公开(公告)号：EP1899041A4

公开(公告)日：2009-04-22

申请号：EP06784388

申请日：2006-05-03

Applicant: ADVANCED TECH MATERIALS

Inventor： OLANDER KARL W ,  MCMANUS JAMES V ,  HULTQUIST STEVEN J ,  ARNO JOSE I ,  VAN BUSKIRK PETER

IPC: B01D53/02 ,  F17C11/00

CPC classification number: F17C11/00 ,  F17C2201/0109 ,  F17C2201/032 ,  F17C2201/035 ,  F17C2201/054 ,  F17C2201/056 ,  F17C2201/058 ,  F17C2203/0639 ,  F17C2203/0678 ,  F17C2205/0184 ,  F17C2205/0326 ,  F17C2205/0329 ,  F17C2205/0338 ,  F17C2205/0391 ,  F17C2221/011 ,  F17C2221/013 ,  F17C2221/014 ,  F17C2221/031 ,  F17C2221/033 ,  F17C2221/035 ,  F17C2221/037 ,  F17C2223/0123 ,  F17C2223/013 ,  F17C2223/033 ,  F17C2223/035 ,  F17C2225/0123 ,  F17C2225/013 ,  F17C2225/033 ,  F17C2225/035 ,  F17C2225/038 ,  F17C2227/0114 ,  F17C2227/0135 ,  F17C2227/0157 ,  F17C2250/032 ,  F17C2250/0443 ,  F17C2250/0636 ,  F17C2270/0168 ,  F17C2270/02 ,  F17C2270/0518

公开(公告)号：EP1093395A4

公开(公告)日：2006-11-15

申请号：EP99925778

申请日：1999-05-21

Applicant: ADVANCED TECH MATERIALS

Inventor： HULTQUIST STEVEN J ,  TOM GLENN M ,  KIRLIN PETER S ,  MCMANUS JAMES V

IPC: B01D53/04 ,  B01D53/22 ,  B01D53/34 ,  F17C11/00

CPC classification number: B01D53/0446 ,  B01D53/229 ,  B01D53/34 ,  B01D2253/102 ,  B01D2253/104 ,  B01D2253/108 ,  B01D2253/202 ,  B01D2256/26 ,  B01D2258/0216 ,  B01D2259/4525 ,  F17C11/00 ,  F17C2223/0123 ,  F17C2270/0518 ,  H01J2237/006 ,  H01J2237/31701 ,  Y10S95/901 ,  Y10S95/902

Abstract: A sorbent-based gas storage and dispensing system includes a storage and dispensing vessel (10) containing a solid-phase physical sorbent medium (17) having a sorbate gas physically adsorbed thereon. A chemisorbent material (138) is provided in the vessel (10) to chemisorb impurities for gas phase removal thereof. Desorbed sorbate gas is discharged from the vessel (10) by a dispensing manifold (12) coupled thereto. The chemisorbent material (138) may be provided in a capsule including an impurity-permeable, but sorbate gas-impermeable membrane (136), and installed in the vessel (10) at the time of the loading of the sorbent medium (17). Semiconductor manufacturing processes and products manufactured by such processes are also described.