公开(公告)号：EP2036700A3

公开(公告)日：2009-06-10

申请号：EP08252969.4

申请日：2008-09-08

Applicant: Ricoh Company, Ltd.

Inventor： Takai, Atsushi ,  Ishida, Kazuo ,  Ishibe, Atsushi ,  Kamoi, Sumio ,  Hirakawa, Toshikazu ,  Katabami, Hiroshi

IPC: B29C65/48 ,  G01B21/30 ,  G03G15/20

CPC classification number: B29C65/4835 ,  B29C65/18 ,  B29C65/48 ,  B29C65/484 ,  B29C65/4875 ,  B29C65/4885 ,  B29C65/526 ,  B29C66/1122 ,  B29C66/43 ,  B29C66/4324 ,  B29C66/71 ,  B29C66/73921 ,  B29C66/73941 ,  B29C66/81261 ,  B29C66/82421 ,  B29C66/9141 ,  B29C66/91411 ,  B29C66/91445 ,  B29C66/919 ,  B29C66/929 ,  B29C66/949 ,  B29C2793/0081 ,  B29K2071/00 ,  B29K2079/08 ,  B29K2081/04 ,  B29K2081/06 ,  B29K2083/00 ,  B29K2101/10 ,  B29K2995/0016 ,  B29K2995/0017 ,  B29L2009/00 ,  B29L2031/7092 ,  B29L2031/767 ,  G01B21/30 ,  G03G15/2053 ,  G03G2215/2032 ,  Y10T156/1066

Abstract: A heat-resistant endless resin belt (10) including a heat-resistant resin sheet, which can be employed in a thermal fixing apparatus, wherein the sheet includes two cutting work parts in an inclined shape. The two parts are overlapped with each other and bonded with an adhesive to form a bonding part. An external shape displacement f (x), measured via a flatness measuring apparatus, which scans the belt (10) in a width direction thereof, satisfies a following formula ∫ o x | f x - g x | dx ≤ XL 6800 , wherein "X" (mm) is a length of the belt (10) in a width direction thereof ; "L" (mm) is a perimeter of the belt (10) and "g (x)" represents a displacement of an ideal shape of the heat-resistant resin belt (10), when g (x) = C (a constant), a left side of the formula is set to be a minimum; whilst when g (x) is a variable, the displacement of the ideal shape of the heat-resistant resin belt (10) is set.

公开(公告)号：EP1845333B1

公开(公告)日：2008-11-19

申请号：EP07007435.6

申请日：2007-04-11

Applicant: Mitutoyo Corporation

Inventor： Inohara, Kouzou ,  Hama, Nobuyuki ,  Kojima, Toru

IPC: G01B5/00 ,  G01B5/20 ,  G01B5/28 ,  G01B7/28 ,  G01B7/34 ,  G01B21/20 ,  G01B21/30 ,  B23Q17/20

CPC classification number: G01B21/30 ,  G01B5/20 ,  G01B5/28

公开(公告)号：EP1028306B1

公开(公告)日：2008-10-15

申请号：EP98940599.8

申请日：1998-08-28

Applicant: Mitutoyo Corporation ,  Mori Seiki Co., Ltd. ,  OKUMA CORPORATION ,  Yamazaki, Kazuo

Inventor： YAMAZAKI, Kazuo ,  ZHANG, Yuwu, Mitutoyo Corporation ,  UNEME, Masayoshi, Mori Seiki Co. Ltd. ,  FUKAYA, Yasushi, Okuma Corporation

IPC: G01B21/00 ,  G01B21/04 ,  G01B21/30

CPC classification number: G01B21/04 ,  G01B21/00

Abstract: A part program is analyzed and measurement information or measurement conditions are extracted in the measurement of coordinates and surface properties under control of the part program. Optimal measurement conditions in the actual measurement are reflected on the part program by storing the extracted measurement conditions rewritably, so that actual measurement conditions can be added to the subsequent measurement control.

公开(公告)号：EP1942311A1

公开(公告)日：2008-07-09

申请号：EP07254789.6

申请日：2007-12-12

Applicant: Sonoco Development, Inc.

Inventor： Campbell, Edgar Robert ,  Moffat, Jeffrey Thomas ,  Cumbee, Robert Shean

IPC: G01B5/06 ,  G01B5/28 ,  G01B21/30 ,  B21B38/02 ,  G01N3/08

CPC classification number: G01B5/061 ,  G01B5/285 ,  G01B21/30 ,  G01N33/34

Abstract: A device and a method for measuring and quantifying waviness of sheet materials such as paper. The device in accordance with one embodiment comprises a base having a planar, smooth, and level upper surface for supporting a stack of sheets thereon, a plate-shaped weight for placing atop the stack of sheets, and a measuring device for measuring a vertical distance between a datum surface defined by the weight and a datum surface defined by the base. The measured distance is an indication of the height of the stack. In a preferred embodiment, the device also includes a programmed processor operable to calculate a "Wavy Ratio" based on the measured actual height H of the stack and a calculated "ideal" height of the stack, as Wavy Ratio = H / (n · t), where n is the number of sheets and t is the average caliper of the sheets.

Abstract translation: 用于测量和定量纸张材料如纸的波纹的装置和方法。 根据一个实施例的装置包括具有平面，平滑和平坦的上表面的基座，用于支撑其上的一叠片材，用于放置在一叠片材上的板状重物，以及用于测量垂直距离的测量装置 在由重量限定的基准表面和由基座限定的基准面之间。 测量的距离是堆叠高度的指示。 在优选实施例中，装置还包括编程处理器，其可操作以基于所测量的堆叠的实际高度H和所计算的堆叠的“理想”高度来计算“波浪比”，如波形比= H /（n· t），其中n是纸张的数量，t是纸张的平均厚度。

公开(公告)号：EP1879015A1

公开(公告)日：2008-01-16

申请号：EP06715044.1

申请日：2006-03-02

Applicant: Japan Science and Technology Agency

Inventor： KAWAKATSU, Hideki

IPC: G01N13/10 ,  G01B11/00 ,  G01B21/30

CPC classification number: G01Q20/02 ,  G01F1/661 ,  G01P3/366 ,  G01S17/58

Abstract: There is provided a heterodyne laser Doppler probe capable of realizing the compatibility between its photoexcitation efficiency and speed measurement efficiency, and a measurement system using the same is also disclosed. The heterodyne laser Doppler probe introduces excitation light for photoexcitation from a first optical path (2) to an optical probe (1) and measurement light for heterodyne laser Doppler measurement from a second optical path (4) to the optical probe (1). After emission from the first optical path (2), the excitation light is introduced through a reflection mirror (3) and a beam splitter (6) into a focal lens (7), and then into a measurement object (excitation object) (8). On the other hand, the measurement light for heterodyne laser Doppler measurement is emitted from the second optical path (4) and passes through a 1/4 wavelength plate (5). Here, linearly polarized light is converted into circularly polarized light, and introduced through a beam splitter (5) and the focal lens (7) into the measurement object (excitation object) (8). The measurement light (signal light) reflected by the measurement object (excitation object) (8) passes through the same route to reach the 1/4 wavelength plate (5). By the 1/4 wavelength plate (5), the measurement light is converted from the circularly polarized light into the linearly polarized light, and the linearly polarized measurement light is returned through the second optical path (4) to the heterodyne laser Doppler measurement device.

Abstract translation: 提供了能够实现其光激发效率和速度测量效率之间的兼容性的外差激光多普勒探测器，并且还公开了使用其的测量系统。 外差激光多普勒探测器将用于光激发的激发光从第一光路（2）引入到光学探针（1），以及用于从第二光路（4）到光学探针（1）的外差激光多普勒测量的测量光。 在从第一光路（2）发射之后，将激发光通过反射镜（3）和分束器（6）引入焦点透镜（7）中，然后进入测量对象（激发对象）（8 ）。 另一方面，用于外差激光多普勒测量的测量光从第二光路（4）发射并通过1/4波长板（5）。 这里，线偏振光被转换为圆偏振光，并通过分束器（5）和焦点透镜（7）引入测量对象（激发对象）（8）。 由测量对象（激发对象）（8）反射的测量光（信号光）通过相同的路线到达1/4波长板（5）。 通过1/4波长板（5），将测量光从圆偏振光转换成线偏振光，并将线偏振测量光通过第二光路（4）返回到外差激光多普勒测量装置 。

公开(公告)号：EP1860396A1

公开(公告)日：2007-11-28

申请号：EP06715045.8

申请日：2006-03-02

Applicant: Japan Science and Technology Agency

Inventor： KAWAKATSU, Hideki

IPC: G01B11/00 ,  G01B21/30

CPC classification number: G01B9/0205 ,  G01B9/02056 ,  G01B2290/15 ,  G01Q20/02

Abstract: A low-cost homodyne laser interferometer probe of simple structure is provided which allows predetermined performance to be easily obtained by a simple adjustment, and a displacement measurement system using the same is also disclosed. The homodyne laser interferometer probe includes an optical fiber (1) for guiding light, a collimator lens (2) that receives the light from the optical fiber (1), a 1/4 wavelength plate (3) that receives light from the collimator lens (2) and that converts the light from linearly polarized light into circularly polarized light, a beam splitter (4) for dividing light from the 1/4 wavelength plate (3) into reference light and measurement light, a first focal lens (5) that receives the reference light from the beam splitter (4), a reflection mirror (6) for reflecting the reference light from the first focal lens (5), and a second focal lens (7) that receives the measurement light from the beam splitter (4). Here, the reference light from the reflection mirror (6) is returned to measurement means along the same route. The measurement light from the second focal lens (7) is applied to a measurement object (8), and the measurement light (signal light) from the measurement object (8) is returned to the measurement means along the same route.

Abstract translation: 提供了一种简单结构的低成本零差激光干涉仪探头，其通过简单的调节容易地获得预定的性能，并且还公开了使用该测量系统的位移测量系统。 零差激光干涉仪探头包括用于引导光的光纤（1），接收来自光纤（1）的光的准直透镜（2），接收来自准直透镜的光的1/4波片（3） （2），将来自线偏振光的光转换成圆偏振光;将来自1/4波长板（3）的光分成参考光和测量光的分束器（4），第一焦点透镜（5） 其接收来自分束器（4）的参考光，用于反射来自第一焦点透镜（5）的参考光的反射镜（6）和接收来自分束器的测量光的第二焦距透镜 （4）。 这里，来自反射镜（6）的参考光沿相同的路线返回到测量装置。 来自第二焦点透镜（7）的测量光被施加到测量对象（8），并且来自测量对象（8）的测量光（信号光）沿着相同的路线返回到测量装置。

公开(公告)号：EP1845361A1

公开(公告)日：2007-10-17

申请号：EP05819516.5

申请日：2005-12-22

Applicant: National University Corporation Hokkaido University

Inventor： OKAJIMA, Takaharu ,  TANAKA, Masaru ,  TOKUMOTO, Hiroshi

IPC: G01N13/16 ,  G01B21/30

CPC classification number: G01Q30/04 ,  G01Q60/32

Abstract: A surface position measuring method capable of measuring a position on a soft surface accurately and rapidly (real time), with low invasiveness. The method comprises the steps of measuring the spectrum of thermal oscillation of a cantilever with the distance between a cantilever tip and a sample surface being changed, extracting a fundamental mode component (spectrum area) from the obtained spectrum of thermal oscillation, and measuring a change in the spectrum area of thermal oscillation (spectrum area) with respect to the distance. A position at which the area of the cantilever thermal oscillation spectrum begins to change is evaluated as a position on the sample surface.

Abstract translation: 一种表面位置测量方法，能够精确，快速（实时）测量软表面上的位置，具有低侵入性。 该方法包括以下步骤：测量悬臂的热振荡频谱，其中悬臂尖和样品表面之间的距离被改变，从所获得的热振荡谱提取基模分量（谱面积），并测量变化 在频率范围内的热振荡（频谱面积）相对于距离。 将悬臂热振动光谱的面积开始变化的位置作为样品表面的位置进行评价。

公开(公告)号：EP1821065A1

公开(公告)日：2007-08-22

申请号：EP07003171.1

申请日：2007-02-14

Applicant: Sumitomo Electric Industries, Ltd.

Inventor： Ishibashi, Keiji, c/o Itami Works of ,  Tanaka, Noriko, c/o Itami Works of

IPC: G01B11/30 ,  G01B21/30

CPC classification number: G01B11/306

Abstract: A method of measuring warpage of a rear surface of a substrate includes a substrate detection step (S1), a best fit plane calculation step (S5), and a warpage calculation step (S6). Further, the method of measuring warpage of a rear surface of a substrate can further includes after the substrate detection step (S1) and before the best fit plane calculation step (S5): a noise removal step (S2) and an outer peripheral portion removal step (S3); the outer peripheral portion removal step (S3) and a smoothing step (S4); or the noise removal step (S2), the outer peripheral portion removal step (S3), and the smoothing step (S4). Thereby, a method of measuring warpage of a rear surface with a high surface roughness of a substrate can be provided.

Abstract translation: 测量基板的背面的翘曲的方法包括基板检测步骤（S1），最佳拟合平面计算步骤（S5）和翘曲计算步骤（S6）。 此外，测量基板的背面的翘曲的方法还可以包括在基板检测步骤（S1）和最佳拟合平面计算步骤（S5）之前：噪声去除步骤（S2）和外周部分去除 步骤（S3）; 外周部去除工序（S3）和平滑工序（S4）; 或噪声消除步骤（S2），外围部分去除步骤（S3）和平滑步骤（S4）。 因此，可以提供测量具有高基材表面粗糙度的后表面翘曲的方法。

公开(公告)号：EP1816100A1

公开(公告)日：2007-08-08

申请号：EP05809524.1

申请日：2005-11-22

Applicant: National University Corporation Kagawa University ,  Aoi Electronics Co. Ltd.

Inventor： HASHIGUCHI, Gen, F. OF ENG. NUC KAGAWA UNIVERSITY ,  HOSOGI, Maho, F. OF ENG. NUC KAGAWA UNIVERSITY ,  KONNO, Takashi, AOI ELECTRONICS CO., LTD.

IPC: B82B1/00 ,  B82B3/00 ,  B81B3/00 ,  G01B21/30 ,  G01N13/16

CPC classification number: B81C99/002 ,  G01Q60/38 ,  G01Q80/00 ,  Y10S977/902 ,  Y10S977/962

Abstract: A nanotweezer (1) according to the present invention includes: a supporting member (25); an observation probe (10) that projects out from the supporting member (25), and is used when observing a surface of a specimen; a movable arm (20) that is arranged next to the observation probe (10) projecting out from the supporting member (25), and makes closed or opened between the observation probe (10) and the movable arm (20) to hold or release the specimen held between the observation probe (10) and the movable arm (20); and a drive mechanism that drives the movable arm (20) so as to make closed or opened between the observation probe (10) and the movable arm (20), and the supporting member (25), the observation probe (10) and the movable arm (20) are each formed by processing a semiconductor wafer (30) through a photolithography process.

Abstract translation: 根据本发明的纳米锥体（1）包括：支撑构件（25）; 从支撑构件（25）伸出的观察探针（10），并且在观察试样的表面时使用; 设置在从所述支撑部件（25）突出的所述观察用探针（10）的旁边的可动臂（20），并且在所述观察探针（10）与所述可动臂（20）之间封闭或打开以保持或释放 所述试样保持在所述观察探针（10）和所述可动臂（20）之间; 以及驱动机构，其驱动所述可动臂（20）以在所述观察探针（10）和所述可动臂（20）之间关闭或打开，所述支撑部件（25），所述观察探针（10）和 可移动臂（20）各自通过通过光刻工艺处理半导体晶片（30）而形成。

公开(公告)号：EP1770357A1

公开(公告)日：2007-04-04

申请号：EP05748496.6

申请日：2005-06-06

Applicant: TOKYO SEIMITSU CO.,LTD.

Inventor： KATAMACHI, Shouzou c/o Tokyo Seimitsu Co., Ltd.

IPC: G01B21/30

CPC classification number: G01B5/201

Abstract: Problems to be solved include problems of an expense in replacing a manual type of roundness measurement apparatus with an automatic type of roundness measurement apparatus; a repair time for maintenance, overhaul or the like of the roundness measurement apparatus; a cost of a replacement component during repair; and the like.
According to the present invention, in a manual type roundness measurement apparatus comprising a measurement device which measures a state of a peripheral surface of an object to be measured; a columnar measurement base capable of adjusting a misalignment and a tilt of the object to be measured on the measurement device; and a computer calculation processing device which processes measurement data of the measurement base, the measurement base includes a driving unit having a handle; automatic unit sections comprising motor units connected to the driving unit 5a; and a substrate which controls the automatic unit sections, whereby the manual type roundness measurement apparatus can be changed to a constitution of an automatic type.

Abstract translation: 要解决的问题包括：用自动型圆度测量设备替换手动型圆度测量设备的费用问题; 用于圆度测量设备的维护，检修等的修理时间; 修理期间更换部件的成本; 等等。 根据本发明，在一种手动型圆度测量装置中，包括：测量装置，用于测量待测量对象的外围表面的状态; 柱状测量基座，其能够调整测量装置上的测量对象物的错位和倾斜; 以及计算机运算处理装置，其对所述测量台的测量数据进行处理，所述测量台包括具有把手的驱动单元; 包括连接到驱动单元5a的电机单元的自动单元部分; 以及控制自动单元部分的基板，由此手动型圆度测量设备可以改变为自动型的结构。