公开(公告)号：EP1183737A1

公开(公告)日：2002-03-06

申请号：EP00932363.5

申请日：2000-05-11

申请人： INTEL CORPORATION

发明人： ASSADI, Azar ,  MOSSAHEBI, Parvin ,  SENGUPTA, Kabul

IPC分类号： H01L31/0232 ,  G02B3/00 ,  G03F7/00 ,  G02B6/12

CPC分类号： G02B3/0018 ,  G02B3/0056 ,  G02B6/1221 ,  G02B6/1245 ,  G02B6/4204 ,  G03F7/0005 ,  H01L31/02325 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

摘要： A photosensitive device (46) with a microlens array (44) may be packaged for surface mount packaging (48) and subsequent mass reflow processing without significantly degrading the optical performance of the microlens. The microlens may be formed using a series of heat steps of increasing time and temperature. In addition, the microlens may be bleached to prevent degradation of its optical transmissivity at temperatures normally associated with surface mount techniques.

摘要翻译： 具有微透镜阵列的光敏器件可以被封装以用于表面贴装封装和随后的质量回流处理，而不会显着降低微透镜的光学性能。 微透镜可以使用一系列增加时间和温度的热步骤形成。 此外，微透镜可以被漂白以防止在通常与表面贴装技术相关的温度下其光透射率的降低。

公开(公告)号：EP1023622A1

公开(公告)日：2000-08-02

申请号：EP98958844.7

申请日：1998-09-25

申请人： Deutsche Telekom AG

发明人： KOOPS, Hans, Wilfried, Peter ,  SHERIDAN, John ,  ZÜRN, Martin

IPC分类号： G02B6/12

CPC分类号： B82Y20/00 ,  G01J3/0256 ,  G02B6/1225 ,  G03F7/0005

摘要： The problem of the wavelength-selective mixture or distribution of polychromatic light consists, when decomposing the spectrum into several spectrally delimited light beams of minor wavelength width, which are the determinant feature of a spectrometer, in making them as easy and reliable to select as possible. When mixing polychromatic light, lights having only one wavelength are successively fed to each member of a selective chain to form a partial spectrum, and when distributing chromatic light, one wavelength is filtered out of each member and the remaining spectrum is fed after reflection to the next member for being further decomposed. A chain of photonic crystals is used both for mixing and distributing and a wavelength-selective coupler/decoupler is associated to each crystal. The fields of application of the invention are, besides the wavelength-selective mixture or distribution of polychromatic light, also spectrometric measurements and thus environment monitoring.

公开(公告)号：EP0978764A1

公开(公告)日：2000-02-09

申请号：EP99115407.1

申请日：1999-08-04

申请人： Toyo Gosei Kogyo Co., Ltd.

发明人： Tochizawa, Noriaki, c/o Toyo Gosei Kogyo Co., Ltd. ,  Miyazaki, Mitsuharu, c/o Toyo Gosei Kogyo Co.,Ltd. ,  Ito, Takaho, c/o Toyo Gosei Kogyo Co., Ltd.

IPC分类号： G03F7/038 ,  G03F7/00

CPC分类号： G03F7/0005 ,  G03F7/0388 ,  Y10S430/11

摘要： The invention provides a photosensitive resin and a photosensitive resin composition having excellent water resistance after hardening, excellent developability, and excellent patterning characteristics, and a pattern formation method making use of the composition. The invention provides a saponified PVA photosensitive resin which contains structural units represented by formulas (I) and (II):
the content of the structural units represented by formulas (I) and (II) in the resin being 0.5-10 mol% with respect to the entirety of the structural units of the saponified product of PVA.

摘要翻译： 本发明提供一种感光性树脂和具有硬化后优异的耐水性，优异的显影性，和优异的图案特性的光敏树脂组合物，和图案形成方法，利用该组合物的。 本发明提供一种含有由式（I）和（II）所示结构单元的皂化的PVA光敏树脂：由式（I）表示的结构单元的含量和（II）中的树脂为0.5〜10摩尔 ％，相对于PVA的皂化产物的结构单元整体。

公开(公告)号：EP0913715A2

公开(公告)日：1999-05-06

申请号：EP98120514.9

申请日：1998-10-29

申请人： Sumitomo Chemical Company, Limited

发明人： Takemura, Shinichi ,  Yasunori, Yukio

IPC分类号： G02B5/02 ,  G02F1/1335

CPC分类号： G02B5/0236 ,  G02B5/0268 ,  G03F7/0005

摘要： The present invention provides a method for producing a light control sheet having a function of scattering an incident light of a particular angle range comprising the steps of:(1)forming a layer comprising photopolymerizable composition on a sheet,(2)curing the layer by irradiation with light from a particular direction,(3)laminating a transparent film on the cured layer to achieve adhesion thereof,(4)irradiating the cured layer with light through the transparent film.
According to the method of the present invention, a light control sheet which provides no sticky feeling, and has a sufficient commercial value, can be producing by means of a relatively simple apparatus with stability.

公开(公告)号：EP0714348A4

公开(公告)日：1998-05-06

申请号：EP94916494

申请日：1994-02-25

申请人： PHYSICAL OPTICS CORP

发明人： PETERSEN JOEL ,  LERNER JEREMY

IPC分类号： B29D11/00 ,  G02B5/02 ,  G02B5/32 ,  G02B19/00 ,  G02F1/1335 ,  G02F1/13357 ,  G03F7/00 ,  G03H1/02 ,  G03H1/04 ,  G03H1/18 ,  G03H1/20 ,  G03F7/04

CPC分类号： G02B5/0252 ,  G02B5/0268 ,  G02B5/0278 ,  G02B5/0284 ,  G02B6/0008 ,  G02B6/06 ,  G02F1/133606 ,  G02F1/133611 ,  G03F7/0005 ,  Y10S362/80

摘要： A light source destructuring and shaping device (6) which both homogenizes and imparts predetermined directionality to light rays emanating from a light source (7) is disclosed. The device comprises a micro-sculpted surface structure which controls the direction in which light propagates after reflection from, or transmission through, the device. The sculpted surface structure also homogenizes light propagating through it with predetermined directionality. The device may be used in any application which requires homogenation of light and which would benefit from being able to impart directionality to light waves propagating from a light source. Applications include existing diffuser applications and applications where it is not practical to use conventional diffusers. The homogenizing and shaping device achieves these with high transmission or reflection efficiency and reduced side lobes.

摘要翻译： 一种用于入射光的均质器，包括：一片可压纹材料，其包括一个微雕刻表面浮雕结构，其（i）控制光传播的方向和（ii）以方向性均匀化光，已经通过复制在可压印片 提供另一种微雕刻表面结构，其中（i）控制光传播的方向和（ii）以方向性均匀化光，另一个微雕刻表面结构已经在具有折射率的光敏介质中形成：（a） 使用相干光在感光介质中产生随机，无序和非平面斑点，相干光已经通过全息漫射器扩散，以便限定光敏介质的折射率的非不连续和平滑变化的变化，平滑 变化的变化将准直光散射成具有平滑亮度变化的受控图案; 和（b）显影光敏介质。 从均质器入射并引导的光被引导到输出区域，均化器控制从均化器发出的光的方向到输出区域，以便相对于输出区域外的区域增加输出区域的亮度 区。

公开(公告)号：EP0640223B1

公开(公告)日：1998-02-04

申请号：EP94916820.7

申请日：1993-11-27

申请人： ROBERT BOSCH GMBH

发明人： MAYER, Klaus-Michael

IPC分类号： G02B6/42 ,  G02B6/28 ,  G02B6/12

CPC分类号： G02B6/138 ,  G02B6/2821 ,  G02B6/30 ,  G02B6/3839 ,  G03F7/0005

公开(公告)号：EP0517163B1

公开(公告)日：1997-11-05

申请号：EP92109293.8

申请日：1992-06-02

申请人： SONY CORPORATION

发明人： Tsumori, Toshiro

IPC分类号： G03F7/00 ,  G02B3/00

CPC分类号： G02B3/0018 ,  G03F7/0005 ,  G03F7/001

公开(公告)号：EP0753765A2

公开(公告)日：1997-01-15

申请号：EP96870091.4

申请日：1996-07-10

申请人： INTERUNIVERSITAIR MICRO-ELEKTRONICA CENTRUM VZW

发明人： Heremans, Paul ,  Borghs, Gustaaf

IPC分类号： G02B3/00 ,  G03F7/00

CPC分类号： G02B3/0018 ,  G02B3/0056 ,  G03F7/0005 ,  G03F7/001

摘要： A method is described of forming refractive microlenses comprising the steps of
depositing or growing a first transparent layer on a substrate; depositing or growing a second transparent layer on said first transparent layer ; forming a columnar structure in said second transparent layer; forming a pillar in said first transparent layer using said columnar structure as a mask, whereby said pillar is self-aligned under said columnar structure and said pillar has a cross-sectional area smaller than or equal to the cross-sectional area of said columnar structure ; thereafter reflowing said second transparent layer of said columnar structure while said pillar remains esssentially unaltered, whereby a structure is formed on top of said pillar, said structure having a ground plane with an area smaller than or equal to the original cross-sectional area of said columnar structure ; and solidifying said structure.
Due to the surface tension, the pillar underneath the microlens confines the reflow of the microlens to an area smaller or equal to the original cross-sectional area of the lens-forming columnar structure. A major effect of this is that the microlens has a strong curvature, and hence, a large numerical aperture.

摘要翻译： 描述了形成折射微透镜的方法，其包括以下步骤：在衬底上沉积或生长第一透明层; 在所述第一透明层上沉积或生长第二透明层; 在所述第二透明层中形成柱状结构; 使用所述柱状结构作为掩模在所述第一透明层中形成柱，由此所述柱在所述柱状结构下自对准，并且所述柱的横截面面积小于或等于所述柱状结构的横截面面积 ; 其后回流所述柱状结构的所述第二透明层，同时所述柱保持基本不变，由此在所述柱的顶部上形成结构，所述结构具有面积小于或等于所述柱状结构的原始横截面积 柱状结构; 并固化所述结构。 由于表面张力，微透镜下方的柱子将微透镜的回流限制在小于或等于透镜形成柱状结构的原始横截面积的区域。 这样做的主要影响是微透镜具有较强的曲率，因此具有较大的数值孔径。

公开(公告)号：EP0670052A1

公开(公告)日：1995-09-06

申请号：EP94906428.0

申请日：1993-11-15

申请人： BROOK, John ,  PAGE, Joseph

发明人： HUGLE, William Bell ,  DANDLIKER, René ,  HERZIG, Hans, Peter

IPC分类号： G02B3 ,  G02B5 ,  G03B27 ,  G03F7

CPC分类号： G03F7/70791 ,  G02B3/0018 ,  G02B3/0056 ,  G02B3/0062 ,  G02B5/1876 ,  G02B5/1885 ,  G03F7/0005 ,  G03F7/2002 ,  G03F7/70275 ,  G03F7/70316 ,  G03F7/70475

摘要： Microlithography techniques have provided a means for the development of many useful devices from microcircuits, which made the computer era possible, to micromechanical devices such as motors that are only a few tens of microns across. A new use of a microdevice is presented here which serves to 'payback' the art of microlithography as it is a significant contribution thereto. The device of the invention is a unique microdevice made with advanced microlithography techniques which when completed can be used as a new exposure tool for microlithography. A lens array can be as thin as 1/40 of the thickness of the page that this text is printed on, yet have thereon an arrangement of optical lenses powerful enough to replace very sophisticated and bulky, million dollar precision optics. An array of lenses can be fabricated with binary optical device and other techniques. The array having unlimited area and field of regard can be used as an exposure tool for very large area microdevices such as flat panel displays without the requirement of step and repeat operations which severely limit the throughput and yield in modern manufacturing methods.

公开(公告)号：EP0648343A1

公开(公告)日：1995-04-19

申请号：EP94915543.0

申请日：1994-04-26

申请人： JENOPTIK Technologie GmbH

发明人： KLEY, Ernst-Bernhard

IPC分类号： G02B3 ,  G03F7

CPC分类号： G03F7/0005 ,  G02B3/08 ,  G03F7/2022 ,  G03F7/2051

摘要： In a lithographically produced stepped lens with a Fresnel surface structure and a process for its production the high potential illumination speed of fast electron beam irradiation installations operating with a variable rectangular radiation cross section is to be converted into great efficacity for the production of Fresnel-type stepped lenses and thus reduce the quantity of data required. According to the invention, radiation dose distributions corresponding to cylindrical lenses, are applied in superimposed fashion so that at least one of the radiation dose distributions corresponds to one Fresnel cylindrical lens. The invention permits the effective lithographic production of novel lens structures with any lens curvature from radially spherical to elliptical.

摘要翻译： PCT号 PCT / EP94 / 01307秒。 371日期十二月 28，1994秒。 102（e）中的日期十二月 28，1994年PCT提起1994年4月26日的PCT公布。 号 WO94 / 25881的PCT公布。 十一月日期10，1994In阶梯透镜与由光刻产生的菲涅耳表面结构和用于制造它们的方法，高速电子束曝光系统的高电位曝光速度，其与可变矩形光束的横截面的工作被转换在搜索 的方式没有台阶菲涅耳型透镜可以高效率地制造，并且，在这样做时，数据的所需量减少。 。根据本发明，其对应于柱面透镜的辐射剂量分布露出一个在所述辐射剂量分布对应于菲涅耳型柱面透镜的其他的至少一个。 用任何期望的透镜曲率透镜结构，从径向球形到椭圆形的，可以有效地通过光刻由盘游离缺失过程中产生的。