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    OPTICAL FILTER, AND ANALYTICAL INSTRUMENT AND OPTICAL APPARATUS USING THE OPTICAL FILTER
    31.
    发明公开
    OPTICAL FILTER, AND ANALYTICAL INSTRUMENT AND OPTICAL APPARATUS USING THE OPTICAL FILTER 审中-公开
    OPTISCHER过滤器分析仪SOWIE OPTISCHE VORRICHTUNG MIT DEM OPTISCHEN FILTER

    公开(公告)号：EP2977800A1

    公开(公告)日：2016-01-27

    申请号：EP15182923.1

    申请日：2011-03-11

    Applicant: Seiko Epson Corporation

    Inventor： Sano, Akira

    IPC: G02B6/293 ,  G01N21/25 ,  G02B26/00

    CPC classification number: G02B5/26 ,  G01J3/26 ,  G02B1/10 ,  G02B6/29361 ,  G02B26/001

    Abstract: An optical filter (10) according to the invention includes a first substrate (20), a second substrate (30), a first reflecting film (40) disposed on a first opposed surface of the first substrate, a second reflecting film (50) disposed on a second opposed surface of the second substrate, a first electrode (60) provided to the first substrate (20) at a peripheral position of the first reflecting film (40) in a plan view, and a second electrode (70) provided to the second substrate (30) and opposed to the first electrode (60), at least one of the first opposed surface and the second opposed surface is provided with a step section (22), and an initial gap (G1) between the first reflecting film (40) and the second reflecting film (50) is formed so as to be smaller than an initial gap (G2) between the first electrode (60) and the second electrode (70), thereby controlling the gap between the reflecting films with good accuracy.

    Abstract translation: 根据本发明的滤光器（10）包括第一基板（20），第二基板（30），设置在第一基板的第一相对表面上的第一反射膜（40），第二反射膜（50） 设置在所述第二基板的第二相对表面上，在俯视图中在所述第一反射膜（40）的周边位置处设置到所述第一基板（20）的第一电极（60）和设置在所述第一反射膜 并且与所述第一电极（60）相对，所述第一相对面和所述第二相对面中的至少一个设置有台阶部（22），所述第一相对面和所述第二相对面之间的初始间隙（G1） 反射膜（40）和第二反射膜（50）形成为小于第一电极（60）和第二电极（70）之间的初始间隙（G2），从而控制反射膜 准确性好。

    Actuator control device, optical module, electronic apparatus, and actuator control method
    32.
    发明公开
    Actuator control device, optical module, electronic apparatus, and actuator control method 审中-公开
    致动器控制装置，光学模块，电子设备和致动器控制方法

    公开(公告)号：EP2899516A1

    公开(公告)日：2015-07-29

    申请号：EP15152295.0

    申请日：2015-01-23

    Applicant: Seiko Epson Corporation

    Inventor： Hirokubo, Nozomu

    IPC: G01J3/26

    CPC classification number: G02B26/001 ,  G01J3/26 ,  G02B26/00 ,  G02B26/02 ,  G05B6/00 ,  G05B6/02 ,  H02N1/00 ,  H02N1/006

    Abstract: A spectroscopic measurement apparatus includes an electrostatic actuator that is driven by applying a drive voltage, a gap detector that detects a dimension of a gap, a closed loop system that controls the drive voltage applied to the electrostatic actuator depending on a detection signal from the gap detector, and a gain setting unit that sets a gain in the closed loop system depending on drive characteristics of electrostatic actuator based on the detection signal of the gap detector.

    Abstract translation: 分光测量装置具备通过施加驱动电压而被驱动的静电致动器，检测间隙尺寸的间隙检测器，根据来自间隙的检测信号来控制施加于静电致动器的驱动电压的闭环系统 检测器和增益设置单元，其基于间隙检测器的检测信号根据静电致动器的驱动特性设置闭环系统中的增益。

    Interference filter, interference filter manufacturing method, optical module, electronic apparatus, and bonded substrate
    35.
    发明公开
    Interference filter, interference filter manufacturing method, optical module, electronic apparatus, and bonded substrate 审中-公开
    Interferenzfilter，Interferenzfilterherstellungsverfahren，optisches Modul，elektronische Vorrichtung und gebundenes Substrat

    公开(公告)号：EP2778743A1

    公开(公告)日：2014-09-17

    申请号：EP14159132.1

    申请日：2014-03-12

    Applicant: Seiko Epson Corporation

    Inventor： Arakawa, Katsuji

    IPC: G02B26/00 ,  B81B3/00 ,  B81C3/00

    CPC classification number: G02B5/28 ,  B32B37/0076 ,  B32B38/0008 ,  G01J3/26 ,  G01J3/51 ,  G02B26/001

    Abstract: A wavelength tunable interference filter includes a fixed substrate, a movable substrate, a fixed reflective film provided on the fixed substrate, a movable reflective film provided on the movable substrate so as to face the fixed reflective film, and a first bonding portion that bonds the fixed substrate and the movable substrate to each other. The first bonding portion includes a resin layer provided on the fixed substrate, a metal layer that is provided on the fixed substrate so as to cover the resin layer and that has smaller plasticity than the resin layer, and another metal layer that is provided on the movable substrate and that is bonded to the metal layer.

    Abstract translation: 波长可调干涉滤光器包括固定基板，可移动基板，设置在固定基板上的固定反射膜，设置在可移动基板上以与固定反射膜相对的可移动反射膜;以及第一接合部， 固定基板和可动基板彼此连接。 第一接合部分包括设置在固定基板上的树脂层，设置在固定基板上以覆盖树脂层并具有比树脂层小的塑性的金属层，以及设置在该固定基板上的另一金属层 并且与金属层接合。

    SPECTRAL CAMERA WITH MOSAIC OF FILTERS FOR EACH IMAGE PIXEL
    36.
    发明公开
    SPECTRAL CAMERA WITH MOSAIC OF FILTERS FOR EACH IMAGE PIXEL 审中-公开
    使用过滤器对每个图像像素MOSAIC光谱相机

    公开(公告)号：EP2773929A1

    公开(公告)日：2014-09-10

    申请号：EP12788153.0

    申请日：2012-10-30

    Applicant: IMEC

    Inventor： GEELEN, Bert ,  LAMBRECHTS, Andy ,  TACK, Klaas

    IPC: G01J3/28 ,  G01J3/02

    CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0235 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/2823 ,  G01J2003/2826

    Abstract: A spectral camera for producing a spectral output is disclosed. The spectral camera has an objective lens for producing an image, a mosaic of filters for passing different bands of the optical spectrum, and a sensor array arranged to detect pixels of the image at the different bands passed by the filters, wherein for each of the pixels, the sensor array has a cluster of sensor elements for detecting the different bands, and the mosaic has a corresponding cluster of filters of different bands, integrated on the sensor element so that the image can be detected simultaneously at the different bands. Further, the filters are first order Fabry-Perot filters, which can give any desired passband to give high spectral definition. Cross talk can be reduced since there is no longer a parasitic cavity.

    Variable-wavelength interference filter, optical filter device, optical module, and electronic apparatus
    37.
    发明公开
    Variable-wavelength interference filter, optical filter device, optical module, and electronic apparatus 审中-公开
    具有可调节的波长的滤光器装置，光学模块和电子设备干扰滤波器

    公开(公告)号：EP2770362A1

    公开(公告)日：2014-08-27

    申请号：EP14155918.7

    申请日：2014-02-20

    Applicant: Seiko Epson Corporation

    Inventor： Nishimura, Teruyuki

    IPC: G02B26/00 ,  G01J3/26

    CPC classification number: G02B26/001 ,  G01J3/0264 ,  G01J3/027 ,  G01J3/0272 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/32 ,  G01J3/42 ,  G01J3/44 ,  G01J3/51

    Abstract: A variable-wavelength interference filter includes a pair of substrates, a pair of reflection films provided on these substrates, a first electrode, a second electrode, a first conduction electrode provided on the first substrate and provided from the first electrode up to an outer peripheral edge side of the first substrate over the first electrode, a second conduction electrode provided on the second substrate and electrically connected to the first conduction electrode, and a bonding layer that bonds bonding surfaces of the substrates together. The first substrate has a first conduction electrode surface facing a contact surface where the first conduction electrode and the second conduction electrode contact each other. The second substrate has a second conduction electrode surface facing the contact surface. A minimum distance from the first conduction electrode surface to the second conduction electrode surface is different from a minimum distance from the first bonding surface to the second bonding surface.

    Abstract translation: 波长可变干涉滤波器包括一对基片，一对设置合成基板，第一电极，第二电极，设置在第一基底和设置在从所述第一电极到上外周的第一导电电极上的反射膜的 在所述第一电极的第一基板的边缘侧，第二导通电极设置在所述第二基板和电连接到所述第一传导电极，以及接合层没有键的衬底的键合表面在一起。 第一衬底具有面对的接触表面，其中所述第一传导电极和所述第二导通电极接触海誓山盟的第一导电电极的表面。 所述第二衬底具有面对接触表面的第二导通电极的表面。 从第一导通电极表面到第二导通电极表面的最小距离是从第一接合表面与第二接合表面的最小距离不同。

    Sensor device including one or more metal-dielectric optical filters
    38.
    发明公开
    Sensor device including one or more metal-dielectric optical filters 审中-公开
    传感器和电子设备Metall-Dielektrikum-Filtern

    公开(公告)号：EP2746739A3

    公开(公告)日：2014-08-20

    申请号：EP13196813.3

    申请日：2013-12-12

    Applicant: JDS Uniphase Corporation

    Inventor： Ockenfuss, Georg. J

    IPC: G01J3/02 ,  G01J3/26 ,  G02B5/28

    CPC classification number: G02B5/208 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/26 ,  G02B1/14 ,  G02B5/201 ,  G02B5/283 ,  H01L27/14625

    Abstract: A sensor device including one or more sensor elements and one or more optical filters (100) is provided. The one or more optical filters each include a plurality of dielectric layers (120) and a plurality of metal layers (130) stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.

    Abstract translation: 提供包括一个或多个传感器元件和一个或多个光学滤光器（100）的传感器装置。 一个或多个光学滤光器各自包括多个电介质层（120）和交替堆叠的多个金属层（130）。 金属层被电介质层固有地保护。 特别地，金属层具有由一个或多个介电层保护性地覆盖的锥形边缘。

    MICROMECHANICAL TUNABLE FABRY-PEROT INTERFEROMETER AND A METHOD FOR PRODUCING THE SAME
    40.
    发明公开
    MICROMECHANICAL TUNABLE FABRY-PEROT INTERFEROMETER AND A METHOD FOR PRODUCING THE SAME 有权
    MICRO机械可调法布里 - 珀罗干涉及其制造方法

    公开(公告)号：EP2718685A1

    公开(公告)日：2014-04-16

    申请号：EP12796485.6

    申请日：2012-05-29

    Applicant: Teknologian Tutkimuskeskus VTT

    Inventor： TUOHINIEMI, Mikko

    IPC: G01J3/26 ,  G02B26/00

    CPC classification number: G01B9/02049 ,  G01J3/26 ,  G02B26/001 ,  Y10T29/49117

    Abstract: The invention relates to electrically tunable Fabry-Perot interferometers which are produced with micro-optical electromechanical (MOEMS) technology. Micromechanical interferometers of the prior art require high control voltage, their production includes complicated production phases, and the forms of the movable mirrors are restricted to circular geometries. In the inventive solution there is a gap (1 14) in the movable mirror, whereby mirror layers (1 12, 1 16) opposite to the gap (1 14) are connected with anchoring (1 15). The anchoring (1 15) is such that the stiffness of the mirror is higher at the optical area than at the surrounding area. This way it is possible keep the optical area of the mirror flat even if the control electrodes extend to the optical area. Due to large electrodes, lower control voltages are required.

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