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公开(公告)号：EP2326931A1
公开(公告)日：2011-06-01
申请号：EP09815009.7
申请日：2009-09-11
发明人： CARMICHAEL, Larry, K. , WEBER, Jesse, A. , HENRY, John, H. , SCHOTT, Michael, N. , BRUCKER, Gerardo, A. , VAN ANTWERP, Kenneth, D.
IPC分类号： G01L21/30
摘要： An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.
摘要翻译： 测量压力的电离计具有发射电子的电子源和限定电离空间的阳极。 该量表还包括收集电极以收集由电子和气体之间的碰撞形成的离子并基于收集的离子测量压力。 电子源在依赖于压力的多个发射电平和除压力之外的第二参数之间的发射电流中动态变化。 根据存储在非易失性存储器中并由用户选择的参数，电离计还可以改变量表部件的各种操作参数。
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公开(公告)号：EP1980748B1
公开(公告)日：2011-04-20
申请号：EP08075586.1
申请日：2004-06-09
CPC分类号： F04B37/085 , F04B37/08 , F04B49/065
摘要： An electronic controller is integral with a cryopump and provides an offline solution for purging a cryopump and an exhaust line during unsafe conditions. The electronic controller is responsible for controlling the opening and closing of purge, exhaust purge and gate valves coupled to the cryopump. The electronic controller can pre-empt any attempts from other systems to control these valves during unsafe conditions. An unsafe condition can be a power failure in the cryopump, a dangerous temperature in the cryopump or a temperature sensing diode that is not operating properly. When an unsafe condition is determined, the exhaust purge valve is opened and the gate valve closed, while the opening of a purge valve may be delayed for a safe period of time. If the unsafe condition still exists when the safe period of time elapses, the purge valve is allowed to open. A fail-safe purge valve release and time delay mechanism can be used to ensure that the purge valve opens after the period of time elapses. Electrochemical capacitors may be used to store an amount of energy to hold a normally open purge valve closed for a safe period of time. When this energy is discharged and the unsafe condition still exists, the purge valve can automatically open.
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公开(公告)号：EP1200780B1
公开(公告)日：2011-03-30
申请号：EP01944188.0
申请日：2001-05-30
发明人： FLYNN, Kevin, P. , HALL, Paul, H
CPC分类号： F25B40/00 , F25B9/00 , F25B41/04 , F25B47/022
摘要： Heating/defrost construction of very low temperature refrigeration system (100) having a defrost supply circuit (176, 178, 180) and a defrost return bypass circuit (186, 188, 190) optimizing the heating/defrost cycle, preventing overload (excessive pressure) of its refrigeration process and protecting components from damaging temperatures. The defrost cycle operates continuously, when required, and provides a shorter recovery period between heating/defrost and cooling operating modes. The rate of the temperature change during cool down or warm up is controlled in an open loop fashion by controlled refrigerant flow in bypass circuits (178, 190).
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64.发明公开IONIZATION GAUGE WITH OPERATIONAL PARAMETERS AND GEOMETRY DESIGNED FOR HIGH PRESSURE OPERATION 有权IONISIERUNGSMESSGERÄT与高压运行满载运行参数，几何
公开(公告)号：EP2252869A1
公开(公告)日：2010-11-24
申请号：EP09713559.4
申请日：2009-02-19
发明人： BRUCKER, Gerardo, A.
摘要： An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.
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公开(公告)号：EP1535313A4
公开(公告)日：2010-05-26
申请号：EP03765906
申请日：2003-07-22
IPC分类号： B65G49/07 , H01L21/00 , H01L21/02 , H01L21/677
CPC分类号： H01L21/67161 , H01L21/67167 , H01L21/67173 , H01L21/67184 , H01L21/67709 , H01L21/67724 , H01L21/67727 , H01L21/67742 , H01L21/67766 , Y10S414/135
摘要： A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening.
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66.发明授权
公开(公告)号：EP1440353B1
公开(公告)日：2010-03-17
申请号：EP02793832.3
申请日：2002-10-28
IPC分类号： G05B15/00 , G05B19/18 , G05B11/01 , G06F19/00 , G06F15/173 , G06F15/177
CPC分类号： G05B15/02 , G05B2219/25204 , G05B2219/31181
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公开(公告)号：EP2140241A1
公开(公告)日：2010-01-06
申请号：EP08743228.2
申请日：2008-04-24
发明人： BORENSTEIN, Michael
IPC分类号： G01L7/00
摘要： A measurement instrument having a processor, a first sensor and a second sensor. The processor is adapted to output a measurement signal embodying a measurement of a physical quantity. The first sensor and second sensor are connected to the processor and are operable to generate respectively first and second measurements of the physical quantity. The processor defines a first measurement range within which the measurement signal is dependent on the first measurement and not the second measurement. The processor defines a second measurement range within which the measurement signal is dependent on the second measurement and not the first measurement. The first and second ranges meet at a predetermined transition. The first and second measurements are different at the transition and the measurement embodied in the measurement signal crosses the transition without an abrupt change.
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公开(公告)号：EP1945541A2
公开(公告)日：2008-07-23
申请号：EP06837141.8
申请日：2006-11-07
IPC分类号： B65G47/00
CPC分类号： H01L21/67769 , H01L21/67376 , H01L21/67386 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67778
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
摘要翻译： 一种半导体工件处理系统，具有至少一个用于处理工件的处理设备，主传输系统，次传输系统以及第一传输系统和第二传输系统之间的一个或多个接口。 主要和次要运输系统各自具有一个或多个基本上恒定速度的部分并且在与恒定速度部分连通的排队部分中。
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69.发明公开
公开(公告)号：EP1915603A1
公开(公告)日：2008-04-30
申请号：EP06801403.4
申请日：2006-08-11
IPC分类号： G01M3/32
CPC分类号： G01M3/3236 , H01J2237/18
摘要： In one embodiment according to the invention, there is disclosed a method of identifying a source of a vacuum quality problem in a vacuum environment associated with a tool. The method comprises gathering and storing vacuum environment data; identifying an anomaly within the vacuum environment; determining a tool component operating state when the anomaly likely occurred; and determining the source of the vacuum quality problem based on a state of the vacuum environment when the anomaly likely occurred and the tool component operating state when the anomaly likely occurred.
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公开(公告)号：EP1907173A1
公开(公告)日：2008-04-09
申请号：EP06774600.8
申请日：2006-07-07
IPC分类号： B25J9/06
CPC分类号： B25J9/042 , B25J9/0087 , B25J9/08 , B25J9/10 , B25J9/104 , B25J18/04 , H01L21/67742 , Y10S901/15 , Y10T74/20329
摘要： A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.
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