利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

163 条记录 (耗时 0.016 秒)

    NON-CONTACT SUPPORT PLATFORMS FOR DISTANCE ADJUSTMENT
    72.
    发明公开
    NON-CONTACT SUPPORT PLATFORMS FOR DISTANCE ADJUSTMENT 审中-公开
    非接触式支持平台距离调整

    公开(公告)号：EP1776300A2

    公开(公告)日：2007-04-25

    申请号：EP05730969.2

    申请日：2005-04-13

    申请人： Coreflow Scientific Solutions Ltd.

    发明人： YASSOUR, Yuval ,  HARNIK, Arie ,  RICHMAN, Hilel

    IPC分类号： B65G51/00

    CPC分类号： B65G49/065 ,  B24B37/30 ,  B65G2249/02 ,  B65G2249/04 ,  B65G2249/045 ,  F16C29/025 ,  H01L21/67784 ,  H01L21/6838 ,  H01L21/68714

    摘要： An apparatus for supporting a stationary or moving substantially flat object without physical contact on an fluid-cushion. The object floats on a fluid cushion gap, the apparatus aimed for globally or locally adjusting the gap. The apparatus comprising: a first platform for supporting the object without contact, the platform having a substantially flat active surface comprised of one or more sectors, each sector comprising at least one of a plurality of basic cells, each basic cell having at least one of a plurality of pressure outlets fluidically connected through a pressure flow restrictors to a higher-pressure manifold associated with the sector in which the basic cell lies, the higher-pressure manifold is fluidically connected through main supply pipeline to pressurized fluid supply and at least one of a plurality of fluid-evacuation channels fluidically connected to a lower-pressure manifold associated with the sector in which the basic cell lies having main evacuation pipeline; wherein the flow restrictor characteristically exhibiting fluidic return spring behavior; and wherein at least one pressure control valve is interposed with at least one of the two main pipelines of at least one sector for controlling pressure levels of at least one of the two manifolds of that sector.

    LEVITATION TRANSPORTATION DEVICE AND LEVITATION TRANSPORTATION METHOD
    73.
    发明公开
    LEVITATION TRANSPORTATION DEVICE AND LEVITATION TRANSPORTATION METHOD 审中-公开
    SCHWEBETRANSPORTVORRICHTUNG UND SCHWEBETSPORTVERFAHREN

    公开(公告)号：EP1770032A1

    公开(公告)日：2007-04-04

    申请号：EP05753450.5

    申请日：2005-06-22

    申请人： KABUSHIKI KAISHA WATANABE SHOKO ,  Toda, Masayuki

    发明人： TODA, Masayuki ,  UMEDA, Masaru, KABUSHIKI KAISHA WATANABE SHOKO

    IPC分类号： B65G51/03 ,  B65G47/28 ,  B65G49/07 ,  H01L21/68

    CPC分类号： B65G51/03 ,  B65G47/24 ,  H01L21/67784

    摘要： A levitation transportation device capable of adjustment when an object being transported is displaced from the center of a transportation path, A levitation transportation device having a transportation path forming a transportation router for an object to be transported, a plurality of jetting nozzles for transporting the object in a levitated manner along the transportation path, one or more detection sections for detecting the direction of the transportation of the object being transported in the transportation path and a control section for independently controlling the plurality of jetting nozzles based on a detection result by the detection sections.

    摘要翻译： 一种能够在被输送物体从输送路径的中心偏移时能够进行调节的悬浮输送装置，具有形成用于被输送物体的输送路线器的输送路径的悬浮输送装置，用于输送被检体的多个喷射喷嘴 沿着传送路径以悬浮方式，一个或多个检测部分，用于检测传送路径中被传送物体的传送方向;以及控制部分，用于根据检测结果独立地控制多个喷嘴 部分。

    VORRICHTUNG ZUR WAFERINSPEKTION
    74.
    发明公开
    VORRICHTUNG ZUR WAFERINSPEKTION 有权
    装置晶片检测

    公开(公告)号：EP1642323A2

    公开(公告)日：2006-04-05

    申请号：EP04741551.8

    申请日：2004-05-12

    申请人： Leica Microsystems Semiconductor GmbH

    发明人： HALAMA, Michael ,  KREH, Albert ,  SCHMIDT, Guenter

    IPC分类号： H01L21/00

    CPC分类号： H01L21/6838 ,  G01R31/2891 ,  H01L21/67784 ,  H01L21/682

    摘要： The invention relates to a wafer inspection device (1). Said device comprises an air-cushioned table (2), which can be displaced in two directions (X,Y) that are perpendicular to one another. Several air nozzles (12, 14) are provided for this purpose. At least one valve (29) is connected to at least one electric control unit (27), said valve (29) being configured in such a way that a normal pressure prevails in the air nozzles (12, 14), when the electric control unit (27) delivers a corresponding signal.

    HIGH-PERFORMANCE NON-CONTACT SUPPORT PLATFORMS
    75.
    发明公开
    HIGH-PERFORMANCE NON-CONTACT SUPPORT PLATFORMS 有权
    非接触式气垫平台

    公开(公告)号：EP1461826A1

    公开(公告)日：2004-09-29

    申请号：EP02796948.4

    申请日：2002-12-27

    申请人： Coreflow Scientific Solutions Ltd.

    发明人： YASSOUR, Yuval ,  REICHMAN, Hillel ,  LEVIN, Daniel

    IPC分类号： H01L21/00

    CPC分类号： F16C29/025 ,  B65G51/03 ,  F16C32/06 ,  H01L21/67784

    摘要： A non-contact support platform for supporting without contact a stationary or traveling object by air-cushion induced forces, the platform comprising at least one of two substantially opposite support surfaces, each support surface comprising at least one of a plurality of basic cells each having at least one of a plurality of pressure outlets and at least one of a plurality of air-evacuation channels at least one of a plurality of outlets, and one of a plurality of air-evacuation channels, each of the pressure outlets fluidically connected through a pressure flow restrictor to a high-pressure reservoir, the pressure outlets providing pressurized air for generating pressure induced forces, maintaining an air-cushion between the object and the support surface, the pressure flow restrictor characteristically exhibiting fluidic return spring behavior; each of said at least one of a plurality of air-evacuation channels having an inlet and outlet, the inlet kept at an ambient pressure or lower, under vacuum condition, for locally discharging mass flow, thus obtaining uniform support and local nature response.

    Sheet-like base carrying method
    79.
    发明公开
    Sheet-like base carrying method 失效
    Methode zum Transportieren von Substraten mitplattenförmigerGrundlage

    公开(公告)号：EP0747931A3

    公开(公告)日：1997-05-02

    申请号：EP96113991.2

    申请日：1991-10-28

    申请人： KABUSHIKI KAISHA WATANABE SHOKO

    发明人： Toda, Masayuki ,  Onoda, Takashi, c/o Yamagata University Kogakubu ,  Ohmi, Tadahiro ,  Umeda, Masaru Kabushiki-Kaisha Watanabe Shoko 2-16 ,  Kanno, Yoichi Kabushiki-Kaisha, Motoyama

    IPC分类号： H01L21/00

    CPC分类号： H01L21/67787 ,  B65G51/03 ,  H01L21/67784 ,  Y10S414/135 ,  Y10S414/136

    摘要： A sheet-like base carrying method for carrying a sheet-like base with a sheet-like base carrying device in which a plurality of transfer units having a transfer space to allow the sheet-like base to advance linearly and a plurality of control units having a control space to control the movement of the sheet-like base, are combined in an airtight condition, said sheet-like base carrying method is characterized in that a current of inert gas, the impurity concentration of which is not more than several ppb, is used when the sheet-like base is carried with the sheet-like base carrying device.

    摘要翻译： 用于承载诸如半导体晶片的薄板状基板的装置，并通过使用低杂质浓度的惰性气体漂浮来控制其位置。 传送单元和控制单元分别设置有用于浮动薄板状基板和排气循环系统的气体喷嘴，并且多个它们在密封状态下彼此组合。 另外，控制单元在其控制中心具有真空吸引孔，并且设置有用于分别在其径向和圆周方向上控制薄板状基板的喷嘴和用于停止薄板状基板的喷嘴或发出 它也到下一个单位。 在控制空间的底面，形成有从真空吸引孔延伸出的槽，用于提高停止薄板状基板的位置精度，并且当薄板的中心部分在其周向部分的内侧封闭时 样基板与控制单元的控制中心一致。