METHOD AND APPARATUS FOR IMAGING OF FEATURES ON A SUBSTRATE
    16.
    发明公开
    METHOD AND APPARATUS FOR IMAGING OF FEATURES ON A SUBSTRATE 有权
    VERFAHREN UND VORRICHTUNG ZUM ABBILDEN VON MERKMALEN AUF EINEM SUBSTRAT

    公开(公告)号:EP2319014A1

    公开(公告)日:2011-05-11

    申请号:EP09777048.1

    申请日:2009-07-08

    IPC分类号: G06T7/00

    CPC分类号: G06T7/75 G06T2207/30072

    摘要: A method for imaging features on a substrate, comprising scanning the substrate and producing an image thereof, overlaying a grid model on the image, fitting the grid model to the locations of at least some of the features on the image, and extracting images of the features.

    摘要翻译: 一种用于对基板上的特征进行成像的方法,包括扫描基板并产生其图像,在图像上重叠网格模型,将网格模型拟合到图像上的至少一些特征的位置,以及提取图像的图像 特征。