COBALT FILLING OF INTERCONNECTS IN MICROELECTRONICS

    公开(公告)号:EP3839103A1

    公开(公告)日:2021-06-23

    申请号:EP21155629.5

    申请日:2016-06-30

    IPC分类号: C25D7/12 C25D3/16 C25D5/18

    摘要: Processes and compositions for electroplating a cobalt deposit onto a semiconductor base structure comprising submicron-sized electrical interconnect features. In the process, a metalizing substrate within the interconnect features is contacted with an electrodeposition composition comprising a source of cobalt ions, an accelerator comprising an organic sulfur compound, an acetylenic suppressor, a buffering agent and water. Electrical current is supplied to the electrolytic composition to deposit cobalt onto the base structure and fill the submicron-sized features with cobalt. The process is effective for superfilling the interconnect features.