Mask removal tool
    25.
    发明公开
    Mask removal tool 失效
    面膜去除装置。

    公开(公告)号:EP0214514A2

    公开(公告)日:1987-03-18

    申请号:EP86111466.8

    申请日:1986-08-19

    发明人: Burns, Richard W.

    IPC分类号: G03B41/00 G03F1/00

    摘要: An apparatus 10 for removing a mask 11 which extends beyond the outer edges of a semiconductor wafer 12 bonded thereto. The apparatus includes a base 22 having a vacuum chamber 26 opening onto the upper surface of the base, a vacuum valve 20 separating the vacuum chamber 26 from a vacuum source 21, an actuating lever 16 and a mask discharge facilitator 27. The discharge facilitator 27 comprises a horizontal plate 19 having a plurality of vertical pins 18 around the periphery thereof. When the lever 16 is actuated, it opens the vacuum valve and lifts the discharge facilitator forcing the vertical pins 18 into contact with the mask 11. The simultaneous application of the vacuum holding force, and vertical force applied by the pins causes the separation of the mask from the upper surface of the wafer.

    THERMAL DEVELOPMENT SYSTEM AND METHOD OF USING THE SAME
    26.
    发明授权
    THERMAL DEVELOPMENT SYSTEM AND METHOD OF USING THE SAME 有权
    热显影系统及其使用方法

    公开(公告)号:EP1899766B1

    公开(公告)日:2012-04-11

    申请号:EP06734610.6

    申请日:2006-02-09

    IPC分类号: G03C1/00 G03F7/00

    摘要: An improved apparatus and a method of using the apparatus to remove non- crosslinked photopolymer from an imaged and exposed surface of a relief image printing element. Included are means for supporting and rotating the printing element, means for softening and/or melting non-crosslinked photopolymer on the imaged and exposed surface of the printing element, and at least one thermal developing assembly. The thermal developing assembly includes means for supplying an absorbent material that is contactable with the printing element, and that is capable of removing at least a portion of the softened and/or melted non-crosslinked photopolymer, and means for causing the absorbent material to contact at least a portion of the printing element. The absorbent material is backed with an endless impression belt that is supported by a plurality of rollers. When the absorbent material contacts the surface of the printing element, softened and/or melted non-crosslinked photopolymer on the surface of the printing element is removed.

    VORRICHTUNG UND VERFAHREN ZUM TRENNEN EINES SUBSTRATS VON EINEM TRÄGERSUBSTRAT
    27.
    发明公开
    VORRICHTUNG UND VERFAHREN ZUM TRENNEN EINES SUBSTRATS VON EINEM TRÄGERSUBSTRAT 审中-公开
    VORRICHTUNG UND VERFAHREN ZUM TRENNEN EINES SUBSTRATS VON EINEMTRÄGERSUBSTRAT

    公开(公告)号:EP2422357A1

    公开(公告)日:2012-02-29

    申请号:EP10712355.6

    申请日:2010-03-31

    申请人: EV Group GmbH

    IPC分类号: H01L21/00

    摘要: A device for separating a substrate from a carrier substrate bonded to the substrate by a bonding layer, with a carrier substrate receptacle with a receiving surface for receiving the carrier substrate, a substrate receptacle, arranged opposite the carrier substrate receptacle, with a substrate receiving surface that can be arranged parallel to the first-mentioned receiving surface and is intended for receiving the substrate, wherein separating means are provided for the parallel displacement of the substrate with respect to the carrier substrate in a bonded state of the substrate and the carrier substrate. Furthermore, the invention relates to a method for separating a substrate from a carrier substrate bonded to the substrate by a bonding layer with the following steps: receiving a bonded substrate/carrier-substrate assembly comprising the carrier substrate, the bonding layer and the substrate, between a substrate receiving surface of a substrate receptacle and a receiving surface of a carrier substrate receptacle that can be arranged parallel to the substrate receiving surface and separation of the substrate from the carrier substrate by parallel displacement of the substrate with respect to the carrier substrate in a bonded state of the substrate and the carrier substrate.

    摘要翻译: 用于通过互连层与衬底分离衬底与装置衬底的装置。 该装置包括具有用于保持载体衬底的保持表面的载体衬底保持器和与载体衬底保持器相对定位的衬底保持器,衬底保持表面可平行于容纳衬底的保持表面定位。 在衬底和载体衬底的互连状态下,存在用于平行移动衬底相对于载体衬底的分离装置。