Apparatus for the automatic separation along predetermined bending fracture lines in basic ceramic platelets of hybrid electronic circuits
    3.
    发明公开
    Apparatus for the automatic separation along predetermined bending fracture lines in basic ceramic platelets of hybrid electronic circuits 失效
    装置用于沿着在混合动力用电子电路的基本陶瓷血小板预定弯曲断裂线的自动分离。

    公开(公告)号:EP0346997A2

    公开(公告)日:1989-12-20

    申请号:EP89201533.0

    申请日:1989-06-14

    申请人: AISA S.p.A.

    IPC分类号: H01L21/00 B28D5/00

    摘要: Apparatus for the automatic separation, along predetermined bending fracture lines, in basic ceramic platelets of hybrid electronic circuits, which apparatus comprises a support plate, provided with grooves on its lower face extending into close proximity with its upper face, these grooves defining bending lines, disposed in correspondence with the bending fracture lines of a ceramic platelet placed in register above said plate, which grooves define relative bays of the plate which are rigid in bending, these bays corres­ponding to the single elements into which the platelet is to be subdivided, upper pressing members being present adapted for clamping each element of the platelet against the corresponding bay or square of the plate, which is rigidly supported in correspondence with one single bay or square, lower opposing members being present, acting against each of the remaining bays, these members being retractable on command in a predetermined sequence, the successive bending of the plate along the lines defined by the grooves of said plate being brought about by the action of the upper pressing members, said bending causing the fracture of the ceramic platelet along the predetermined lines coinciding with the grooves of the plate.

    摘要翻译: 装置自动分离,沿着在混合动力用电子电路,该装置包括一个支撑板的基本陶瓷血小板,设置有在其下表面延伸成与它的上表面上靠近槽预先确定的弯曲断裂线,论文槽限定弯曲线, 设置成与陶瓷血小板在以上所述板寄存器之下,该凹槽限定所述板的相对托架哪些是在弯曲,论文托架对应于单个元件到其中的血小板是刚性的弯曲断裂线对应是细分,上 按压部件存在angepasst用于夹紧刚性地对应于一个单一的托架或正方形支撑在板的相应托架或正方形,所述血小板中的每个元素的所有,下对置构件存在,作用于每个剩余的海湾,论文 件以预定的顺序是根据命令伸缩,理论值的连续弯曲 沿着由所述板的凹槽定义的行e盘由上按压件,所述弯曲曹景伟沿预定线路与该板的槽重合的陶瓷血小板的断裂的作用而引起的。

    Scribing apparatus for manufacturing solar cells
    4.
    发明公开
    Scribing apparatus for manufacturing solar cells 审中-公开
    用于制造太阳能电池的划线装置

    公开(公告)号:EP2874189A2

    公开(公告)日:2015-05-20

    申请号:EP14191647.8

    申请日:2014-11-04

    IPC分类号: H01L31/18

    摘要: A scribing apparatus for manufacturing a solar cell, and a method of manufacturing a solar cell using the same are provided. The scribing apparatus includes a stage part configured to support a substrate having at least one thin film layer, a scribing unit configured to scribe on the at least one thin film layer, and a moving unit configured to move at least one of the stage part and the scribing unit during the scribing process. A method of manufacturing a solar cell using the scribing apparatus includes scribing a first pattern onto a reflective electrode layer using the scribing apparatus, the reflective electrode layer being on the substrate, the scribing apparatus further including a needle installation part having a first needle configured to scribe on one side of the reflective electrode layer, and a second needle configured to scribe on a side surface of the reflective electrode layer.

    摘要翻译: 提供一种用于制造太阳能电池的划线装置以及使用该划线装置制造太阳能电池的方法。 该划线设备包括:台部,被构造为支撑具有至少一个薄膜层的基板;划刻单元,构造成对所述至少一个薄膜层划片;以及移动单元,构造成移动台部和 划线过程中的划线单元。 使用划线装置制造太阳能电池的方法包括使用划线装置将第一图案划线到反射电极层上,反射电极层位于衬底上,划线装置还包括具有第一针的针安装部, 在所述反射电极层的一侧上划线,以及第二针,所述第二针被配置为在所述反射电极层的侧表面上划片。

    Vorrichtung zum Brechen eines dünnen plattenförmigen Gegenstands
    6.
    发明公开
    Vorrichtung zum Brechen eines dünnen plattenförmigen Gegenstands 审中-公开
    Vorrichtung zum Brechen einesdünnenplattenförmigenGegenstands

    公开(公告)号:EP1724082A1

    公开(公告)日:2006-11-22

    申请号:EP06009603.9

    申请日:2006-05-10

    IPC分类号: B28D5/00

    摘要: Eine Vorrichtung (10) zum Brechen eines dünnen, plattenförmigen Gegenstands (11), insbesondere eines Substrats oder eines Wafers, entlang einer geritzten Linie (12), mit einer zusammengesetzen Auflage, die eine Grundplatte (14) und eine auf deren Oberseite angeordnete nachgiebige, federnd elastisch verformbare Auflagematte (13) umfasst, sowie mit einem in Richtung auf die Auflagematte verfahrbaren Brechstempel (15), wobei der plattenförmige Gegenstand zum Brechen so auf der der Grundplatte abgewandten Oberseite der Auflagematte aufgelegt ist, dass die Verfahrrichtung des Brechstempels auf die geritzte Line zielt, ist dadurch gekennzeichnet, dass die Auflagematte auf ihrer der Grundplatte zugewandten Unterseite in Verfahrrichtung des Brechstempels und damit im Betrieb unterhalb der geritzten Linie des plattenförmigen Gegenstandes eine nicht bis zur Oberseite der Auflagematte sich erstreckende Freisparung (16) in ihrer der Grundplatte zugewandten Unterseite aufweist. Damit wird mit einfachen Mitteln ein Brechen von dünnen, plattenförmigen Gegenständen verschleißarm und schonend ermöglicht, wobei insbesondere ein Springen des Gegenstands beim Brechen verhindert wird.

    摘要翻译: 该装置具有基板(14),其具有沿柱塞(15)的方向上下颠倒的支撑垫(13)。 扁平状物体11具有沿着支撑垫的下侧的划痕线(12)以及间隙凹部(16),其不延伸到支撑垫的上侧,面向支撑垫的下表面 底盘。

    Integrated partial sawing process
    8.
    发明公开
    Integrated partial sawing process 失效
    Verfahren zum teilweisenSägenvon intergrierter Schaltkreise。

    公开(公告)号:EP0610657A3

    公开(公告)日:1997-02-05

    申请号:EP94100206.5

    申请日:1994-01-07

    IPC分类号: H01L21/78

    摘要: A process for partially sawing the streets or grooves (50) on semiconductor wafers (48). After sawing, the streets (50) can be covered by a protective material (52), and then the wafer continues its processing as before. After the wafer (48) is broken, the protective material (52) may or may not be removed. Additionally, the wafer(50) may be broken into individual chips using a wedge piece (70) that has a number of individual wedges (72) on it, where the individual wedges (70) press against the partially sawn streets (50), causing the wafer (48) to break.

    摘要翻译: 一种用于部分地锯切半导体晶片(48)上的街道或凹槽(50)的工艺。 锯切后,街道(50)可被保护材料(52)覆盖,然后晶片如前所述继续其处理。 在晶片(48)破裂之后,保护材料(52)可以被移除也可以不被去除。 另外,可以使用在其上具有多个单独的楔(72)的楔块(70)将晶片(50)破碎成单独的芯片,其中单个楔(70)压靠部分锯切的街道(50), 导致晶片(48)断裂。

    Method and device for carrying out the cleavage in ultra-high-vacuum environment of portions of a processed semiconductor wafer
    9.
    发明公开
    Method and device for carrying out the cleavage in ultra-high-vacuum environment of portions of a processed semiconductor wafer 失效
    在Ultrahochvakuum的Verfahren und Vorrichtung zum Spalten von Halbleiterplatten

    公开(公告)号:EP0744796A1

    公开(公告)日:1996-11-27

    申请号:EP96107228.7

    申请日:1996-05-08

    IPC分类号: H01S3/025 H01L21/304 B28D5/00

    摘要: A method and a device are provided for obtaining semiconductor bars for laser devices starting from portions of a processed wafer and carrying out the cleavage in ultra-high-vacuum. The cleavage mechanical stresses are impulsive forces and are all applied from the processed side of the wafer through a lowerable shaped member actuated by compressed helical springs, which applies these stresses on the ledging parts of the wafer portion hold on the central region thereof by a fixed support and hold down in position by a suitably shaped centering thrust member. The spring-up occurs by translating the device in the ultra-high-vacuum environment and contrasting a locking lever engaging the lowerable member in its upper position with a fixed cam.

    摘要翻译: 提供一种方法和装置,用于从处理的晶片的部分开始获得用于激光装置的半导体条,并在超高真空中进行切割。 裂解机械应力是冲击力,并且都是从晶片的经处理侧通过由压缩螺旋弹簧致动的可下降的成形构件施加的,所述可降低的形状构件通过固定的螺旋弹簧将这些应力施加在其中心区域上的晶片部分的突出部分上 通过适当形状的定心推力构件支撑并保持在适当的位置。 通过在超高真空环境中平移装置并将与上部位置的可下降构件接合的锁定杆与固定凸轮进行对比来实现弹起。

    METHOD AND APPARATUS FOR SCRIBING AND/OR BREAKING SEMICONDUCTOR WAFERS
    10.
    发明公开
    METHOD AND APPARATUS FOR SCRIBING AND/OR BREAKING SEMICONDUCTOR WAFERS 失效
    方法和设备书记和/或破坏半导体板

    公开(公告)号:EP0740598A1

    公开(公告)日:1996-11-06

    申请号:EP95907448.0

    申请日:1995-01-12

    发明人: TURNER, James, R.

    IPC分类号: B26F3 B28D5

    摘要: Apparatus for automatic scribing and breaking of semiconductor wafers wherein scribing is performed at a scribing station (S) and the scribed wafer transported in the X direction to a breaking station (B) on an X-Y table (3, 9). Scribing and breaking of parallel lines is accomplished by transporting the wafer step-wise in the Y direction by the Y table (3). Rotation of the wafer for scribing and breaking along sets of lines perpendicular to one another is accomplished by a theta table (18) carried on the Y table (3). An impulse bar (28) is carried by the X table (9) for applying force to the bottom surface of the wafer during both scribing and breaking. Scribing and breaking parameters needed to scribe and break the wafer are entered into computer memory and operated upon by computer controls to automate the scribing and/or breaking process.