METHOD OF PRODUCING A FRESNEL ZONE PLATE FOR APPLICATIONS IN HIGH ENERGY RADIATION
    11.
    发明公开
    METHOD OF PRODUCING A FRESNEL ZONE PLATE FOR APPLICATIONS IN HIGH ENERGY RADIATION 审中-公开
    VERFAHREN ZUR HERSTELLUNG EINER FRESNEL-ZONENPLATTEFÜRANWENDUNGEN在HOCHENERGETISCHER STRAHLUNG

    公开(公告)号:EP2823489A2

    公开(公告)日:2015-01-14

    申请号:EP13707893.7

    申请日:2013-03-07

    IPC分类号: G21K1/06

    摘要: The invention concerns to a method of producing a Fresnel Zone Plate (1) for applications in high energy radiation including the following steps: supply of a substrate (2) transparent for high energy radiation, deposition of a layer (3) of a metal, a metal alloy or a metal compound on a planar surface (4) of the substrate (2), calculating a three dimensional geometrical profile (5) with a mathematical model, setting up a dosage profile (6) for an ion beam of the ion beam lithography inverse to the calculated three dimensional geometrical profile (5) and milling a three dimensional geometrical profile (5) with concentric zones into the layer (3) with ion beam lithography by means of focused ion beam.

    摘要翻译: 本发明涉及一种生产用于高能量辐射的菲涅尔区带板(1)的方法,包括以下步骤:供给高能量辐射透明的基底(2),金属层(3)的沉积, 在基板(2)的平面(4)上的金属合金或金属化合物,用数学模型计算三维几何轮廓(5),设置用于离子的离子束的剂量曲线(6) 光束光刻与计算的三维几何轮廓(5)相反,并且通过离子束光刻通过聚焦离子束将具有同心区域的三维几何轮廓(5)铣削到层(3)中。

    X-RAY OPTICAL SYSTEM
    14.
    发明公开
    X-RAY OPTICAL SYSTEM 审中-公开
    光学系统X

    公开(公告)号:EP2710610A1

    公开(公告)日:2014-03-26

    申请号:EP12728320.8

    申请日:2012-05-15

    IPC分类号: G21K1/06

    CPC分类号: G21K1/067 G21K2201/067

    摘要: X-ray optical system composed of modules wit thin reflection foils or rectangular small channels. The optical system (3) is composed of minimum 5 segments (2), each segment (2) is assembled from minimum one module (1) and the diagonals of all modules (1) in a segment (2) are always in parallel with the symmetry axis (5) of the segment (2) and the segment (2) is a sector with a central angle from 18° to 72°, in the narrowest part of which is the dysfunctional or "dead"z one (6). The X-ray optical system has this dead zone (6), which can be filled with thin, rotationally symmetric foils (7), laid out in another geometric layout so that a common focus of the whole optical system (3) is formed. The X-ray optical system (3) has individual segments (2) laid out so that the aperture of the X-ray optical system (3) approaches the circular aperture and the symmetry axis (5) of a segment (2) always intersects the optical axis (4) of the optical system (3).

    X-RAY WAVEGUIDE
    19.
    发明公开
    X-RAY WAVEGUIDE 有权
    X射线波导

    公开(公告)号:EP2577681A1

    公开(公告)日:2013-04-10

    申请号:EP11724472.3

    申请日:2011-05-20

    IPC分类号: G21K1/06

    摘要: An X-ray waveguide showing a small propagation loss and having a waveguide mode with its phase controlled is provided. The X-ray waveguide including: a core (404) for guiding an X-ray in a wavelength band that a real part of the refractive index of a material is 1 or less; and a cladding (402, 403) for confining the X-ray in the core, in which: the X-ray is confined in the core by total reflection at a interface between the core and the cladding; in the core multiple materials (405, 406) having different real parts of the refractive index are periodically arranged; and a waveguide mode of the X-ray waveguide is such that the number of antinodes or nodes of an electric field intensity distribution or a magnetic field intensity distribution of the X-ray coincides with the number of periods of the periodic structure in a direction perpendicular to a waveguiding direction of the X-ray in the core.

    摘要翻译: 提供显示小传播损耗并具有相位受控的波导模式的X射线波导。 所述X射线波导包括:用于引导材料的折射率的实数部分为1或更小的波段的X射线的芯(404) 以及用于将所述X射线限制在所述纤芯中的包层(402,403),其中:所述X射线在所述纤芯和所述包层之间的界面处通过全反射被限制在所述纤芯中; 在具有不同折射率实部的核心多种材料(405,406)周期性排列; 并且X射线波导的波导模式使得X射线的电场强度分布或磁场强度分布的波腹或节点的数量与周期性结构在垂直方向上的周期数目一致 到核心中的X射线的波导方向。