公开(公告)号：EP2633546A1

公开(公告)日：2013-09-04

申请号：EP11835706.0

申请日：2011-10-27

Applicant: Smiths Detection Montreal Inc. ,  Samarin, Oleg

Inventor： ZALESKI, Henryk ,  PINIARSKI, Mark ,  FELDBERG, Simon ,  ANDERSON, Jeff ,  SAMARIN, Oleg

IPC: H01J49/06 ,  H01J3/04 ,  H01J49/40

Abstract: Method and systems for managing clear-down are provided. The method can include generating a clear-down trigger associated with an ion mobility spectrometer and operating the ion mobility spectrometer in fast clear-down mode in response to the clear-down trigger. Methods and systems can further provide that where the ion mobility spectrometer operates in fast-switching mode, the ion mobility spectrometer alternating a plurality of times between operation according to a positive ion mode and operation according to a negative ion mode, and further operating according to the positive ion mode for less than about 1 second before switching to the operation according to the negative ion mode, and operating according to the negative ion mode for less than about 1 second before switching to the operation according to the positive ion mode.

Abstract translation: 提供了用于管理清除的方法和系统。 该方法可以包括产生与离子迁移谱仪相关联的清除触发器，并响应于清除触发而以快速清除模式操作离子迁移谱仪。 方法和系统可以进一步提供离子迁移谱仪以快速切换模式工作的方式，离子迁移谱仪根据正离子模式操作和根据负离子模式的操作交替进行多次，并根据 正离子模式小于约1秒，然后根据负离子模式切换到操作，并根据负离子模式操作小于约1秒，然后根据正离子模式切换到操作。

公开(公告)号：EP0810628A2

公开(公告)日：1997-12-03

申请号：EP97105519.9

申请日：1997-04-03

Applicant: Forschungszentrum Karlsruhe GmbH

Inventor： Engelko, Vladimir, Dr. ,  Giese, Harald ,  Müller, Georg ,  Schalk, Sven ,  Schultheiss, Christoph, Dr. ,  Würz, Hermann, Dr.

IPC: H01J33/00 ,  H01J3/02 ,  H01J3/04 ,  H01J27/08 ,  H01J29/48 ,  H01J37/077 ,  H01J37/317 ,  H01J1/00

CPC classification number: H01J37/08 ,  H01J3/025 ,  H01J27/08 ,  H01J37/077

Abstract: Die Erfindung betrifft eine Quelle zur Erzeugung von gepulsten Ionen- und Elektronenstrahlen.
Mit ihr wird ein in seinem Strahlquerschnitt großflächiger Strom geladener Teilchen erzeugt. Die Vakuum-Bogenplasmaquelle wird durch eine den Gesamtstrom bestimmende Last, die aus der Parallelschaltung eines ohmschen Widerstands mit einem Kondensator besteht, zur sichern Zündung geführt. Diese Last ist an den Innenwiderstand des Pulsspannungsgenerators leistungsangepaßt. Die Dimensionierung der elektrischen Bauteile an den Elektroden unter Berücksichtigung vorgegebener Schranken ermöglicht einen in seinem Strahlquerschnitt homogenen Strom geladener Teilchen, der aus ein und demselben Ladungsteilchen bei gleichen Zündelektroden oder aus einem strukturierten Strom unterschiedlicher Teilchensorten bei unterschiedlichem Zündelektrodenmaterial besteht.

Abstract translation: 将源放置在具有四个高压馈通（F1-F4）的真空室（VC）中。 放电阳极（DE）具有孔的图案，电线（NE）从连接到集电器（K）的串联电阻（R0）突出。 阳极侧栅格（AG）具有围绕其边缘形成的聚焦电极（AFE）。 两个阴极侧栅格中的一个（CG1）具有类似的外围电极（CFE）。 从电容器（Ca）与电阻器（Ra）并联的电极和放电阳极之间产生电弧，限制了离子电流。

公开(公告)号：EP0729641A4

公开(公告)日：1997-04-09

申请号：EP95902561

申请日：1994-11-16

Applicant: SANDIA CORP

Inventor： GREENLY JOHN B

IPC: B29C35/08 ,  B29C59/16 ,  C23C8/36 ,  C23C14/48 ,  G21K5/04 ,  H01J3/04 ,  H01J27/00 ,  H01J27/08 ,  H01J27/14 ,  H01J37/08 ,  H01L21/48

CPC classification number: C08J7/123 ,  B29C59/16 ,  B29C2035/0872 ,  C23C8/36 ,  C23C14/48 ,  H01J27/14 ,  H01J2237/08 ,  H01J2237/31701

Abstract: An improved magnetically-confined anode plasma pulsed ion beam source (25). Beam rotation effects and power efficiency are improved by a magnetic design which places the separatrix between the fast field flux structure (408) and the slow field structure (414) near the anode (410) of the ion beam source, by a gas port design (404, 406) which localizes the gas delivery into the gap between the fast coil (408) and the anode (410), by a pre-ionizer ringing circuit connected to the fast coil, and by a bias field means (180) which optimally adjusts the plasma formation position in the ion beam source.

公开(公告)号：EP0139377B1

公开(公告)日：1991-03-27

申请号：EP84305543.5

申请日：1984-08-15

Applicant: APPLIED MATERIALS, INC.

Inventor： Aitken, Derek

IPC: H01L21/265 ,  H01J37/317 ,  H01J3/04

CPC classification number: H01J49/30 ,  H01J27/022 ,  H01J27/028 ,  H01J27/14 ,  H01J37/05 ,  H01J37/08 ,  H01J37/3171

公开(公告)号：EP0282467A1

公开(公告)日：1988-09-14

申请号：EP88850086.5

申请日：1988-03-10

Applicant: NIHON SHINKU GIJUTSU KABUSHIKI KAISHA

Inventor： Fukui, Ryota ,  Takagi, Kenichi ,  Kikuchi, Riichi ,  Takayama, Kazuo, C.I.Heights D-501 ,  Tonegawa, Akira Daiichi Coop Izumi 205

IPC: H01J27/08 ,  H01J3/04

CPC classification number: H01J27/08 ,  H01J27/022

Abstract: A hollow cathode ion source comprising a cylindrical cathode (1) through one end of which at least a discharge maintaining gas or said discharge maintaining gas and a metal vapor is or are introduced, and an anode (2) provided on the other end of said cylindrical cathode (1) and having an ion extraction opening (2a), said gas or said gas and metal vapor being ionized by a discharge between said cylindrical cathode (1) and said anode (2) to produce ions which are extracted through said ion extraction opening (2a) in the axial direction of said cylindrical cathodes (1).
The cylindrical cathode in the ion source has a large diameter and may be directly cooled.

Abstract translation: 一种空心阴极离子源，包括一个圆柱形阴极（1），其一端至少具有放电保持气体或所述放电维持气体和金属蒸气或引入其中，阳极（2）设置在所述阴极 圆柱形阴极（1）并且具有离子提取开口（2a），所述气体或所述气体和金属蒸气通过所述圆柱形阴极（1）和所述阳极（2）之间的放电而离子化，以产生通过所述离子提取的离子 所述圆筒形阴极（1）的轴向上的抽出口（2a）。 离子源中的圆柱形阴极具有大直径并且可以直接冷却。

公开(公告)号：EP0000843B1

公开(公告)日：1981-03-11

申请号：EP78300268.6

申请日：1978-08-08

Applicant: Western Electric Company, Incorporated

Inventor： Williams, Norman

IPC: H01J27/00 ,  H01J3/04

CPC classification number: H01J27/14