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    VIBRATING-MASS GYROSCOPE SYSTEMS AND METHOD
    12.
    发明公开
    VIBRATING-MASS GYROSCOPE SYSTEMS AND METHOD 有权
    振动陀螺仪系统和方法

    公开(公告)号：EP2977722A1

    公开(公告)日：2016-01-27

    申请号：EP15177796.8

    申请日：2015-07-22

    申请人： Northrop Grumman Systems Corporation

    发明人： STEWART, Robert E.

    IPC分类号： G01C19/5733

    CPC分类号： G01C19/5705 ,  G01C19/5733

    摘要： One embodiment of the invention includes a vibrating-mass gyroscope system. A sensor system includes a substantially planar vibrating-mass including opposite first and second surfaces and electrodes that extend longitudinally in a periodic pattern across the first and/or second surfaces. The electrodes include sets of drive and sense electrodes that are capacitively coupled to respective matching sets of drive and sense electrodes associated with a housing and which are separated from and facing the respective first and second surfaces. A gyroscope controller generates a drive signal provided to one of the array of drive electrodes and the substantially matching array of drive electrodes to provide for in-plane periodic oscillatory motion of the vibrating-mass, and generates a force-rebalance signal that is provided to one of the array of sense electrodes and the substantially matching array of sense electrodes to calculate rotation of the vibrating-mass gyroscope system about an input axis.

    摘要翻译： 本发明的一个实施例包括振动质量陀螺仪系统。 传感器系统包括基本上平面的振动质量块，该振动质量块包括相对的第一表面和第二表面以及沿周期性图案横跨第一和/或第二表面纵向延伸的电极。 电极包括电容耦合到与壳体相关联的驱动和感测电极的相应匹配组并且与相应的第一和第二表面分离并且面向相应的第一和第二表面的多组驱动和感测电极。 陀螺仪控制器产生提供给驱动电极阵列和驱动电极的基本匹配阵列中的一个的驱动信号，以提供振动质量的面内周期性振荡运动，并且生成力重新平衡信号，该信号被提供给 所述感测电极阵列中的一个和所述基本匹配的感测电极阵列来计算所述振动质量陀螺仪系统围绕输入轴线的旋转。

    MEMS sensor with configuration to reduce non-linear motion
    13.
    发明公开
    MEMS sensor with configuration to reduce non-linear motion 审中-公开
    微机电传感器

    公开(公告)号：EP2899503A1

    公开(公告)日：2015-07-29

    申请号：EP15152031.9

    申请日：2015-01-21

    申请人： InvenSense, Inc.

    发明人： Anac, Ozan ,  Seeger, Joseph

    IPC分类号： G01C19/5733 ,  G01C19/5747 ,  G01C19/5762 ,  G01P15/08 ,  B81B3/00

    CPC分类号： G01C19/5762 ,  B81B3/0051 ,  B81B2201/0242 ,  B81B2203/0163 ,  G01C19/5733 ,  G01C19/5747 ,  G01P15/0802

    摘要： Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor, such as a gyroscope. Examples of gyroscope configurations (11A, 12A, 13A) includes at least one pair of counter-rotating arms (21A, 21B, 22A, 22B, 23A, 23B) linked to two traveling masses (31A, 31B, 32A, 32B, 33A, 33B). The modifications include any or any combination of providing a rigid element (21) between rotating structures of the spring mass configuration including the traveling masses (31A, 31B), tuning a spring system (22, 42A, 42B) between the rotating structures including the traveling masses (32A, 32B) and the rotating arms (12A, 12B) and coupling an electrical cancellation system (73A, 73B, 74A, 74B) to the rotating structures including the traveling masses (33A, 33B) and the rotating arms (23A, 23B). In so doing, unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.

    摘要翻译： 公开了用于修改弹簧质量结构的实施例，其最小化对MEMS传感器（例如陀螺仪）的不期望的非线性运动的影响。 陀螺仪构造（11A，12A，13A）的例子包括至少一对与两个行进质量块（31A，31B，32A，32B，33A，23B）连接的反向旋转臂（21A，21B，22A，22B，23A，23B） 33B）。 修改包括在包括行进质量块（31A，31B）的弹簧质量结构的旋转结构之间提供刚性元件（21）的任何或任何组合，调整包括旋转结构的旋转结构之间的弹簧系统（22,42A，42B） 移动块（32A，32B）和旋转臂（12A，12B），并且将电气消除系统（73A，73B，74A，74B）耦合到包括行进质量块（33A，33B）和旋转臂（23A）的旋转结构 ，23B）。 在这样做时，诸如不想要的二次谐波运动的不期望的非线性运动被最小化。

    SENSOR DEVICE
    18.
    发明公开
    SENSOR DEVICE 审中-公开

    公开(公告)号：EP3457082A1

    公开(公告)日：2019-03-20

    申请号：EP18158580.3

    申请日：2018-02-26

    申请人： KABUSHIKI KAISHA TOSHIBA

    发明人： GANDO, Ryunosuke ,  IKEHASHI, Tamio ,  TOMIZAWA, Yasushi ,  OGAWA, Etsuji ,  MAEDA, Shunta

    IPC分类号： G01C19/5733 ,  G01C19/5769 ,  B81B3/00

    摘要： According to one arrangement, a sensor device includes a movable body (11) capable of vibrating, and a catch-and-release mechanism (14) capable of catching the vibrating movable body and capable of releasing the caught movable body. The catch-and-release mechanism includes a stopper portion (14b) capable of stopping vibration of the movable body when the movable body contacts the stopper portion, and an elastic member (14c) configured to reduce a force acting between the movable body and the stopper portion.

    Micromachined gyroscope including a guided mass system
    19.
    发明授权
    Micromachined gyroscope including a guided mass system 有权

    公开(公告)号：EP2884229B1

    公开(公告)日：2018-09-19

    申请号：EP14182956.4

    申请日：2014-08-29

    申请人： InvenSense, Inc.

    发明人： Anac, Ozan ,  Seeger, Joseph

    IPC分类号： G01C19/5712 ,  G01C19/5733 ,  G01C19/574

    CPC分类号： G01C19/5712 ,  G01C19/5733 ,  G01C19/574

    摘要： A gyroscope (150) comprises a substrate (101) and a guided mass system. The guided mass system comprises proof masses (102a, 651) and guiding arms (104a, 104b) disposed in a plane parallel to the substrate (101). The proof masses are coupled to the guiding arm by springs (103a, 103b). The guiding arm is coupled to the substrate by springs (108a,108b). At least one of the proof-masses (651) is directly coupled to the substrate (101) by at least one anchor via a spring system (710a,710b). The gyroscope also comprises an actuator (109a, 109b) for vibrating one of the proof-masses (102a) in the first direction, which causes another proof mass to rotate in the plane. Finally, the gyroscope also includes transducers (660a, 660b) for sensing motion of the guided mass system in response to angular velocities about a single axis or multiple input axes.

    STRUCTURE OF DISPLACEMENT MONITORING ELECTRODE
    20.
    发明授权
    STRUCTURE OF DISPLACEMENT MONITORING ELECTRODE 有权

    公开(公告)号：EP2743639B1

    公开(公告)日：2018-09-19

    申请号：EP11870767.8

    申请日：2011-08-09

    申请人： Toyota Jidosha Kabushiki Kaisha

    发明人： NARITA, Katsutoshi

    IPC分类号： G01C19/56 ,  G01B7/00 ,  B81B3/00 ,  G01C19/5733

    CPC分类号： G01B7/14 ,  B81B3/0086 ,  B81B2201/033 ,  G01C19/5733

    摘要： The displacement amount monitoring electrode structure according to the present invention is for maintaining the amplitude of the detection mass at a constant target amplitude even when the relative relationship between a fixed electrode and a movable electrode changes, and includes a fixed electrode and a movable electrode each having a comb-teeth shape including a base part and electrode fingers extending from the base part in a predetermined axis direction parallel to a substrate, the fixed electrode and the movable electrode facing each other such that the electrode fingers of the fixed electrode and the electrode fingers of the movable electrode are meshed together, the fixed electrode being fixed to the substrate and the movable electrode being able to be displaced in the predetermined axis direction, wherein the displacement amount monitoring electrode structure monitors a displacement amount of a detection mass to be driven at a target amplitude based on a change amount of a capacitance between the fixed electrode and the movable electrode, wherein a change sensitivity of the change amount of the capacitance with respect to a displacement amount of the movable electrode in the predetermined axis direction, becomes larger after the displacement of the movable electrode in the predetermined axis direction reaches a target displacement amount corresponding to the target amplitude of the detection mass, compared to before the displacement of the movable electrode reaches the target displacement amount.