STIFFENED SURFACE MICROMACHINED STRUCTURES AND PROCESS FOR FABRICATING THE SAME
    3.
    发明公开
    STIFFENED SURFACE MICROMACHINED STRUCTURES AND PROCESS FOR FABRICATING THE SAME 审中-公开
    加筋MICRO-MADE表面结构和方法及其

    公开(公告)号:EP1438256A2

    公开(公告)日:2004-07-21

    申请号:EP02780484.8

    申请日:2002-10-21

    IPC分类号: B81B3/00

    CPC分类号: B81B3/007

    摘要: Stiffened surface micromachined structures and a method to fabricate the same. A silicon substrate (10) is first etched to produce a mold containing a plurality of trenches or grooves (14) in a lattice configuration. Sacrificial oxide (15) is then grown on the silicon substrate (10) and then a stiffening member (16) (silicon nitride) is deposited over the surface of the substrate, thereby backfilling the grooves with silicon nitride. The silicon nitride is patterned to form mechanical members and metal (40) is then deposited and patterned to form the leads and capacitors for electrostatic actuation of mechanical members. The underlying silicon and sacrificial oxides are removed by etching the mold from underneath the fabricated micromachined devices, leaving free-standing silicon nitride devices with vertical ribs. The devices exhibit increased out-of-plan bending stiffness because of the presence of stiffening ribs. Silicon nitride biaxial pointing mirrors with stiffening ribs are also described.

    MINIATURE CONFOCAL OPTICAL DEVICE, SYSTEM, AND METHOD
    6.
    发明公开
    MINIATURE CONFOCAL OPTICAL DEVICE, SYSTEM, AND METHOD 审中-公开
    共焦光学器件微型,系统及方法

    公开(公告)号:EP1604230A2

    公开(公告)日:2005-12-14

    申请号:EP04775822.2

    申请日:2004-03-03

    IPC分类号: G02B1/00

    摘要: A confocal optical device (10) is described. The device includes a tri-axial scanning mirror (48a) that can provide for three-dimensional scanning of objects. In particular, the scanning mirror (48a) has a deformable reflective membrane (48h) mounted on two annular gimbaled members (48c, 48d) to provide for rotation about two orthogonal axes. The deformable membrane, which can be provided at other suitable locations in the device, is used to control the focusing spot of the light beam transmitted from the device to the object being scanned. Various methods relating to the confocal optical device are also described.