公开(公告)号：EP2385362A1

公开(公告)日：2011-11-09

申请号：EP10192451.2

申请日：2010-11-24

Applicant: Brightview Systems Ltd.

Inventor： Finarov, Moshe

IPC: G01N21/65

CPC classification number: G01B11/06 ,  G01B11/0625 ,  G01N21/31 ,  G01N21/6489 ,  G01N21/65 ,  G01N21/8422 ,  G01N21/8901 ,  G01N2021/3568 ,  G01N2021/8908 ,  G01N2201/0826 ,  G01N2201/0833 ,  G01N2201/1085

Abstract: Photovoltaic thin film quality control is obtained where the thin film is supported by a support and a section of the film is illuminated by a polychromatic or monochromatic illumination source. The source forms on the thin film an illuminated line. The light collected from discrete sampled points located on the illuminated line is transferred to a photo-sensitive sensor through an optical switch. The spectral signal of the light reflected, transmitted or scattered by the sampled points is collected by the sensor, processed and photovoltaic thin film parameters applicable to the quality control are derived e.g. thin film thickness, index of refraction, extinction coefficient, absorption coefficient, energy gap, conductivity, crystallinity, surface roughness, crystal phase, material composition and photoluminescence spectrum and intensity. Manufacturing equipment parameters influencing the material properties may be changed to provide a uniform thin film layer with pre-defined properties.

Abstract translation: 获得光电薄膜质量控制，其中薄膜由支撑体支撑并且膜的一部分被多色或单色照明源照射。 源在薄膜上形成一条照明线。 从位于照明线上的离散采样点收集的光通过光学开关转移到光敏传感器。 由采样点反射，传播或散射的光的光谱信号由传感器收集，处理和适用于质量控制的光伏薄膜参数例如被导出。 薄膜厚度，折射率，消光系数，吸收系数，能隙，导电率，结晶度，表面粗糙度，结晶相，材料组成和光致发光光谱和强度。 可以改变影响材料性能的制造设备参数，以提供具有预定特性的均匀薄膜层。

公开(公告)号：EP1672355A2

公开(公告)日：2006-06-21

申请号：EP05112370.1

申请日：2005-12-19

Applicant: Palo Alto Research Center Incorporated

Inventor： Curry, Douglas N. ,  Bruce, Richard H. ,  Krivacic, Robert T.

IPC: G01N21/64

CPC classification number: G01N21/6456 ,  G01N21/6428 ,  G01N2021/6484 ,  G01N2201/1085

Abstract: An apparatus images a surface. An imager stage has a planar surface for supporting a sample. A fiber optic bundle has a first end of parallel first fiber ends that are arranged to define an input aperture for viewing the sample on the imager stage. A distal bundle end is arranged to define an output aperture disposed away from the imager stage. A scanning radiation source scans a radiation beam along a path that is perpendicular to the sample on the imager stage. The input aperture of the fiber optic bundle receives a light signal that is produced by the radiation source scan of the imager stage sample. The light signal is transmitted to the bundle output aperture. A photodetector detects the light signal at the distal bundle end, and a processor processes the detected light.

Abstract translation: 的装置的图像的表面。 成像器级具有用于支撑样品的平坦表面。 一种光纤束具有平行的第一光纤端的第一端被布置在没有输入孔径，以限定用于在成像器阶段观察样品。 远侧束端部配置在从成像器级设置成远离输出孔，以限定。 的扫描辐射源扫描沿着路径的辐射束没有垂直于成像器台上的样品。 光纤束的输入孔接收做了光信号由成像器阶段样品的辐射源扫描产生的。 光信号是反式mitted到束输出孔。 光电检测器检测在远端束的光信号，以及处理器处理所述检测到的光。

公开(公告)号：EP1376101A1

公开(公告)日：2004-01-02

申请号：EP03291458.2

申请日：2003-06-17

Applicant: LABORATOIRE CENTRAL DES PONTS ET CHAUSSEES

Inventor： Guillard, Yannick ,  Goyat, Yann ,  Chassaing, Paul

IPC: G01N21/47

CPC classification number: G01N21/474 ,  G01N2201/1085

Abstract: L'invention concerne un dispositif de mesure de caractéristiques photométriques d'un matériau (22), qui comporte :

des moyens d'élaboration (16) d'un arrangement de N faisceaux lumineux secondaires collimatés et homogènes (IV), chacun desdits N faisceaux lumineux (IV) permettant d'insoler une surface déterminée (20, 28) dudit matériau (22) selon un premier angle d'incidence γ défini par rapport à la normale ( n → ) à ladite surface à insoler (20, 28) et selon un second angle d'incidence β défini dans un plan (P) de ladite surface à insoler (20, 28),
un capteur de luminance (24) pour capter la luminance réfléchie (V) par ladite surface insolée (20, 28), ledit capteur de luminance (24) étant écarté d'un angle d'observation α sensiblement égal à 1° par rapport audit plan (P) de la surface à insoler (20, 28),
des moyens d'acquisition et de traitement (18) du signal transmis par ledit capteur de luminance (24).

Abstract translation: 用于测量材料（22）的光度特性的装置，其包括：用于产生N个准直和均匀的次级光束（IV）的装置，每个光束以给定的角度使材料的给定表面（20,28）不粘贴， 相对于正常（eta）的入射角（γ）和在日照面的平面（P）中限定的第二入射角（近似B）; 用于测量来自每个绝缘表面的反射亮度（V）的亮度传感器（24） 用于获取和处理亮度传感器信号的装置。

公开(公告)号：EP0406030A3

公开(公告)日：1991-10-23

申请号：EP90400529.5

申请日：1990-02-26

Applicant: QC OPTICS, INC.

Inventor： Johnson, Carly E. ,  Ormsby, Jay L. ,  Chase, Eric T. ,  Quackenbos, George S. ,  Broude, Sergey V. ,  Boudour, Abdu

IPC: G01N21/88

CPC classification number: G01N21/95607 ,  G01N2021/4714 ,  G01N2021/95676 ,  G01N2201/1085

Abstract: An optical inspection system and method for detecting flaws on a diffractive surface such as a reticle or wafer, includes illuminating a surface to be inspected to generate a first scattered energy angular distribution in response to a flaw on the surface and a second scattered energy angular distribution in response to an unflawed surface; the first and second energy distributions are sensed and the minimum energy detection energy level is established; determining whether the minimum detected energy level is in a first or second predetermined energy range and indicating that no flaw is present when the minimum detected energy level is in the first range and a flaw is present when the minimum detected energy level is in the second range.

公开(公告)号：EP1672355B1

公开(公告)日：2010-05-19

申请号：EP05112370.1

申请日：2005-12-19

Applicant: Palo Alto Research Center Incorporated

Inventor： Curry, Douglas N. ,  Bruce, Richard H. ,  Krivacic, Robert T.

IPC: G01N21/64

CPC classification number: G01N21/6456 ,  G01N21/6428 ,  G01N2021/6484 ,  G01N2201/1085

公开(公告)号：EP2131722A1

公开(公告)日：2009-12-16

申请号：EP08718915.5

申请日：2008-03-28

Applicant: University of Strathclyde ,  The University Court of the University of Dundee

Inventor： GIRKIN, John, Michael ,  POLAND, Simon ,  LONGBOTTOM, Christopher

IPC: A61B5/00 ,  G01N21/49

CPC classification number: A61B5/0088 ,  A61B5/0082 ,  G01N21/359 ,  G01N21/49 ,  G01N2021/4707 ,  G01N2021/4719 ,  G01N2201/1053 ,  G01N2201/1085

Abstract: A medical imager, primarily for use in oral and dental applications. The imager has a source for providing a plurality of collimated beams of non-ionising radiation, in particular near-infrared light, and a plurality of correlated detectors. Each detector is arranged to receive unscattered light from one or part of one of said collimated beams and scattered light from one or more other beams. The imager further comprises means for using both the unscattered and scattered light to form an image.

公开(公告)号：EP1672355A3

公开(公告)日：2006-07-05

申请号：EP05112370.1

申请日：2005-12-19

Applicant: Palo Alto Research Center Incorporated

Inventor： Curry, Douglas N. ,  Bruce, Richard H. ,  Krivacic, Robert T.

IPC: G01N21/64

CPC classification number: G01N21/6456 ,  G01N21/6428 ,  G01N2021/6484 ,  G01N2201/1085

Abstract: An apparatus images a surface. An imager stage has a planar surface for supporting a sample. A fiber optic bundle has a first end of parallel first fiber ends that are arranged to define an input aperture for viewing the sample on the imager stage. A distal bundle end is arranged to define an output aperture disposed away from the imager stage. A scanning radiation source scans a radiation beam along a path that is perpendicular to the sample on the imager stage. The input aperture of the fiber optic bundle receives a light signal that is produced by the radiation source scan of the imager stage sample. The light signal is transmitted to the bundle output aperture. A photodetector detects the light signal at the distal bundle end, and a processor processes the detected light.

公开(公告)号：EP0559433A1

公开(公告)日：1993-09-08

申请号：EP93301579.4

申请日：1993-03-02

Applicant: NIPPON SHEET GLASS CO., LTD.

Inventor： Ikafuji, Masaharu 6-3 Nippon Sheet Glass Company ,  Ichise, Nagayoshi ,  Odawara, Mitsuo ,  Abe, Junichi

IPC: G01N21/89

CPC classification number: G01N21/896 ,  G01N2201/1085

Abstract: A flaw detection system that can detect not only bubbles, stones and knots but also flaws, such as cords and reams, that are subject to less optical changes in transmitted light is provided. A glass plate (10) travelling in a manufacturing line is scanned with a beam spot (26) in the direction orthogonally intersecting the manufacturing line. The light transmitted through the glass plate (10) is received by an optical-fiber array (32) arranged in a direction orthogonally intersecting the line. Optical fibers (34) in the optical-fiber array are connected cyclically to a plurality of photomultipliers (PM1-PM10), which convert the light received by the optical fibers into electrical signals (SG1-SG10). Flaw signals are produced by extracting flaw information signals (TH+, TH-, MASK) from these electrical signals in an analog processing section (44), and masking them in a masking section (46). Positional information indicating flaw patterns and positions is produced from these flaw signals.

Abstract translation: 提供了一种不仅可以检测气泡，结石和结，而且还能够检测到透射光的光学变化较小的缺陷，例如电线和线束的探伤系统。 在制造线上行进的玻璃板（10）在与制造线正交的方向上用束斑（26）扫描。 透过玻璃板（10）的光被沿着与该线垂直相交的方向排列的光纤阵列（32）接收。 光纤阵列中的光纤（34）循环地连接到将由光纤接收的光转换成电信号的多个光电倍增管（PM1-PM10）（SG1-SG10）。 通过在模拟处理部分（44）中从这些电信号中提取缺陷信息信号（TH +，TH-，MASK）并在掩蔽部分（46）中对其进行掩蔽来产生缺陷信号。 从这些缺陷信号产生指示缺陷图案和位置的位置信息。

公开(公告)号：EP0390623A2

公开(公告)日：1990-10-03

申请号：EP90400508.9

申请日：1990-02-23

Applicant: MEASUREX CORPORATION

Inventor： Wennerberg, Gunnar ,  Gordon, Daniel A. ,  King, Harriss T.

IPC: G01N21/86 ,  G01N21/35 ,  G01N21/59

CPC classification number: G01N21/86 ,  G01N2021/8645 ,  G01N2201/0826 ,  G01N2201/0833 ,  G01N2201/1085

Abstract: A system for detecting optically-sensitive properties of sheet materials during manufacture includes a first group of bundles of optical fibers that convey light to selected transmitting locations adjacent one face of the sheet material. The system further includes a second group of bundles of optical fibers that collect and convey light transmitted through the sheet material to a light detector. The light detector measures the intensity of light received from each of the bundles of the second group to provide measurements of optically-sensitive properties of the sheet material at selected cross-­directional locations.

Abstract translation: 用于在制造期间检测片材的光敏性质的系统包括将光线传送到邻近片材的一个面的选定的透射位置的第一组光纤束。 该系统还包括第二组光纤束，其将透过片材的光收集并传送到光检测器。 光检测器测量从第二组的每个束接收的光的强度，以在选定的横向位置提供片材的光敏性质的测量。

公开(公告)号：EP0183974A1

公开(公告)日：1986-06-11

申请号：EP85113640.8

申请日：1985-10-26

Applicant: Meinan Machinery Works, Inc.

Inventor： Iwamoto, Yasuhiko c/o Meinan Machinery Works, Inc.

IPC: G01N21/88 ,  G01N21/89 ,  G01N33/46

CPC classification number: G01N21/8986 ,  G01N2201/1085

Abstract: There is disclosed a plywood surface defect detecting head. It comprises a shielding plate (2) slidingly contacted at its front end with one surface of the plywood (1), a light source (4) provided at one side of the shielding plate (2), and an optical fiber (3) provided at the other side of the shielding plate (2), the optical fiber (3) being disposed such that one end thereof slidingly contacts the plywood (1) surface together with the shielding plate (2) and the other end thereof faces toward a light detector (5).