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11.发明公开MEMS Mirror, Mirror Scanner, Optical Scanning Unit and Image Forming Apparatus including the Optical Scanning Unit 有权MEMS反射镜，反射镜扫描仪，光学扫描和具有该光学扫描单元的图像形成装置
公开(公告)号：EP2157467A3
公开(公告)日：2012-01-25
申请号：EP09165739.5
申请日：2009-07-17
发明人： Jeong, Hee-moon , Lee, Jin-ho , Kim, Jun-o , Choi, Jong-chul
CPC分类号： G02B26/085 , G02B26/105 , H04N1/1135 , H04N1/12 , H04N2201/0082
摘要： Disclosed are several embodiments of a micro-electro-mechanical systems (MEMS) mirror and a mirror scanner employing the same. An optical scanning unit employing such mirror scanner and an image forming apparatus including the optical scanning unit are also disclosed. The MEMS mirror may include a movable unit, which may in turn include a mirror portion and a magnet frame portion. The mirror portion may have mirror surfaces on the face surface(s) thereof. The magnet frame portion may include an opening into which a magnet is received. The MEMS mirror may also include a first fixing end and a second fixing end, to which the moving unit may be elastically supported by one or more elastic members that allows oscillating or pivoting movement of the moving unit.
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公开(公告)号：EP1876139A3
公开(公告)日：2010-08-25
申请号：EP07100792.6
申请日：2007-01-19
发明人： Ko, Young-chul , Cho, Jin-woo , Park, Yong-hwa , Jeong, Hee-moon
CPC分类号： B81B3/0062 , B81B2201/042 , B81B2203/058 , G02B26/085 , H02K33/18
摘要： Provided is a two-axis micro-electro mechanical system (MEMS) device. The MEMS device includes a moving plate, a stage, a driving coil, a pair of magnets, and a yoke magnetic body. The moving plate is supported coaxially on a first axis to move pivotably about the first axis that is disposed perpendicularly to a second axis. The stage is supported coaxially on the second axis in an inner region of the moving plate. The driving coil includes a coaxial coil portion arranged along the first axis of the driving plate and divided at a center by the stage, and a first connecting coil portion and a second connecting coil portion. The magnets of the pair are respectively disposed. The yoke magnetic body is disposed between the pair of magnets in a region above or below the magnets and is formed of a material capable of being magnetized by the magnets in order to suddenly change a magnetic flux density according to a distance between the pair of magnets. The MEMS device provides reliable driving about the two axes and doubles the rotation force.
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公开(公告)号：EP1619710A2
公开(公告)日：2006-01-25
申请号：EP05014807.1
申请日：2005-07-07
发明人： Lee, Moon-chul , Park, Tae-sik , Jeong, Hee-moon
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0036 , H01H2059/0063
摘要： A vibration type MEMS switch and a method of fabricating the vibration type MEMS switch. The vibration type MEMS switch includes a vibrating body supplied with an alternating current voltage of a predetermined frequency to vibrate in a predetermined direction; and a stationary contact point spaced apart from the vibrating body along a vibration direction of the vibrating body. When a direct current voltage with a predetermined magnitude is applied to the stationary contact point, a vibration margin of the vibrating body is increased, the vibrating body contacts the stationary contact point and the vibration type MEMS switch is turned on. A first substrate is bonded to a second substrate to isolate the vibrating body in a sealed vacuum space. The vibration type MEMS switch is turned on and/off by a resonance.
摘要翻译： 一种振动型MEMS开关和一种制造该振动型MEMS开关的方法。 振动型MEMS开关包括被供给预定频率的交流电压以在预定方向上振动的振动体; 以及沿着振动体的振动方向与振动体间隔开的固定接触点。 当具有预定大小的直流电压施加到固定接触点时，振动体的振动裕度增加，振动体接触固定接触点并且振动型MEMS开关导通。 将第一衬底粘合到第二衬底以将振动体隔离在密封的真空空间中。 振动型MEMS开关通过谐振而导通/截止。
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14.发明公开
公开(公告)号：EP1041621A3
公开(公告)日：2004-11-24
申请号：EP00106011.0
申请日：2000-03-27
发明人： Kang, Sung-gyu , Lee, Ki Bang , Choi, Jae-joon , Jeong, Hee-moon
IPC分类号： H01L21/205 , H01L21/20 , H01L21/3063 , H01L21/316 , H01L21/762
CPC分类号： G01P15/0802 , B81C1/0019 , B81C1/00507 , B81C2201/0115 , H01L21/76251 , H01L21/76262
摘要： A multilayered wafer with a thick sacrificial layer, which is obtained by forming a sacrificial layer of oxidized porous silicon or porous silicon and growing an epitaxial polysilicon layer on the sacrificial layer, and a fabrication method thereof are provided. The multilayered wafer with a thick sacrificial layer adopts a porous silicon layer or an oxidized porous silicon layer as a sacrificial layer such that a sufficient gap can be obtained between a substrate and a suspension structure upon the manufacture of the suspension structure of a semiconductor actuator or a semiconductor inertia sensor. Also, in a fabrication method of the wafer according to the present invention, a p + -type or n + -type wafer doped at a high concentration is prepared for, and then a thick porous silicon layer can be obtained simply by anodic-bonding the surface of the wafer. Also, when polysilicon is grown on a porous silicon layer by an epitaxial process, it is grown faster than when single crystal silicon is grown.
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公开(公告)号：EP1619710B1
公开(公告)日：2012-03-21
申请号：EP05014807.1
申请日：2005-07-07
发明人： Lee, Moon-chul , Park, Tae-sik , Jeong, Hee-moon
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0036 , H01H2059/0063
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公开(公告)号：EP1895349B1
公开(公告)日：2010-10-20
申请号：EP07100852.8
申请日：2007-01-19
发明人： Ko, Young-chul , Cho, Jin-woo , Jeong, Hee-moon
IPC分类号： G02B26/08
CPC分类号： G02B26/085 , G02B26/101
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17.发明公开
公开(公告)号：EP2157467A2
公开(公告)日：2010-02-24
申请号：EP09165739.5
申请日：2009-07-17
发明人： Jeong, Hee-moon , Lee, Jin-ho , Kim, Jun-o , Choi, Jong-chul
CPC分类号： G02B26/085 , G02B26/105 , H04N1/1135 , H04N1/12 , H04N2201/0082
摘要： Disclosed are several embodiments of a micro-electro-mechanical systems (MEMS) mirror and a mirror scanner employing the same. An optical scanning unit employing such mirror scanner and an image forming apparatus including the optical scanning unit are also disclosed. The MEMS mirror may include a movable unit, which may in turn include a mirror portion and a magnet frame portion. The mirror portion may have mirror surfaces on the face surface(s) thereof. The magnet frame portion may include an opening into which a magnet is received. The MEMS mirror may also include a first fixing end and a second fixing end, to which the moving unit may be elastically supported by one or more elastic members that allows oscillating or pivoting movement of the moving unit.
摘要翻译： 本发明公开了一种微机电系统（MEMS）反射镜和反射镜扫描仪采用相同的若干实施例。 因此，一个光学扫描单元，其利用寻求镜扫描器和图像形成设备，其包括光学扫描单元是游离缺失盘。 MEMS反射镜可包括活动单元，其可进而包括镜部分和磁铁架部分。 镜部分可具有面对表面（S）上它们的反射镜表面。 磁铁架部分可包括在其中接收一个磁铁的开口。 因此，该MEMS反射镜可包括第一固定端和第二固定端，向其中移动单元可由一个或多个弹性构件弹性地支撑确实允许在移动单元的摆动或枢转运动。
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18.发明授权
公开(公告)号：EP1041621B1
公开(公告)日：2008-04-30
申请号：EP00106011.0
申请日：2000-03-27
发明人： Kang, Sung-gyu , Lee, Ki Bang , Choi, Jae-joon , Jeong, Hee-moon
IPC分类号： H01L21/205 , H01L21/20 , H01L21/3063 , H01L21/316 , H01L21/762
CPC分类号： G01P15/0802 , B81C1/0019 , B81C1/00507 , B81C2201/0115 , H01L21/76251 , H01L21/76262
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公开(公告)号：EP1748457A1
公开(公告)日：2007-01-31
申请号：EP06253784.0
申请日：2006-07-19
发明人： Jeong, Hee-moon , Kwon, Sang-wook , Kim, Che-heung , Kim, Jong-seok , Kim, Jun-o, 705-604 Manhyeon-maeul , Hong, Young-tack , Song-In-sang , Lee, Sang-hun
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.
摘要翻译： 一种MEMS开关，包括形成在所述基板的顶部上的至少一个固定电极的基板和形成在所述基板的顶部上并形成在所述固定电极的侧表面上的至少一个恢复电极。 至少一个信号线形成在基板的顶部并且具有开关接触部分。 可移动电极通过基板上的弹性连接器在预定空间处从基板的顶部远离连接，以及形成在可动电极的底表面上或弹性连接器的底表面上的至少一个接触件，用于附接到 或与开关接触部分分离。 至少一个枢轴凸起形成在可动电极的底表面或基板的顶部上。
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公开(公告)号：EP1619710A3
公开(公告)日：2006-09-20
申请号：EP05014807.1
申请日：2005-07-07
发明人： Lee, Moon-chul , Park, Tae-sik , Jeong, Hee-moon
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0036 , H01H2059/0063
摘要： A vibration type MEMS switch and a method of fabricating the vibration type MEMS switch. The vibration type MEMS switch includes a vibrating body supplied with an alternating current voltage of a predetermined frequency to vibrate in a predetermined direction; and a stationary contact point spaced apart from the vibrating body along a vibration direction of the vibrating body. When a direct current voltage with a predetermined magnitude is applied to the stationary contact point, a vibration margin of the vibrating body is increased, the vibrating body contacts the stationary contact point and the vibration type MEMS switch is turned on. A first substrate is bonded to a second substrate to isolate the vibrating body in a sealed vacuum space. The vibration type MEMS switch is turned on and/off by a resonance.
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