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    POLARIZATION DEPENDENT LOSS MEASUREMENT
    11.
    发明公开
    POLARIZATION DEPENDENT LOSS MEASUREMENT 审中-公开

    公开(公告)号：EP3910310A1

    公开(公告)日：2021-11-17

    申请号：EP21172895.1

    申请日：2021-05-07

    Applicant: EXFO Optics, SAS

    Inventor： CYR, Normand ,  RUCHET, Bernard

    IPC: G01M11/00 ,  G01J4/04

    Abstract: There is provided a method for measuring the PDL of a DUT as a function of the optical frequency v within a spectral range, which uses a single wavelength scan over which the input-SOP varies in a continuous manner. The power transmission through the DUT, curve T(v), is measured during the scan and the PDL is derived from the sideband components of the power transmission curve T(v) that results from the continuously varying input-SOP. More specifically, the Discrete Fourier Transform (DFT) of the power transmission curve T(v) is calculated, wherein the DFT shows at least two sidebands. At least two sidebands are extracted and their inverse DFT calculated individually to obtain complex transmissions

    where J is the number of sidebands on one side. The response vector |m(v)〉 of the DUT is derived from the complex transmissions (v) and a matrix determined by the continuous trajectory of the SOP of the input test lightwave; and the PDL of the DUT as a function of v (PDL curve) is derived therefrom.

    SCATTEROMETRY MEASUREMENT OF ASYMMETRIC STRUCTURES
    12.
    发明公开
    SCATTEROMETRY MEASUREMENT OF ASYMMETRIC STRUCTURES 审中-公开

    公开(公告)号：EP3910285A1

    公开(公告)日：2021-11-17

    申请号：EP21175735.6

    申请日：2010-09-22

    Applicant: Nanometrics Incorporated

    Inventor： RABELLO, Silvio J. ,  MCGAHAN, William A. ,  LI, Jie ,  LIU, Yongdong

    IPC: G01B11/24 ,  G01N21/21 ,  G01J4/00

    Abstract: Asymmetry metrology is performed using at least a portion of Mueller matrix elements, including, e.g., the off-diagonal elements of the Mueller matrix. The Mueller matrix may be generated using, e.g., a spectroscopic or angle resolved ellipsometer (100) that may include a rotating compensator (122). The Mueller matrix is analyzed by fitting at least a portion of the elements to Mueller matrix elements calculated using a rigorous electromagnetic model of the sample (101) or by fitting the off-diagonal elements to a calibrated linear response. The use of the Mueller matrix elements in the asymmetry measurement permits, e.g., overlay analysis using in-chip devices thereby avoiding the need for special off-chip targets.

    POLARIZATION STATE ALIGNER (PSA)
    13.
    发明公开
    POLARIZATION STATE ALIGNER (PSA) 审中-公开

    公开(公告)号：EP3812831A1

    公开(公告)日：2021-04-28

    申请号：EP20211976.4

    申请日：2016-03-02

    Applicant: HUAWEI TECHNOLOGIES CO., LTD.

    Inventor： WEN, Yangjing ,  ZHU, Fei ,  BAI, YuSheng

    IPC: G02F1/01 ,  G01J4/00 ,  G02B6/27

    Abstract: A system comprises: a polarization state aligner (PSA) comprising: an input port; a first polarization beam splitter (PBS) coupled to the input port; a first phase shifter (PS) coupled to the first PBS; a first polarization rotator (PR) coupled to the first PBS; a first beam splitter (BS) coupled to the first PS and the first PR; a first output port coupled to the first BS; and a second output port coupled to the first BS.

    SIGNAL PROCESSING DEVICE, SIGNAL PROCESSING METHOD, AND PROGRAM
    19.
    发明公开
    SIGNAL PROCESSING DEVICE, SIGNAL PROCESSING METHOD, AND PROGRAM 审中-公开

    公开(公告)号：EP3491817A1

    公开(公告)日：2019-06-05

    申请号：EP17826592.2

    申请日：2017-08-03

    Applicant: Sony Corporation

    Inventor： MITANI Hitoshi ,  WAKAZONO Masafumi

    IPC: H04N5/232 ,  H04N9/04 ,  G01J4/00

    Abstract: The present disclosure includes a processing device, a method, and a non-transitory computer-readable medium. The processing device includes circuitry configured to acquire a plurality of images captured in a time series by an image sensor, each of the plurality of images is based on light in one of a plurality of predetermined polarization directions and in one of a plurality of predetermined wavelength bands. The circuitry is further configured to stitch together at least a part of the plurality of images corresponding to a single polarization direction and a single predetermined wavelength band from the plurality of predetermined wavelength bands to generate a composite image.

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