公开(公告)号：EP2535920A3

公开(公告)日：2015-03-04

申请号：EP12172133.6

申请日：2012-06-15

申请人： Carl Zeiss Microscopy GmbH

发明人： Fober, Jörg ,  Hugelmann, Martin

IPC分类号： H01J37/248 ,  G01R15/16

CPC分类号： H01J37/248

摘要： The invention relates to a high-voltage supply unit (100) for a particle beam device (11, 12) and to a particle beam device (11, 12) comprising a high-voltage supply unit (100) of this type. The high-voltage supply unit (100) has at least one high-voltage cable (101) for feeding a high voltage, and comprising at least one measuring device (105) for measuring the high voltage, wherein the measuring device (105) has at least one first capacitor (108), and wherein the first capacitor is formed by at least one first section (108) of the high-voltage cable (101).

公开(公告)号：EP2802932A1

公开(公告)日：2014-11-19

申请号：EP13700149.1

申请日：2013-01-09

申请人： Carl Zeiss Sports Optics GmbH

发明人： TAUTZ, Volker ,  MUTZ, Erhard ,  BACH, Christian

IPC分类号： G02B27/64

摘要： The invention relates to an optical system (1) for imaging an object (O), comprising at least one first objective (100), at least one first image stabilization unit (200) and comprising at least one first eyepiece (300), wherein, as viewed from the first objective (100) in the direction of the first eyepiece (300), firstly the first objective (100), then the first image stabilization unit (200) and then the first eyepiece (300) are arranged along a first optical axis (10), the first image stabilization unit (200) is mounted in a cardan-type fashion rotatably about a first articulation point (206), and wherein the first articulation point (206) is arranged between the first objective (100) and the first eyepiece (300). The optical system (1) according to the invention is distinguished by the fact that the first image stabilization unit (200) comprises a first lens unit (201) and at least one further optical element (202), wherein the first lens unit (201) and the optical element (202) are arranged in such a way that the first lens unit (201) together with the optical element (202) is mounted in a cardan-type fashion rotatably about the first articulation point (206).

公开(公告)号：EP2565900A3

公开(公告)日：2013-08-14

申请号：EP12191504.5

申请日：2007-11-13

申请人： Carl Zeiss NTS Ltd.

发明人： Spruck, Bernd ,  Edelmann, Martin ,  Craven, John ,  Taylor, Robert ,  Kühner, Martin

IPC分类号： H01J37/20 ,  H01J37/18 ,  H01J37/22 ,  H01J37/26 ,  G02B21/00

CPC分类号： H01J37/20 ,  G02B21/0004 ,  H01J37/18 ,  H01J37/228 ,  H01J37/26 ,  H01J2237/2003 ,  H01J2237/2006 ,  H01J2237/204 ,  H01J2237/2608

摘要： The invention refers to a beam device (1), in particular a particle beam device, for analyzing an object (12), as well as a system comprising a particle beam device and an optical microscope for optically analyzing an object. It is an object of the invention to provide a beam device (1) comprising a means to simplify the exchange and to reduce the time of the exchange of objects to be examined. According to the invention a beam device (1) is provided comprising at least one beam generator (2) that generates a beam, at least one objective lens (6) that focuses the beam on an object (12) arranged in a holding element (25), wherein the objective lens (6) comprises at least one connecting element (26), the holding element (25) is connected to the connecting element (26) so that the holding element (25) is removable from the connecting element (26) for modification of the object (12). Alternatively, the holding element is mounted to a beam column.

公开(公告)号：EP2535920A2

公开(公告)日：2012-12-19

申请号：EP12172133.6

申请日：2012-06-15

申请人： Carl Zeiss Microscopy GmbH

发明人： Fober, Jörg ,  Hugelmann, Martin

IPC分类号： H01J37/248

CPC分类号： H01J37/248

摘要： The invention relates to a high-voltage supply unit (100) for a particle beam device (11, 12) and to a particle beam device (11, 12) comprising a high-voltage supply unit (100) of this type. The high-voltage supply unit (100) has at least one high-voltage cable (101) for feeding a high voltage, and comprising at least one measuring device (105) for measuring the high voltage, wherein the measuring device (105) has at least one first capacitor (108), and wherein the first capacitor is formed by at least one first section (108) of the high-voltage cable (101).

摘要翻译： 本发明涉及一种用于粒子束装置（11,12）的高压供应单元（100）和包括这种类型的高压供应单元（100）的粒子束装置（11,12）。 高电压供给单元（100）具有至少一个用于馈送高电压的高压电缆（101），并且包括用于测量高电压的至少一个测量装置（105），其中测量装置（105）具有 至少一个第一电容器（108），并且其中所述第一电容器由所述高压电缆（101）的至少一个第一部分（108）形成。

公开(公告)号：EP2278607A3

公开(公告)日：2012-10-24

申请号：EP10170421.1

申请日：2010-07-22

申请人： Carl Zeiss NTS GmbH

发明人： Preikszas, Dirk ,  Albiez, Michael

IPC分类号： H01J37/09 ,  H01J37/28 ,  H01J37/15

CPC分类号： H01J37/09 ,  H01J37/15 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0455 ,  H01J2237/0492 ,  H01J2237/14 ,  H01J2237/2002 ,  H01J2237/26 ,  H01J2237/31749

摘要： Die Erfindung betrifft ein Teilchenstrahlgerät (1) mit einer ersten Blendeneinheit (8) mit verstellbarer Blendenöffnung. Ferner betrifft die Erfindung eine Blendeneinheit (8) für ein Teilchenstrahlgerät (1). Darüber hinaus betrifft die Erfindung ein Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät (1). Das Teilchenstrahlgerät (1) weist eine erste Kondensorlinse (6) mit einem ersten Pölschuh (6a) und einem zweiten Polschuh (6b) auf. Sowohl der erste Polschuh (6a) als auch der zweite Polschuh (6b) sind unabhängig voneinander relativ zu einer zweiten Blendeneinheit (9) justierbar. Die zweite Blendeneinheit (9) ist als eine Druckstufenblende ausgebildet, die einen ersten Bereich, in welchem ein Vakuum mit einem ersten Druck herrscht, und einen zweiten Bereich, in welchem ein Vakuum mit einem zweiten Druck herrscht, voneinander trennt. Das erfindungsgemäße Verfahren betrifft die Einstellung des Strahlstroms in diesem Teilchenstrahlgerät (1).

公开(公告)号：EP2506285A1

公开(公告)日：2012-10-03

申请号：EP12161975.3

申请日：2012-03-29

申请人： Carl Zeiss NTS GmbH

发明人： Dönitz, Dietmar ,  Wagner, Christian

IPC分类号： H01J37/26

CPC分类号： H01J37/28

摘要： The invention relates to a particle beam device (1, 24) having a detector arrangement. The particle beam device (1, 24) has a first particle beam column (16), the first particle beam column (16) having a first beam generator for generating a first particle beam, and a first objective lens for focusing the first particle beam on an object (11). The first particle beam column (16) has a first beam axis (28). In addition, a second particle beam column (2) is provided, the second particle beam column (2) having a second beam generator for generating a second particle beam, and a second objective lens for focusing the second particle beam on an object (11). The second particle beam column (2) has a second beam axis (29). A detector (12) is provided for detecting interacting particles and/or interacting radiation. A detection axis (33) extends from the detector (12) to an object (11). The first beam axis (28) of the first particle beam column (16) and the second beam axis (29) of the second particle beam column (2) define a first angle (Φ) which is different from 0° and from 180°. In addition, the first beam axis (28) of the first particle beam column (16) and the second beam axis (29) of the second particle beam column (2) are situated in a first plane (32). The detection axis (33) of the detector (12) and the first beam axis (28) are situated in a second plane (34). Furthermore, the first plane (32) and the second plane (34) define a second angle (α) having an absolute value in the range of 65° to 80°.

摘要翻译： 本发明涉及一种具有检测器装置的粒子束装置（1,24）。 所述粒子束装置（1,24）具有第一粒子束（16），所述第一粒子束列（16）具有用于产生第一粒子束的第一束发生器和用于聚焦所述第一粒子束 在物体（11）上。 第一粒子束柱（16）具有第一束轴（28）。 另外，提供第二粒子束柱（2），第二粒子束列（2）具有用于产生第二粒子束的第二束发生器和用于将第二粒子束聚焦在物体（11）上的第二物镜 ）。 第二粒子束柱（2）具有第二束轴（29）。 提供检测器（12）用于检测相互作用的颗粒和/或相互作用的辐射。 检测轴（33）从检测器（12）延伸到物体（11）。 第一粒子束列（16）的第一束轴（28）和第二粒子束列（2）的第二束轴（29）限定第一角度（|），其不同于0°和180° 。 此外，第一粒子束列（16）的第一束轴（28）和第二粒子束列（2）的第二束轴（29）位于第一平面（32）中。 检测器（12）和第一光束轴（28）的检测轴（33）位于第二平面（34）中。 此外，第一平面（32）和第二平面（34）限定绝对值在65°至80°范围内的第二角度（±）。

公开(公告)号：EP2501875A1

公开(公告)日：2012-09-26

申请号：EP10782258.7

申请日：2010-11-18

申请人： KL Megla GmbH

发明人： REINECKE, Peter

IPC分类号： E04F11/18

CPC分类号： E04B2/7416 ,  E04B2/7425 ,  E04F11/1812 ,  E04F11/1814 ,  E04F11/1851 ,  E04F11/1853 ,  E04F2011/1831 ,  Y10T403/32631

摘要： The invention relates to a mounting system and to a method for mounting a dividing wall (1) on at least one holding device (2, 3), for example a holding rod or a holding post. Furthermore, the invention relates to a device for dividing regions. To this end, a first mounting device (23 to 28) which can be mounted on the holding device (2, 3) and a second mounting device (23 to 28) which can be mounted on the holding device (2, 3) are used. Furthermore, a mounting element (35) is provided which can be mounted on the first mounting device (23 to 28) and has a receptacle (36), in which a dividing wall (1) can be received in a non-clamping manner. Moreover, a clamping holder (4 to 9) is used, wherein the clamping holder (4 to 9) can be mounted on the second mounting device (23 to 28), wherein the clamping holder (4 to 9) has a first clamping part (12) and a second clamping part (18), and wherein the first clamping part (12) and the second clamping part (18) are designed so as to hold a dividing wall (1) between them in a clamping manner.

公开(公告)号：EP2355128A3

公开(公告)日：2012-07-04

申请号：EP11152420.3

申请日：2011-01-27

申请人： Carl Zeiss NTS GmbH

发明人： Glasmachers, Albrecht, Prof. Dr. ,  Laue, Alexander ,  Aliman, Michel, Dr. ,  Mantz, Hubert, Dr. ,  Zeile, Ulrike, Dr. ,  Dömer, Holger, Dr.

IPC分类号： H01J49/06 ,  H01J37/244 ,  H01J37/256

CPC分类号： H01J37/265 ,  H01J3/26 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J49/063 ,  H01J49/065 ,  H01J49/10 ,  H01J2237/05 ,  H01J2237/2449 ,  H01J2237/2527

摘要： The invention relates to an apparatus (1200,1300) for transmission of energy of an ion to at least one gas particle and/or for transportation of an ion. The invention also relates to a particle beam device having an apparatus such as this. In particular, a container is provided, in which a gas is arranged which has gas particles, wherein the container has a transport axis. Furthermore, at least one first multipole unit and at least one second multipole unit are provided, which are arranged along the transport axis. The first multipole unit and the second multipole unit are formed by printed circuit boards. Furthermore, an electronic circuit is provided, which provides each multipole unit with a potential, such that a potential gradient is generated, in particular along the transport axis.

公开(公告)号：EP2343726A3

公开(公告)日：2012-07-04

申请号：EP10196658.8

申请日：2010-12-22

申请人： Carl Zeiss NTS GmbH

发明人： Biberger, Josef ,  Pulwey, Ralph ,  Draszba, Ernst ,  Hegele, Klaus ,  Niebel, Harald ,  Adolf, Andreas ,  Arnold, Rainer

IPC分类号： H01J37/153 ,  H01J37/28 ,  H01J37/22

CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J2237/1536 ,  H01J2237/223

摘要： The invention relates to a method for producing a representation of an object by means of a particle beam. The invention also relates to a particle beam device for carrying out the method. The invention is based on the object of specifying the method and the particle beam device for producing a representation of an object such that images which are produced, in particular including FFT images, are as free as possible of artifacts which are not caused by the object to be examined. This is achieved in particular in that pixel lives, line flyback times and pixel pause times are varied in raster patterns.

公开(公告)号：EP1625022B1

公开(公告)日：2012-02-22

申请号：EP04751985.5

申请日：2004-05-12

申请人： ATG DesignWorks, LLC

发明人： Affolter, Allen ,  Mathews, Titus

IPC分类号： G09F27/00 ,  B42D15/02 ,  G09F9/33 ,  B42D3/12 ,  G06F3/147

CPC分类号： B42D15/022 ,  B42D3/123 ,  B42P2241/16 ,  G09F27/00 ,  G09G2380/14

摘要： A periodical is shown having flexible pages whereon is affixed a thin flexible electronic display (1). The display includes a flexible membrane (3), control circuitry (4), and self-contained power source (6), which may be a thin flexible battery. A display may be affixed to one or more of the pages of the periodical for use in displaying dynamic information or video.