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    Measurement method
    45.
    发明公开
    Measurement method 审中-公开
    测量方法

    公开(公告)号：EP1813988A3

    公开(公告)日：2007-12-05

    申请号：EP07001652.2

    申请日：2007-01-25

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Shiode, Yoshihiro

    IPC: G03F7/20 ,  G01M11/02

    CPC classification number: G03F7/706 ,  G01J4/00 ,  G01J2009/0261 ,  G03F7/70566

    Abstract: A method for irradiating onto a target optical system plural linearly polarized rays having different polarization directions, and for measuring a polarization characteristic of the target optical system including a birefringence amount R and a fast axis Φ includes the steps of irradiating linearly polarized ray having a polarization direction θ onto the target optical system and obtaining a centroid amount P of the ray that has transmitted through the target optical system, and obtaining the birefringence amount R and the fast axis Φ from P=-R•cos(2θ-Φ) or P=R•cos(2θ-Φ).

    FIVE-AXIS/SIX-AXIS LASER MEASURING SYSTEM
    47.
    发明公开
    FIVE-AXIS/SIX-AXIS LASER MEASURING SYSTEM 失效
    5元或6轴激光测量系统

    公开(公告)号：EP0866954A4

    公开(公告)日：2007-07-18

    申请号：EP97937261

    申请日：1997-08-15

    Applicant: LAU KAM C

    Inventor： LAU KAM C ,  LIU YUAN-QEN

    IPC: G01B11/26 ,  G01J4/00 ,  G01B11/00 ,  G01D5/34

    CPC classification number: G01B11/26 ,  G01D5/344 ,  G01J4/00

    Abstract: A 6-axis laser measurement system (300) includes a novel 5-D measurement apparatus and precision laser roll detector system (100). The 5-D system (105) measures pitch, yaw, X, Y, Z displacements with a single setup of a laser head (102) and detection housing (302). The laser roll detector (100) uses a polarizing prism (104) such as a Glan-Thompson prism, and at least two photodetectors (D1, D2, D3, D4). A linearly polarized laser beam enters the prism (104), and the beam is split into two polarized components, the intensities of which vary with roll orientation of the detector (105) relative to the polarized laser beam. The outputs of the two detectors (D1, D2) are connected to the positive and negative inputs, respectively, of a high gain differential amplifier (108) which provides roll output.

    EMBEDDABLE POLARIMETRIC FIBER OPTIC SENSOR AND METHOD FOR MONITORING OF STRUCTURES
    48.
    发明公开
    EMBEDDABLE POLARIMETRIC FIBER OPTIC SENSOR AND METHOD FOR MONITORING OF STRUCTURES 审中-公开
    可嵌入偏振光纤传感器和用于监控结构的

    公开(公告)号：EP1800087A2

    公开(公告)日：2007-06-27

    申请号：EP05857958.2

    申请日：2005-10-17

    Applicant: Morgan Research Corporation

    Inventor： WILLIAMS, Jeffery, Lee ,  KRANZ, Michael Scott ,  HEATON, Larry, Christopher

    IPC: G01B9/02

    CPC classification number: G01B11/18 ,  G01B11/161 ,  G01B11/168 ,  G01J3/453 ,  G01J4/00 ,  G01M11/085

    Abstract: The present invention provides the capability of ascertaining, through a quick and simple measurement, locations on a structure that may have experienced damage that could result in reduced structure lifetime, strength, or reliability. The sensing element is a connected section of polarization maintaining ('PM') optical fiber, where a length of PM fiber represents a fully distributed sensor array. Stress-induced changes to the sensor are measured through white-light Polarimetric interferometry. The output of the measurement is a data array representing the stress concentration magnitude at an array of locations along the length of the sensor. In an application, the knowledge of the optical fiber position on the structure, coupled with the measurement of stress locations along the fiber length, allows the user to determine locations on the structure with large stress concentrations. These locations may signify structural damage.

    ELLIPSOMETER AND ELLIPSOMETRY METHOD
    49.
    发明公开
    ELLIPSOMETER AND ELLIPSOMETRY METHOD 审中-公开
    椭偏仪和椭偏仪过程

    公开(公告)号：EP1247079A4

    公开(公告)日：2007-05-30

    申请号：EP01932496

    申请日：2001-01-08

    Applicant: RUDOLPH TECHNOLOGIES INC

    Inventor： WAGNER JEFF A

    IPC: G01J4/00 ,  G01N21/21

    CPC classification number: G01J4/00 ,  G01N21/211

    Abstract: An improved ellipsometry method and a self-correcting simultaneous multiple angle/multiple wavelength return path ellipsometer (20) are disclosed which allow for simultaneous measurement at multiple angles of incidence in a manner which permits separation of instrument error from the measured properties. Non-sample optical system ellipsometric effects of the ellipsometer are measured and the measured changes in polarization state are corrected to eliminate errors introduced thereby. The disclosed embodiment is self-correcting by way of a convex reflector (6) which can be inserted into and removed from the optical path of the beam of polarized light between a focusing optic (5) and the sample optical system (7) under study. The convex reflector (6) when inserted into the optical path causes the light rays of the beam of polarized light in each of the plurality of angles of incidence to retrace its path through the focusing optic (5) for detection by a detector array (10) without undergoing reflection and re-reflection as during a sample measurement configuration of the ellipsometer (20) is removed from the optical path.

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