利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

25 条记录 (耗时 0.011 秒)

    ION TRAPPING
    22.
    发明授权
    ION TRAPPING 有权
    方法ION夹杂

    公开(公告)号：EP1402562B1

    公开(公告)日：2009-02-11

    申请号：EP02738591.3

    申请日：2002-06-17

    申请人： YEDA RESEARCH AND DEVELOPMENT CO., LTD.

    发明人： ZAJFMAN, Daniel ,  HEBER, Oded ,  PEDERSEN, Henrik, B. ,  RUDICH, Yinon ,  SAGI, Irit ,  RAPPAPORT, Michael

    IPC分类号： H01J49/40

    CPC分类号： H01J3/40 ,  H01J49/027 ,  H01J49/406 ,  H01J49/4245

    摘要： A method for trapping of a plurality of charged particles in a charged particle trap. The trap includes first and second electrode mirrors (2, 3) having a common optical axis (4), the mirrors being arranged in alignment at two extremities thereof. The mirrors are capable, when voltage is applied thereto, of creating respective electric fields defined by key field parameters. The electric fields are configured to reflect charged particles causing their oscillation between the mirrors. The method includes introducing into the trap, along the optical axis, the plurality of charged particles as a beam (10) having pre-determined key beam parameters. The method further includes choosing the key field parameters for at least one of the mirrors such as to induce bunching among charged particles in the beam.

    ELECTROSTATIC TRAP FOR PARTICLES ENTRAINED IN AN ION BEAM
    23.
    发明授权
    ELECTROSTATIC TRAP FOR PARTICLES ENTRAINED IN AN ION BEAM 有权
    ELEKTROSTATISCHE FANGVORRICHTUNGFÜR，IN EINEM IONENSTRAHLMITGEFÜHRTENTEILCHEN

    公开(公告)号：EP1314181B1

    公开(公告)日：2008-12-10

    申请号：EP01960907.2

    申请日：2001-08-21

    申请人： Axcelis Technologies, Inc.

    发明人： HARRINGTON, Eric, Ryan ,  BENVENISTE, Victor, Maurice ,  GRAF, Michael, Anthony ,  RATHMELL, Robert, Day

    IPC分类号： H01J37/317 ,  H01J3/40

    CPC分类号： H01J37/3171 ,  H01J3/40 ,  H01J37/026 ,  H01J37/3002 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/31705

    摘要： A system (10) for inhibiting the transport of contaminant particles (60) with an ion beam (44) includes a pair of electrodes (14, 16) that provide opposite electric fields (26, 28, 30, 32) through which the ion beam (44) travels. A particle (60) entrained in the ion beam (44) is charged to a polarity matching the polarity of ion beam (44) when traveling through a first of the electric fields (26, 28). The downstream electrode (16) provides another electric field (30, 32) for repelling the positively charged particle (60) away from the direction of beam travel.

    摘要翻译： 用于抑制用离子束输送污染物颗粒的系统包括一对电极，其提供相反的电场，离子束通过该电场传播。 夹带在离子束中的颗粒在穿过第一电场时被充电到与离子束的极性相匹配的极性。 下游电极提供另一个电场，用于排斥带正电的粒子远离光束移动的方向。