-
公开(公告)号：EP3300886A1
公开(公告)日：2018-04-04
申请号：EP17192685.0
申请日：2017-09-22
申请人： Orbotech Ltd.
发明人： KOTLER, Zvi , ANKRI, Jonathan
IPC分类号： B41J2/005 , B41J25/304 , C23C26/02 , H05K3/04 , C23C14/28
CPC分类号： H01L21/02266 , B05D1/286 , B05D3/06 , B41J2/005 , H01L21/683 , H05K3/046 , H05K3/305 , H05K3/321 , H05K3/3484 , H05K2203/0528 , H05K2203/107
摘要： A method for disposing material includes positioning a donor film including a donor material at a predefined distance from an acceptor substrate (12), the donor film (62) facing toward the acceptor substrate (12). One or more pulses of laser radiation are directed to impinge on the donor film (62) at a given location so as to induce formation of a protrusion made from the donor material. A distal tip of the protrusion touches the acceptor substrate (12) and disposes thereon while the protrusion is still in contact with the donor film (62). A spot of the donor material is formed on the acceptor substrate (12) by increasing a separation between the donor film and the acceptor substrate so as to detach the distal tip of the protrusion from the donor film.
摘要翻译： 用于设置材料的方法包括将包括施主材料的施主膜定位在与受主基板（12）相距预定距离处，施主膜（62）面向受主基板（12）。 将一个或多个激光辐射脉冲指向在给定位置撞击供体膜（62），以诱导形成由供体材料制成的突起。 当突起仍然与供体膜（62）接触时，突起的远侧末端接触受体基底（12）并且设置在其上。 通过增加供体膜和受体基底之间的间隔，在受体基底（12）上形成供体材料的斑点，从而将突起的远侧尖端从供体膜分离。
-
公开(公告)号：EP3226530A1
公开(公告)日：2017-10-04
申请号：EP17170696.3
申请日：2012-08-08
CPC分类号： G02F1/11 , G02B26/124 , G02B27/0955 , G02B27/30 , H04N1/04 , H04N1/0408 , H04N1/0443
摘要： A beam-forming optical system comprising:
an illumination unit (100) comprising a plurality of light sources (50) configured to emit a plurality of beams (65), the plurality of light sources (50) comprising at least four laser diodes;
an optical arrangement (60) configured to transmit all of the plurality of beams (65) onto an
acoustic optical modulator (AOM) (70);
the AOM positioned to receive all of the plurality of beams (65) transmitted by the optical arrangement (60) and configured to modulate all of the plurality of beams (65) incident thereon.摘要翻译： 一种光束形成光学系统，包括：照明单元（100），包括配置成发射多个光束（65）的多个光源（50），所述多个光源（50）包括至少四个激光二极管; 被配置为将所有所述多个光束（65）传输到声学光学调制器（AOM）（70）上的光学装置（60）; AOM定位成接收由光学装置（60）发送的所有多个光束（65）并且被配置为调制入射在其上的所有多个光束（65）。
-
公开(公告)号：EP3207772A1
公开(公告)日：2017-08-23
申请号：EP15852999.0
申请日：2015-10-19
申请人： Orbotech Ltd.
发明人： ZENOU, Michael , KOTLER, Zvi
CPC分类号： C23C14/04 , C23C14/48 , H01L21/2855 , H01L21/4846 , H01L31/022425 , H05K3/14 , H05K2203/0528 , H05K2203/107 , H05K2203/128
摘要： A method for metallization includes providing a transparent donor substrate (34) having deposited thereon a donor film (36) including a metal with a thickness less than 2 pm. The donor substrate is positioned in proximity to an acceptor substrate (22) including a semiconductor material with the donor film facing toward the acceptor substrate and with a gap of at least 0.1 mm between the donor film and the acceptor substrate. A train of laser pulses, having a pulse duration less than 2 ns, is directed to impinge on the donor substrate so as to cause droplets (44) of the metal to be ejected from the donor layer and land on the acceptor substrate, thereby forming a circuit trace (25) in ohmic contact with the semiconductor material.
摘要翻译： 一种用于金属化的方法包括提供其上沉积有包括厚度小于2μm的金属的供体膜（36）的透明供体基板（34）。 供体衬底位于包含半导体材料的受主衬底（22）附近，其中供体膜面向受主衬底并且在供体膜和受主衬底之间具有至少0.1mm的间隙。 具有小于2ns的脉冲持续时间的激光脉冲序列指向冲击供体基底以致使金属的液滴（44）从施主层喷射并落在受主基底上，由此形成 与半导体材料欧姆接触的电路迹线（25）。
-
公开(公告)号：EP3177965A1
公开(公告)日：2017-06-14
申请号：EP15830329.7
申请日：2015-08-02
申请人： Orbotech Ltd.
发明人： KOTLER, Zvi , ZENOU, Michael , PELED, Itay
IPC分类号： G03F7/00 , C23C14/28 , B23K26/067
CPC分类号： B41J2/455 , B23K26/0676 , C23C14/04 , C23C14/28 , G03F7/2014
摘要： Printing apparatus (20) includes a donor supply assembly (30), which provides a transparent donor substrate (26) having opposing first and second surfaces and a donor film formed on the second surface so as to position the donor film in proximity a target area (28) on an acceptor substrate (22). An optical assembly (24) directs multiple output beams of laser radiation simultaneously in a predefmed spatial pattern to pass through the first surface of the donor substrate and impinge on the donor film so as to induce ejection of material from the donor film onto the acceptor substrate according, thereby writing the predefined pattern onto the target area of the acceptor substrate.
摘要翻译： 印刷设备（20）包括供体供应组件（30），其提供具有相对的第一和第二表面的透明供体基板（26）和形成在第二表面上的供体膜，以将供体膜定位在目标 区域（28）在受体衬底（22）上。 光学组件（24）以预定的空间图案同时引导激光辐射的多个输出光束以穿过供体基板的第一表面并撞击供体膜，从而诱导材料从供体膜喷射到受体基板上 从而将预定义的图案写入到受体衬底的目标区域上。
-
公开(公告)号：EP2560362A3
公开(公告)日：2013-08-28
申请号：EP12179630.4
申请日：2012-08-08
IPC分类号： H04N1/04
CPC分类号： G02F1/11 , G02B26/124 , G02B27/0955 , G02B27/30 , H04N1/04 , H04N1/0408 , H04N1/0443
摘要： A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources (50) configured to emit a plurality of beams (65), an optical system (60) for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator (70) positioned to receive the plurality of beams (65) aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams (65) as an acoustic wave propagates in an acoustic direction, and a scanning element (80) adapted to scan an exposure plane with the plurality of beams (65) modulated by the acoustic optical modulator (70) at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams (65) into a single exposure spot.
-
公开(公告)号：EP2145164A4
公开(公告)日：2012-07-04
申请号：EP08738321
申请日：2008-05-06
申请人： ORBOTECH LTD
发明人： SHAHAR ARIE , EL-HANANY URI , GUTMAN ZEEV , ZEMER DAN , AMRAMI AHARON , COHEN SHIMON
IPC分类号： A61B6/00
CPC分类号： G01T1/1611 , A61B6/032 , A61B6/037 , A61B6/4014 , A61B6/463 , A61B6/469
-
公开(公告)号：EP2030069A4
公开(公告)日：2010-07-14
申请号：EP07825688
申请日：2007-06-20
申请人： ORBOTECH LTD
发明人： SLOR YECHIEL , BRONFMAN ARKADY , TZUBERY RONI , ZEMER DAN
CPC分类号： G02B26/101 , G02B7/1821 , G02B7/198
-
公开(公告)号：EP1872956A3
公开(公告)日：2008-08-06
申请号：EP07012463.1
申请日：2007-06-26
申请人： ORBOTECH LTD.
发明人： Ganot, Amnon , Hanina, Golan
CPC分类号： B41J25/304 , B41J2/435 , G03F7/24 , H05K3/0082 , H05K2201/0191 , H05K2203/163
摘要： System and corresponding method for plotting an image on a thin material having variations in thickness. System (40) includes: a plotter unit (46), for plotting the image on a surface (48) of thin material (42); a control unit (50), for controlling plotter unit (46), for effecting the plotting; and a thickness measuring device (52), for measuring thickness (44) of thin material (42). Control unit (50) receives measured thickness values from thickness measuring device (52), and uses measured thickness values for adjusting plotting of the image via plotter unit (46), to compensate for variations in thickness (44) of thin material (42).
-
公开(公告)号：EP0791426A3
公开(公告)日：1998-07-15
申请号：EP97301166
申请日：1997-02-21
申请人： ORBOTECH LTD
发明人： CASPI AMIRAM , HALUTZ ZAMIR
摘要： This invention discloses a conveyor table (3), including a supporting construction (5) having a first supporting surface (31) for supporting articles (A) to be conveyed, a plurality of conveyor elements (33) mounted to the supporting construction (5) and defining a second supporting surface for supporting the articles (A) to be conveyed, an actuator (CA) for selectively moving one of the supporting surfaces (31) with respect to the other to selectively enable either the first supporting surface (31) defined by the supporting construction to support the articles (A), or the second supporting surface defined by the conveyor elements (33) to support the articles (A), and a drive (CD2) for driving the conveyor elements (33) to convey the articles (A) in a predetermined direction when the articles (A) are supported by the second supporting surface defined by the conveyor elements (33).
-
30.发明公开Apparatus and method for display panel inspection 失效Vorrichtung und Verfahren zur Inspektion einer Anzeigetafel。
公开(公告)号：EP0672933A1
公开(公告)日：1995-09-20
申请号：EP95301647.4
申请日：1995-03-13
申请人： ORBOTECH LTD
发明人： Sali, Erez , Dotan, Noam , Katzir, Yigal , Gross, Abraham
CPC分类号： G02F1/1309
摘要： A system for inspecting a display panel including a plurality of pixels, the system including a selective pixel actuator which causes only some of the plurality of pixels to be actuated, a sensor for acquiring an image of a pattern which is generated on the panel, and an image processor operative to identify nonuniformities in the intensities of pixels of the panel.
摘要翻译： 一种用于检查包括多个像素的显示面板的系统，所述系统包括仅使多个像素中的一些被致动的选择性像素致动器，用于获取在面板上产生的图案的图像的传感器，以及 图像处理器可操作以识别面板的像素强度中的不均匀性。
-
-
-
-
-
-
-
-
-
搜索结果
80 条记录 (耗时 0.014 秒)
