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    X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING
    61.
    发明授权
    X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING 有权
    具有垂直集成电子元件及密封封装晶片规模x-y轴双质体STIMMGABEL GYRO

    公开(公告)号：EP1676096B1

    公开(公告)日：2017-06-07

    申请号：EP04795573.7

    申请日：2004-10-12

    申请人： InvenSense, Inc.

    发明人： NASIRI, Steven S. ,  SEEGER, Joseph

    IPC分类号： G01C19/5712 ,  G01C19/5719 ,  H03H9/02

    CPC分类号： G01C19/5712 ,  G01C19/5719 ,  H03H2009/02354

    摘要： An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment.

    摘要翻译： 平面在角速度传感器具有两个质量哪些是尾盘反弹在设置成X-Y和间接地连接到一个框架上。 两个质量块由一个键连接在一起寻求在相反的方向上thatthey必然移动沿着围绕Y轴可通过两个质量块驱动到Z向反相振荡并由此测量的角振荡振幅来感测传感器的Z.角速度 赋予到所述框架。 在优选的实施方式的角速度传感器被从散装MEMS陀螺仪晶片，盖晶片和参考晶片制造。 在另一优选实施例，晶片的这个集合提供了质量之间，并在周围环境的气密屏障。

    Integrated resonant structure for the detection of acceleration and angular velocity, and related MEMS sensor device
    63.
    发明公开
    Integrated resonant structure for the detection of acceleration and angular velocity, and related MEMS sensor device 有权
    集成谐振结构，用于检测加速度和角速度，以及相关的MEMS传感器

    公开(公告)号：EP2713169A1

    公开(公告)日：2014-04-02

    申请号：EP13186559.4

    申请日：2013-09-28

    申请人： Politecnico Di Milano ,  STMicroelectronics S.r.l.

    发明人： Comi, Claudia ,  Corigliano, Alberto ,  Baldasarre, Leonardo

    IPC分类号： G01P15/097 ,  G01C19/5719 ,  G01P15/125 ,  G01P15/08

    CPC分类号： G01C19/574 ,  G01C19/56 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0831

    摘要： An integrated detection structure (1) has a first inertial mass (2) and a second inertial mass (2'), each of which is elastically anchored to a substrate (20) and has a linear movement along a first horizontal axis (x), a first detection movement of rotation about a first axis of rotation (A, A') parallel to a second horizontal axis (y) and a second detection movement of translation along the second horizontal axis; driving electrodes (12, 12') cause linear movement of the inertial masses, in opposite directions of the first horizontal axis (x); a pair of flexural resonator elements (3a-3b, 3a'-3b') and a pair of torsional resonator elements (4a-4b, 4a'-4b') are elastically coupled to the inertial masses, the torsional resonator elements (4a-4b, 4a'-4b') having a resonant movement of rotation about a second axis of rotation (B, B') and a third axis of rotation (C, C'), parallel to one another and to the first axis of rotation. The respective first detection movement of said first inertial mass or second inertial mass occurs with different modalities, according to the presence of a first angular velocity (Ω r ; Ω z ) or of a first linear acceleration (a z ; a y ) to be detected, thus causing corresponding variations of resonance frequency of the resonator elements.

    摘要翻译： 一个集成的检测结构（1）具有第一惯性质量（2）和第二惯性质量（2“），每个的所有可弹性锚定到一个基片（20）和具有沿第一水平轴的线性运动（x）的 中，旋转围绕旋转（A，A“）平行于第二水平轴（y）和沿着第二水平轴平移的第二检测运动的第一轴的第一检测运动; 驱动电极（12，12“）在所述第一水平轴（x）的方向相反的惯性质量的原因线性运动; 一对弯曲振动片（图3a-3b，3a'-3B“）和一对扭转谐振元件（图4A-4B，4a'-4b的”）的被弹性耦合于惯性质量，扭转谐振器元件（4A 图4b 4a'-4B“），其具有绕旋转的第二轴线（B，B旋转的谐振运动”）和（C，C“）旋转的第三轴线，彼此平行并旋转的第一轴 ， 说第一惯性质量或第二惯性质量的respectivement第一检测运动与不同的模态，雅丁到第一角速度的存在下发生的（©R等©z）或第一线性加速度（AZ，AY）进行检测， 从而导致谐振器元件的谐振频率的相应变化。

    SENSOR MOUNT VIBRATION REDUCTION
    64.
    发明公开
    SENSOR MOUNT VIBRATION REDUCTION 审中-公开
    在传感器安装振动减速装置

    公开(公告)号：EP2702358A2

    公开(公告)日：2014-03-05

    申请号：EP12776076.7

    申请日：2012-04-27

    申请人： Custom Sensors & Technologies, Inc.

    发明人： MOORE, Robert H.

    IPC分类号： G01C19/56 ,  G01C19/5719 ,  G01C19/5607 ,  G01P9/00

    CPC分类号： G01C19/5607

    摘要： Techniques are provided for reducing mount vibration in an inertial rate sensor (IRS). For example, if oscillation in an IRS's vibratory members, vibrating along a first axis, cause displacement in the IRS's mount along a second axis, the vibratory members can be aligned so that the vibratory members have some component of movement along the second axis during oscillation. This component of movement can help reduce the displacement of the IRS's mount along the second axis. It can further reduce sensitivity to changes in the boundary conditions of an IRS (
    e.g. , vibrations and other movements at the mount from forces external to the IRS). Vibratory members further can have portions of increased mass at the vibratory members' tips, which can impact the alignment of the vibratory members. These examples, however, are not exhaustive.

    TUNING FORK GYRO WITH SPLIT ELECTRODE
    66.
    发明公开
    TUNING FORK GYRO WITH SPLIT ELECTRODE 失效
    STIMMGABELKREISSEL MIT SPALTELEKRODE

    公开(公告)号：EP0970349A4

    公开(公告)日：2003-03-26

    申请号：EP98906689

    申请日：1998-02-24

    申请人： DRAPER LAB CHARLES S

    发明人： WARD PAUL A ,  HILDEBRANT ERIC M ,  NILES LANCE C ,  WEINBERG MARC S ,  KOUREPENIS ANTHONY S

    IPC分类号： G01C19/5719 ,  G01C19/00 ,  G01C19/56 ,  G01P9/04

    CPC分类号： G01C19/5719

    摘要： A micromechanical tuning fork gyro having two center electrodes (9a, 9b). The two center electrodes are excited with bias potentials of opposite polarity. The oppositely biased center electrodes provide electrical symmetry across the gyroscope and thereby reduce charge transients and sensitivity to vertical translation. Currents injected directly into the proof masses (3a, 3b) are equal and opposite and thus cancel. Motor lift forces acting on the proof masses and interleaved electrodes equal, hence the proof masses move in pure translation, thereby reducing in-phase bias. Further, any pure translation normal to the plane of the gyroscope does not effect sense axis output signals.

    摘要翻译： 具有两个中心电极（9a，9b）的微机械音叉陀螺仪。 两个中心电极由相反极性的偏置电位激励。 相反偏置的中心电极提供跨越陀螺仪的电对称性，从而减少电荷瞬变和对垂直平移的敏感度。 直接注入到检测质量块（3a，3b）中的电流是相等的并且相反并且因此取消。 作用在检测质量和交错电极上的电动机升力相等，因此检测质量以纯平移运动，从而降低了同相偏压。 此外，垂直于陀螺仪平面的任何纯粹的平移都不会影响感测轴输出信号。

    MICROMECHANICAL TUNING FORK ANGULAR RATE SENSOR
    67.
    发明授权
    MICROMECHANICAL TUNING FORK ANGULAR RATE SENSOR 失效
    MICRO机械转速传感器后STIMMGABEL原理

    公开(公告)号：EP0604519B1

    公开(公告)日：1997-12-29

    申请号：EP92919849

    申请日：1992-09-11

    申请人： DRAPER LAB CHARLES S

    发明人： GREIFF PAUL ,  BOXENHORN BURTON

    IPC分类号： G01C19/5719 ,  G01C19/56

    CPC分类号： G01C19/5719 ,  G01P2015/0831

    摘要： A micromechanical tuning fork gyroscope includes a suspended structure (14) comprising at least first and second vibratable structures (38, 40). Each vibratable structure is energizable to vibrate laterally, within a first plane, along an axis (42) normal to the rotation sensitive axis (44). The lateral or inplane vibration of the first and second vibratable structures effects simultaneous vertical or rotational movement of at least a portion of the suspended structure upon the occurence of angular rotation of the gyroscope about the rotation sensitive axis. Vertical or rotational movement of the suspended structure is sensed by electrodes (70, 72) and a voltage proportional to the movement is generated, for providing an indication of angular rate of rotation detected by the gyroscope.