公开(公告)号：EP3088572A1

公开(公告)日：2016-11-02

申请号：EP14873978.2

申请日：2014-12-25

申请人： SUMCO Corporation

发明人： SUDO Toshiaki ,  SATO Tadahiro ,  KITAHARA Ken ,  KITAHARA Eriko

IPC分类号： C30B15/10 ,  C03B20/00

CPC分类号： C30B15/10 ,  C03B19/095 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57

摘要： Provided is a vitreous silica crucible suppressing deformation under high temperature, and a method for manufacturing the same. A vitreous silica crucible 1 includes a cylindrical straight body portion 10a, a corner portion 10c formed at lower end of the straight body portion 10a, and a bottom portion 10b connected with the straight body portion 10a via the corner portion 10c. Moreover, the vitreous silica crucible 1 includes a bubble-containing opaque layer 11 constituting an outer layer, and a bubble-free transparent layer 12 constituting an inner layer. A boundary surface, between the opaque layer 11 and the transparent layer 12 in at least the straight body portion 10a, forms a periodic wave surface in a vertical direction.

摘要翻译： 提供一种抑制高温下的变形的石英玻璃坩埚及其制造方法。 石英玻璃坩埚1包括圆柱形直体部分10a，形成在直体部分10a的下端的拐角部分10c，以及经由拐角部分10c与直体部分10a连接的底部10b。 此外，石英玻璃坩埚1包括构成外层的含气泡的不透明层11和构成内层的无气泡透明层12。 至少在直体部分10a中的不透明层11和透明层12之间的边界表面在垂直方向上形成周期波表面。

公开(公告)号：EP3088573B1

公开(公告)日：2020-07-15

申请号：EP14874952.6

申请日：2014-12-25

申请人： SUMCO Corporation

发明人： SUDO Toshiaki ,  SATO Tadahiro ,  KITAHARA Ken ,  KITAHARA Eriko

IPC分类号： C30B29/06 ,  C03B20/00 ,  C30B15/10 ,  G01N21/23 ,  C03C3/04 ,  G01L1/24 ,  G01L5/00 ,  H04N5/232

公开(公告)号：EP3199668B1

公开(公告)日：2019-07-17

申请号：EP15844603.9

申请日：2015-09-24

申请人： SUMCO Corporation

发明人： SATO Tadahiro ,  KITAHARA Eriko ,  SUDO Toshiaki ,  KITAHARA Ken

IPC分类号： C30B15/00 ,  C30B29/06 ,  C30B35/00 ,  C30B15/10 ,  C30B15/20

公开(公告)号：EP3199669B1

公开(公告)日：2018-09-19

申请号：EP15844371.3

申请日：2015-09-24

申请人： SUMCO Corporation

发明人： KITAHARA Ken ,  SATO Tadahiro ,  SUDO Toshiaki ,  KITAHARA Eriko ,  WATANABE Takashi

IPC分类号： C30B15/10 ,  C30B35/00 ,  G01N3/307 ,  C30B29/06 ,  C03B19/09

CPC分类号： G01N3/307 ,  C03B19/095 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  G01N2203/001 ,  G01N2203/0035 ,  G01N2203/0064

摘要： Provided is a destructive inspection method and a quality determination method of vitreous silica crucible capable of inspecting in a condition as close as possible to the actual status of use. The destructive inspection method of the vitreous silica crucible according to the present disclosure, evaluates a crack state of an inner surface of a vitreous silica crucible 1 for pulling a silicon single crystal supported by a graphite susceptor 2 when a load is instantaneously applied to one point on the inner surface via an automatic center punch 10 while pushing the tip portion of the automatic center punch 10 against the inner surface.

公开(公告)号：EP3018468A1

公开(公告)日：2016-05-11

申请号：EP13888555.3

申请日：2013-06-30

申请人： SUMCO Corporation

发明人： SUDO Toshiaki ,  SATO Tadahiro ,  KITAHARA Ken ,  HINOOKA Makiko

IPC分类号： G01N21/17 ,  C03B20/00 ,  C30B29/06

CPC分类号： C03B1/00 ,  C03B19/095 ,  C30B15/10 ,  C30B29/06 ,  G01N15/088 ,  G01N21/55 ,  G01N2015/0015 ,  G01N2015/0096 ,  G01N2033/0091 ,  G02B21/008 ,  Y02P40/57

摘要： An evaluation method of suitable silica powder for forming a bubble-free layer of a vitreous silica crucible for pulling of a silicon single crystal, includes: a process of measuring a porosity between silica particles in the silica powder, a process of melting the silica powder, a process of measuring a bubble content rate of a vitreous silica block obtained by cooling to harden the melted silica powder, and a process of determining whether the silica powder is suitable from the porosity of the silica powder and the bubble content rate of the vitreous silica block.