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    Microelectromechanical actuator system
    31.
    发明公开
    Microelectromechanical actuator system 有权
    MikroelektromechanisechesBetätigungssystem

    公开(公告)号：EP1359118A2

    公开(公告)日：2003-11-05

    申请号：EP03252493.6

    申请日：2003-04-17

    Applicant: Xerox Corporation

    Inventor： Dunec, John L. ,  Volkel, Armin R. ,  Peeters, Eric ,  Rosa, Michel A. ,  DeBruyker, Dirk ,  Hantschel, Thomas

    IPC: B81B3/00

    CPC classification number: B81B3/0008 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  G02B26/0841 ,  H02N1/002

    Abstract: A MEMS system including a fixed electrode (504) and a suspended moveable electrode (508) that is controllable over a wide range of motion. In traditional systems where an fixed electrode (504) is positioned under the moveable electrode (508), the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode (508) moves too close to the fixed electrode (504). By repositioning the fixed electrode (504) from being directly underneath the moving electrode (508), a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.

    Abstract translation: 一种MEMS系统，包括可在宽的运动范围内控制的固定电极（504）和悬挂的可移动电极（508）。 在固定电极（504）位于可移动电极（508）下方的传统系统中，由于当可移动电极（508）移动得太靠近固定电极时，支撑可移动电极的支撑结构变得不稳定，所以运动范围受到限制 （504）。 通过将固定电极（504）重新定位在移动电极（508）的正下方，可实现更宽范围的可控制运动。 宽范围的可控运动在光开关应用中尤为重要。

    MICROELECTROMECHANICAL DEVICE WITH MOVING ELEMENT
    32.
    发明公开
    MICROELECTROMECHANICAL DEVICE WITH MOVING ELEMENT 审中-公开
    具有运动元件的微电子机械装置

    公开(公告)号：EP1218790A2

    公开(公告)日：2002-07-03

    申请号：EP00946255.7

    申请日：2000-07-20

    Applicant: Memlink Ltd.

    Inventor： CHERTKOW, Roberto, Igal

    IPC: G02B26/02

    CPC classification number: H04Q11/0005 ,  B81B3/0021 ,  B81B2201/045 ,  B81B2203/051 ,  B81C1/00214 ,  G02B6/266 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/423 ,  H01H2001/0084 ,  H04Q2011/0026 ,  H04Q2011/003 ,  H04Q2011/0056 ,  H04Q2011/0058

    Abstract: A microelectromechanical (MEMS) device (100) has a substrate (102) and a generally planar moving element (106), such as a mirror, disposed in parallel to the surface (108) of the substrate. An actuator is operatively engageable with the moving element (106) for selectively actuating the moving element (106) between a first position in a plane horizontal to the surface of the substrate and a second position in that plane. The MEMS device (100) may be effectively used as an optical switch. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.

    Abstract translation: 微机电（MEMS）器件（100）具有衬底（102）和平行于衬底的表面（108）设置的大致平面的移动元件（106），例如反射镜。 致动器可操作地与移动元件（106）接合，用于选择性地致动移动元件（106）在水平于基板表面的平面中的第一位置与该平面中的第二位置之间。 MEMS器件（100）可以有效地用作光开关。 可以使用各种不同的致动器。 优选地，该装置使用表面微机械加工工艺来制造。

    System and method for protecting micro-structure of display array using spacers in gap within display device
    40.
    发明公开
    System and method for protecting micro-structure of display array using spacers in gap within display device 有权
    装置和方法用于在显示单元内的凹部保护显示阵列的微结构通过隔离件

    公开(公告)号：EP1640322A3

    公开(公告)日：2008-07-02

    申请号：EP05255641.2

    申请日：2005-09-14

    Applicant: IDC, LLC

    Inventor： Cummings, William J. ,  Gally, Brian J. ,  Palmateer, Lauren ,  Chui, Clarence

    IPC: B81B7/00 ,  G02B26/08

    CPC classification number: B81B7/0058 ,  B81B2201/045 ,  G02B26/001

    Abstract: Physical forces sufficient to deform an electronic device 700 and/or packaging for the electronic device 700 can damage the device. Some mechanical components in a device, for example, in a microelectromechanical device and/or in an interferometric modulator 722 are particularly susceptible to damage. Accordingly, provided herein is a packaging system and packaged electronic device that resists physical damage, a method for manufacturing the same, and a method for protecting an electronic device 700 from physical damage. The packaging system for the electronic device includes one or more spacers 730 that prevent or reduce damage to the electronic device arising from contact with the a backplate 750. In some embodiments, the packaged electronic device comprising spacers is thinner than a comparable device manufactured without spacers.

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