(公告)日:2014-08-20

    申请号:EP12839364.2

    申请日:2012-10-09

    IPC分类号: C25D1/08 C25D1/20

    摘要: A method for producing a metal filter comprising a lamination step of laminating a photosensitive resin composition on a copper substrate to form a photosensitive resin composition layer, an exposure step of irradiating a predetermined portion of the photosensitive resin composition layer with an active light and light-curing the exposed portion to form a cured material of the photosensitive resin composition, a development step of removing a portion other than the cured material of the photosensitive resin composition of the photosensitive resin composition layer by development to form a resist pattern composed of the cured material of the photosensitive resin composition on the copper substrate, a plating step of metal plating the resist-patterned copper substrate to form a plated layer, a dissolution step of removing the copper substrate with chemical dissolution to obtain a structure composed of the plated layer and the cured material of the photosensitive resin composition, and a stripping step of removing the cured material of the photosensitive resin composition from the structure to obtain the plated layer, wherein the plated layer is the metal filter is useful because it is possible to produce a metal filter in which there are not damages such as wrinkles, folds, scars, and curls and deformation of fine through-holes.

    摘要翻译: 一种金属过滤器的制造方法,其特征在于,包括将感光性树脂组合物层叠在铜基板上以形成感光性树脂组合物层的层叠工序,使用活性光照射光敏树脂组合物层的规定部分的曝光工序, 固化曝光部分以形成感光性树脂组合物的固化材料,显影步骤,通过显影除去感光性树脂组合物层的感光性树脂组合物的固化物以外的部分,形成由固化物构成的抗蚀剂图案 所述感光性树脂组合物在所述铜基板上的电镀步骤,对所述抗蚀剂图案化铜基板进行金属电镀以形成镀层的镀敷步骤,通过化学溶解除去所述铜基板的溶解步骤,得到由所述镀层和 感光性树脂组合物的固化物,和a 从该结构中除去感光性树脂组合物的固化物的剥离工序,得到镀层,其中,镀层是金属过滤器是有用的,因为可以制造没有损伤如金属过滤器的金属过滤器, 褶皱,疤痕,以及细通孔的卷曲和变形。

    PHOTOPOLYMER STAMP MANUFACTURING PROCESS AND PREPARATION SYSTEM AND PHOTOPOLYMER STAMP DIES
    5.
    发明公开
    PHOTOPOLYMER STAMP MANUFACTURING PROCESS AND PREPARATION SYSTEM AND PHOTOPOLYMER STAMP DIES 审中-公开
    感光树脂冲压制造工艺和劳动预备制度和光聚合物PUNCH

    公开(公告)号:EP2356515A1

    公开(公告)日:2011-08-17

    申请号:EP09792688.5

    申请日:2009-09-18

    IPC分类号: G03F7/00

    摘要: A photopolymer plate manufacturing process utilizes a modified substrate and mask to generate pre-cut and interchangeable single and multi-part stamp dies. Using a modified substrate and mask, a conventional photopolymer plate can be manufactured with a plurality of independent pattern or stamp areas that are readily removable and replaceable on the substrate and do not require cutting. The resulting material is also securable to a plastic stamp or the like without an adhesive, thereby facilitating a stamp with exchangeable patterns. Additionally, with a further modified mask, the stamp dies can be manufactured in two or more separable pieces, which can then be selectively interchanged among multiple stamp dies. An alignment tool facilitates installation of the stamp dies on the stamp mechanism.

    PROCESS FOR PRODUCING ORIGINAL DISC FOR OPTICAL DISC AND ORIGINAL DISC FOR OPTICAL DISC
    9.
    发明公开
    PROCESS FOR PRODUCING ORIGINAL DISC FOR OPTICAL DISC AND ORIGINAL DISC FOR OPTICAL DISC 有权
    工艺用于生产原始数据载体,以执行光盘光盘及其原盘

    公开(公告)号:EP1691362A1

    公开(公告)日:2006-08-16

    申请号:EP04799948.7

    申请日:2004-11-30

    申请人: SONY CORPORATION

    IPC分类号: G11B7/26 G03F7/004

    摘要: An inorganic resist layer made of an incomplete oxide of a transition metal is formed as a film onto a substrate by a sputtering method. A single element or alloy of the transition metal, or an oxide of them is used as a target material. Oxygen or nitrogen is used as a reactive gas. Oxygen concentration of the inorganic resist layer is made different in the thickness direction by changing a reactive gas ratio or a film forming power. A master disc (for an optical disc) in which fine concave/convex patterns such as pits, grooves, and the like have been formed by exposing and developing the inorganic resist layer is formed. Since sensitivity rises with an increase in oxygen concentration, the sensitivity can be made different in the thickness direction of the inorganic resist layer and the concave/convex shapes of different depths can be formed on the same disc.

    摘要翻译: 由过渡金属的不完全氧化物制成的无机抗蚀剂层通过溅射法形成为膜到基材上。 过渡金属,或它们的氧化物中的单个元件或合金被用作靶材料。 氧或氮用作反应气体。 无机抗蚀剂层的氧浓度是通过改变反应气体比率或成膜功率由在厚度方向上不同。 一个主盘(用于向光盘),在该微细凹/凸图案:如凹坑,凹槽等的已通过曝光和显影无机光刻胶层被形成。 由于灵敏度在氧浓度以增加升高时,灵敏度可以由在无机的厚度方向上不同的抗蚀剂层和凹/不同深度的凹凸形状可以在同一盘上形成。