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    Microelectromechanical z-axis detection structure with low thermal drifts
    21.
    发明授权
    Microelectromechanical z-axis detection structure with low thermal drifts 有权

    公开(公告)号：EP2284488B1

    公开(公告)日：2018-12-05

    申请号：EP10171355.0

    申请日：2010-07-30

    申请人： STMicroelectronics Srl

    发明人： Cazzaniga, Gabriele ,  Coronato, Luca ,  Simoni, Barbara

    IPC分类号： G01P15/125 ,  G01C19/5712 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/08

    CPC分类号： G01P15/125 ,  G01C19/5712 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/02 ,  G01P2015/0831

    摘要： A MEMS detection structure (10) comprising a substrate (2) having a top surface (2a) with at least a first fixed-electrode arrangement (5a); a sensing mass (3) extending in a plane (xy) and suspended above the substrate (2) and above the first fixed-electrode arrangement (5a) at a separation distance; and connection elastic elements (8a, 8b) supporting the sensing mass (3) for being freely rotatable out of the plane (xy), modifying the separation distance as a function of a detected quantity along an axis (z) orthogonal to the plane (xy). The MEMS detection structure further comprises a coupling mass (12), suspended above the substrate (2) and connected to the sensing mass (3) via the connection elastic elements (8a, 8b) and an anchoring arrangement (14, 15), which anchors the coupling mass (12) to the substrate (2) with at least a first point of constraint (13), set at a distance from the rotation axis (A) and in a position corresponding to the first fixed-electrode arrangement (5a).

    INERTIA SENSOR
    23.
    发明公开
    INERTIA SENSOR 有权

    公开(公告)号：EP3147674A4

    公开(公告)日：2018-01-17

    申请号：EP15796172

    申请日：2015-04-08

    申请人： HITACHI AUTOMOTIVE SYSTEMS LTD

    发明人： MAEDA DAISUKE ,  JEONG HEEWON ,  HAYASHI MASAHIDE

    IPC分类号： G01P15/10 ,  G01C19/5726 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

    CPC分类号： G01C19/5726 ,  G01C19/5755 ,  G01C19/5769 ,  G01C19/5776 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

    摘要： Provided is a technique forming a highly stable inertial sensor with a simple configuration by vacuum sealing a resonator which detects acceleration and exploiting a resonance vibration using a high Q value of a MEMS device. The inertial sensor includes: a detecting proof mass and beam 105 which detects acceleration; a driving electrode 106 which excites the detecting proof mass and beam 105; a resonant frequency tuning electrode 108 which changes the resonant frequency of the detecting proof mass and beam 105; and a detecting circuit which applies voltage (frequency controlling part 433, DAC part 436) to the resonant frequency tuning electrode 108 for changing the resonant frequency to cancel a change of the resonant frequency of the detecting proof mass and beam 105 when the acceleration is applied to the detecting proof mass and beam 105 during the vibration of the detecting proof mass and beam 105 by the voltage applied to the detecting proof mass and beam 105, and outputs the acceleration (CV converting part 430, ADC part 431, demodulation part 432, frequency controlling part 433, signal adjusting part 435) based on a value of the voltage applied to resonant frequency tuning electrode 108.

    INERTIA SENSOR
    25.
    发明公开
    INERTIA SENSOR 有权
    TRÄGHEITSSENSOR

    公开(公告)号：EP3147674A1

    公开(公告)日：2017-03-29

    申请号：EP15796172.3

    申请日：2015-04-08

    申请人： Hitachi Automotive Systems, Ltd.

    发明人： MAEDA, Daisuke ,  JEONG, Heewon ,  HAYASHI, Masahide

    IPC分类号： G01P15/10 ,  G01C19/5726 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/18

    CPC分类号： G01C19/5726 ,  G01C19/5755 ,  G01C19/5769 ,  G01C19/5776 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

    摘要： Provided is a technique forming a highly stable inertial sensor with a simple configuration by vacuum sealing a resonator which detects acceleration and exploiting a resonance vibration using a high Q value of a MEMS device. The inertial sensor includes: a detecting proof mass and beam 105 which detects acceleration; a driving electrode 106 which excites the detecting proof mass and beam 105; a resonant frequency tuning electrode 108 which changes the resonant frequency of the detecting proof mass and beam 105; and a detecting circuit which applies voltage (frequency controlling part 433, DAC part 436) to the resonant frequency tuning electrode 108 for changing the resonant frequency to cancel a change of the resonant frequency of the detecting proof mass and beam 105 when the acceleration is applied to the detecting proof mass and beam 105 during the vibration of the detecting proof mass and beam 105 by the voltage applied to the detecting proof mass and beam 105, and outputs the acceleration (CV converting part 430, ADC part 431, demodulation part 432, frequency controlling part 433, signal adjusting part 435) based on a value of the voltage applied to resonant frequency tuning electrode 108.

    摘要翻译： 提供了一种通过真空密封谐振器形成高度稳定的惯性传感器的技术，该谐振器利用MEMS器件的高Q值来检测加速度并利用共振振动。 惯性传感器包括：检测证明质量和检测加速度的梁105; 激励检测质量块和光束105的驱动电极106; 谐振频率调谐电极108，其改变检测质量块和光束105的谐振频率; 以及检测电路，其向共振频率调谐电极108施加电压（频率控制部433，DAC部436），以改变谐振频率，以抵消当施加加速度时检测证据质量和光束105的谐振频率的变化 通过施加到检测质量和光束105的电压在检测证明质量块和光束105的振动期间到检测质量和光束105，并输出加速度（CV转换部分430，ADC部分431，解调部分432， 频率控制部433，信号调整部435），基于施加到谐振频率调谐电极108的电压的值。

    PIEZORESISTIVE DETECTION RESONANT DEVICE IN PARTICULAR WITH LARGE VIBRATION AMPLITUDE
    26.
    发明公开
    PIEZORESISTIVE DETECTION RESONANT DEVICE IN PARTICULAR WITH LARGE VIBRATION AMPLITUDE 审中-公开
    RESONANTE VORRICHTUNG ZUR PIEZORESISTIVEN DETEKTION，INSBESONDERE MIT GROSSER SCHWINGUNGSAMPLITUDE

    公开(公告)号：EP3136052A1

    公开(公告)日：2017-03-01

    申请号：EP15306336.7

    申请日：2015-08-31

    申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives ,  Politecnico di Milano

    发明人： REY, Patrice ,  JOURDAN, Guillaume ,  ROBERT, Philippe ,  LANGFELDER, Giacomo ,  LONGONI, Antonio F ,  DELLEA, Stefano

    IPC分类号： G01C19/5755 ,  G01P15/09 ,  G01P15/08

    CPC分类号： G01L1/183 ,  G01C19/5607 ,  G01C19/5755 ,  G01P15/123 ,  G01P2015/0814 ,  G01P2015/0817 ,  G01P2015/0857

    摘要： Piezoresistive detection resonant device comprising a substrate (4), a mobile part (2) configured to move with respect the substrate (4), suspension means (6) suspending the mobile part (2) to the substrate (4), a piezoresistive detection device (10) to detect the motions of the mobile part (2), said piezoresistive detection device (10) comprising at least one strain gauge (12), wherein the piezoresistive detection resonant device also comprises a folded spring (20) with at least two spring arms, connected to the mobile part (2) and configured to be deformed by the motion of the mobile part (2), the at least one gauge (12) being suspended between the substrate (4) and the folded spring (20) in such manner that the deformation of the gauge is reduced compared to the motion of the mobile part.

    摘要翻译： 压阻检测共振装置，包括基板（4），被配置为相对于基板（4）移动的可移动部件（2），将可移动部件（2）悬挂到基板（4）的悬挂装置（6），压阻检测 用于检测可移动部分（2）的运动的装置（10），所述压阻检测装置（10）包括至少一个应变仪（12），其中所述压阻检测共振装置还包括至少具有折叠弹簧（20） 两个弹簧臂，连接到可移动部件（2）并且被配置为通过可移动部件（2）的运动而变形，所述至少一个量规（12）悬挂在基板（4）和折叠弹簧（20）之间 ），使得与可移动部件的运动相比，量规的变形减小。

    VIBRATING-MASS GYROSCOPE SYSTEMS AND METHOD
    27.
    发明公开
    VIBRATING-MASS GYROSCOPE SYSTEMS AND METHOD 审中-公开
    SCHWUNGMASSE-GYROSKOPSYSTEME UND VERFAHREN

    公开(公告)号：EP3056858A1

    公开(公告)日：2016-08-17

    申请号：EP16154918.3

    申请日：2016-02-09

    申请人： Northrop Grumman Systems Corporation

    发明人： Trusov, Alexander ,  Rozelle, David

    IPC分类号： G01C19/574 ,  G01C19/5755 ,  G01C25/00

    CPC分类号： G01C19/5726 ,  G01C19/574 ,  G01C19/5755 ,  G01C25/00 ,  G01C25/005

    摘要： One embodiment of the invention includes a vibrating-mass gyroscope system. The system includes a sensor system comprising a vibrating-mass and a plurality of electrodes coupled to the vibrating-mass that are configured to facilitate in-plane motion of the vibrating-mass. The system also includes a gyroscope controller configured to generate a drive signal that is provided to a first set of the plurality of electrodes to provide an in-plane periodic oscillatory motion of the vibrating-mass along a drive axis, to generate a force-rebalance signal that is provided to a second set of the plurality of electrodes to calculate a rotation of the vibrating-mass gyroscope system about an input axis, and to generate a quadrature signal that is provided to a third set of the plurality of electrodes to substantially mitigate quadrature effects associated with the vibrating-mass.

    摘要翻译： 本发明的一个实施例包括振动质量陀螺仪系统。 该系统包括传感器系统，该传感器系统包括耦合到振动块的振动块和多个电极，其被构造成便于振动块的平面内运动。 该系统还包括陀螺仪控制器，该陀螺仪控制器被配置为产生提供给多个电极的第一组的驱动信号，以提供振动块沿着驱动轴线的面内周期振荡运动，以产生力 - 重新平衡 信号，其被提供给所述多个电极的第二组，以计算所述振动质量陀螺仪系统关于输入轴的旋转，并且产生提供给所述多个电极的第三组的正交信号，以基本上减轻 与振动质量相关的正交效应。

    GYROSCOPE STRUCTURE AND GYROSCOPE WITH IMPROVED QUADRATURE COMPENSATION
    28.
    发明公开
    GYROSCOPE STRUCTURE AND GYROSCOPE WITH IMPROVED QUADRATURE COMPENSATION 有权
    GYROSKOPSTRUKTUR UND GYROSKOP MIT VERBESSERTER QUADRATURKOMPENSATION

    公开(公告)号：EP3044541A1

    公开(公告)日：2016-07-20

    申请号：EP14776734.7

    申请日：2014-09-10

    申请人： Murata Manufacturing Co., Ltd.

    发明人： RINKIÖ, Marcus ,  BLOMQVIST, Anssi ,  RUOHIO, Jaakko

    IPC分类号： G01C19/5712 ,  G01C19/5755 ,  G01C19/5776

    CPC分类号： G01C19/5712 ,  B81B7/02 ,  G01C19/5755 ,  G01C19/5776

    摘要： A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass.

    摘要翻译： 一种微机电陀螺仪结构，其包括将地震质量块，身体元件和将地震块悬挂在身体元件上的弹簧结构。 在主振荡中，至少部分地震质量在平面外方向振荡。 第一导体被布置成与地震块一起移动，并且第二导体附接到主体元件。 导体包括在第一方向和第三方向上延伸的相邻表面。 电压元件布置成在第一表面和第二表面之间产生电势差，从而在第二方向上产生静电力，并通过地震块的主振荡来调制。

    DRIVE AND SENSE BALANCED, SEMI-COUPLED 3-AXIS GYROSCOPE
    30.
    发明公开
    DRIVE AND SENSE BALANCED, SEMI-COUPLED 3-AXIS GYROSCOPE 审中-公开

    公开(公告)号：EP3783310A1

    公开(公告)日：2021-02-24

    申请号：EP20193687.9

    申请日：2018-07-03

    申请人： InvenSense, Inc.

    发明人： SENKAL, Doruk ,  HENNESSEY, Robert ,  JOHARI-GALLE, Houri ,  SEEGER, Joseph

    IPC分类号： G01C19/574 ,  G01C19/5755 ,  G01C19/5747

    摘要： In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; and a transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements. In further embodiments, a dynamically balanced 3-axis gyroscope architecture is provided.