SCANNING MAGNETIC MICROSCOPE HAVING IMPROVED MAGNETIC SENSOR
    5.
    发明公开
    SCANNING MAGNETIC MICROSCOPE HAVING IMPROVED MAGNETIC SENSOR 审中-公开
    具有改进的磁传感器磁栅显微镜

    公开(公告)号:EP1535305A2

    公开(公告)日:2005-06-01

    申请号:EP03788451.7

    申请日:2003-08-14

    发明人: XIAO, Gang

    IPC分类号: H01J47/00

    摘要: A scanning magnetic microscope SMM (20) includes a sensor (10) for sensing a magnetic field generated by a specimen (78), the sensor including one of a MTJ, a GMR, or an EHE sensor; translation apparatus (22A-C, 52) for translating the sensor relative to a surface of sad specimen; and a data processor (50), having an input coupled to an output of said sensor, for constructing an image of said magnetic field. The sensor preferably includes one to three sensing units each defining a sensing axis for sensing a component of a magnetic field from a specimen, the sensing units disposed such that the sensing axes are orthogonal to one another. Pluralities of such sensors can be disposed in two or three dimensional arrays. The SMM can be used for examining the current flow in ICs, electromigration, magnetic data storage media, biomagnetic systems and magnetic ink used to print currency.