公开(公告)号：EP1812965A4

公开(公告)日：2012-04-18

申请号：EP05815611

申请日：2005-10-24

Applicant: ADVANCED TECH MATERIALS

Inventor： DIETZ JAMES ,  BISHOP STEVEN E ,  MCMANUS JAMES V ,  LURCOTT STEVEN M ,  WODJENSKI MICHAEL J ,  KAIM ROBERT ,  DIMEO FRANK JR

IPC: H01L21/44 ,  B67D7/06 ,  B67D99/00 ,  C23C16/30 ,  F17C11/00 ,  G01F22/02 ,  G01M3/32 ,  H01L21/31

CPC classification number: G01N33/00 ,  F17C11/00 ,  G01F15/063 ,  G01F22/02 ,  G01F23/0076 ,  G01M3/32 ,  G01M3/3236 ,  G06Q10/087 ,  G06Q30/04 ,  G06Q50/04 ,  H01L21/561 ,  H01L21/568 ,  H01L21/6835 ,  H01L22/10 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/48 ,  H01L24/82 ,  H01L25/03 ,  H01L25/0652 ,  H01L25/16 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/24011 ,  H01L2224/2518 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01058 ,  H01L2924/01076 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/14 ,  H01L2924/19042 ,  H05K1/185 ,  H05K3/4602 ,  H05K2203/0165 ,  H05K2203/085 ,  H05K2203/1469 ,  Y02P90/30 ,  Y10T29/4913 ,  Y10T29/49133 ,  Y10T29/49165 ,  Y10T29/53183 ,  H01L2224/45099

公开(公告)号：EP2585401A4

公开(公告)日：2014-10-29

申请号：EP11798831

申请日：2011-06-22

Applicant: ADVANCED TECH MATERIALS

Inventor： BAUM THOMAS H ,  CARRUTHERS J DONALD ,  FRICKE RICHARD ,  SWEENEY JOSHUA B ,  MCMANUS JAMES V ,  STURM EDWARD A

IPC: C01B23/00 ,  B01D53/00 ,  B01D53/02 ,  B01D53/047 ,  B01D53/14 ,  B01D53/68 ,  B01D53/75 ,  B01J20/20 ,  B01J20/28 ,  G01T1/16 ,  G01T1/178

CPC classification number: G01N33/0036 ,  B01D53/002 ,  B01D53/02 ,  B01D53/0476 ,  B01D53/1418 ,  B01D53/68 ,  B01D53/75 ,  B01D2253/102 ,  B01D2253/308 ,  B01D2253/31 ,  B01D2256/18 ,  B01D2257/102 ,  B01D2257/2047 ,  B01D2258/0216 ,  B01D2259/402 ,  B01D2259/4146 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/28042 ,  B01J20/2808 ,  C01B23/0063 ,  C01B2210/0037 ,  C01B2210/0046 ,  C01B2210/0098 ,  G01T1/178 ,  G01V9/007

公开(公告)号：EP1986763A4

公开(公告)日：2009-12-23

申请号：EP07811788

申请日：2007-01-29

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK JR ,  CARRUTHERS J DONALD ,  WODJENSKI MICHAEL J ,  MCMANUS JAMES V ,  MARZULLO JOSEPH

IPC: B01D53/02 ,  B01J20/20 ,  B01J20/28

CPC classification number: B01D53/0415 ,  B01D53/0446 ,  B01D2253/102 ,  B01D2253/1122 ,  B01D2253/202 ,  B01D2253/308 ,  B01D2253/311 ,  B01D2253/342 ,  B01D2256/24 ,  B01D2257/30 ,  B01D2258/0216 ,  B01D2259/40096 ,  B01D2259/4146 ,  B01D2259/4525 ,  B01D2259/455 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/28014 ,  B01J20/28023 ,  B01J20/28033 ,  B01J20/28042 ,  B01J20/28052 ,  B01J20/2808 ,  B01J20/28097 ,  B01J2220/66 ,  B82Y30/00 ,  C01B3/0021 ,  C01B13/0251 ,  C10G25/003 ,  C10G45/02 ,  C10G67/06 ,  C10G2300/1033 ,  C10G2300/1044 ,  C10G2300/1051 ,  C10G2300/1055 ,  C10G2300/202 ,  C10G2300/207 ,  F17C11/00 ,  F17C11/007 ,  Y02E60/321 ,  Y02E60/325 ,  Y10S95/903 ,  Y10T428/249956 ,  Y10T428/249957

公开(公告)号：EP1017474A4

公开(公告)日：2002-11-13

申请号：EP98923580

申请日：1998-05-20

Applicant: ADVANCED TECH MATERIALS

Inventor： OLANDER KARL W ,  MCMANUS JAMES V

IPC: F17C5/02 ,  B01D53/04 ,  F17C5/06 ,  F17C11/00

CPC classification number: B01D53/0407 ,  B01D53/0415 ,  B01D53/0446 ,  B01D53/0454 ,  B01D2253/102 ,  B01D2253/104 ,  B01D2253/106 ,  B01D2253/108 ,  B01D2253/202 ,  B01D2256/26 ,  B01D2258/0216 ,  B01D2259/40083 ,  B01D2259/40088 ,  B01D2259/4525 ,  B01D2259/4533 ,  B01D2259/4575 ,  F17C5/06 ,  F17C11/00 ,  F17C2205/0338 ,  F17C2205/0391

Abstract: A fill system (1200) and methodology for the manufacture of fluid storage and dispensing vessels (1202) containing sorbent material for holding a sorbable fluid, for on-demand dispensing of the fluid in the use of the vessel. The fill system (1200) and methodology are directed to minimizing the processing time required to dissipate the heat of sorption incident to the loading of the sorbable fluid onto the sorbent material, so that thermal equilibration time in the manufacture of the vessels (1202) is substantially reduced in relation to the use of only ambient convective air cooling for dissipation of the heat of sorption from the fluid-filled vessel (1202).

公开(公告)号：EP1984096A4

公开(公告)日：2009-08-19

申请号：EP07710375

申请日：2007-01-29

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK ,  CARRUTHERS DONALD J ,  WODJENSKI MICHAEL J ,  MCMANUS JAMES V ,  MARZULLO JOSEPH ,  LURCOTT STEVEN M ,  SWEENEY JOSEPH D ,  KING MACKENZIE ,  BOBITA BRIAN

IPC: B01D53/02 ,  B01J20/20 ,  B01J20/28 ,  C01B31/08

CPC classification number: B01D53/0415 ,  B01D53/0446 ,  B01D2253/102 ,  B01D2253/1122 ,  B01D2253/202 ,  B01D2253/308 ,  B01D2253/311 ,  B01D2253/342 ,  B01D2256/24 ,  B01D2257/30 ,  B01D2258/0216 ,  B01D2259/40096 ,  B01D2259/4146 ,  B01D2259/4525 ,  B01D2259/455 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/28014 ,  B01J20/28023 ,  B01J20/28033 ,  B01J20/28042 ,  B01J20/28052 ,  B01J20/2808 ,  B01J20/28097 ,  B01J2220/66 ,  B82Y30/00 ,  C01B3/0021 ,  C01B13/0251 ,  C10G25/003 ,  C10G45/02 ,  C10G67/06 ,  C10G2300/1033 ,  C10G2300/1044 ,  C10G2300/1051 ,  C10G2300/1055 ,  C10G2300/202 ,  C10G2300/207 ,  F17C11/00 ,  F17C11/007 ,  Y02E60/321 ,  Y02E60/325 ,  Y10S95/903 ,  Y10T428/249956 ,  Y10T428/249957

Abstract: Carbonaceous materials are described, having utility for fluid storage/dispensing. The carbonaceous material in one implementation is a nanoporous carbon composite having porosity that is at least partially filled with material imparting to the composite an enhanced character. Another implementation utilizes porous carbon material as a storage medium for chlorine gas. A further implementation utilizes porous carbon material as a hydrogen storage mediu e g, for hydrogen fuel cells. In another implementation, porous carbon material is employed as a sorbent medium in a fluid storage and dispensing system, in an arrangement of multiple porous carbon articles, and positional stabilization structure is employed to restrain the arrangement against movement. An arrangement in which carbon adsorbent is desorbed of residual fluid by resistive and/or inductive heating of the adsorbent is described.

公开(公告)号：EP1899041A4

公开(公告)日：2009-04-22

申请号：EP06784388

申请日：2006-05-03

Applicant: ADVANCED TECH MATERIALS

Inventor： OLANDER KARL W ,  MCMANUS JAMES V ,  HULTQUIST STEVEN J ,  ARNO JOSE I ,  VAN BUSKIRK PETER

IPC: B01D53/02 ,  F17C11/00

CPC classification number: F17C11/00 ,  F17C2201/0109 ,  F17C2201/032 ,  F17C2201/035 ,  F17C2201/054 ,  F17C2201/056 ,  F17C2201/058 ,  F17C2203/0639 ,  F17C2203/0678 ,  F17C2205/0184 ,  F17C2205/0326 ,  F17C2205/0329 ,  F17C2205/0338 ,  F17C2205/0391 ,  F17C2221/011 ,  F17C2221/013 ,  F17C2221/014 ,  F17C2221/031 ,  F17C2221/033 ,  F17C2221/035 ,  F17C2221/037 ,  F17C2223/0123 ,  F17C2223/013 ,  F17C2223/033 ,  F17C2223/035 ,  F17C2225/0123 ,  F17C2225/013 ,  F17C2225/033 ,  F17C2225/035 ,  F17C2225/038 ,  F17C2227/0114 ,  F17C2227/0135 ,  F17C2227/0157 ,  F17C2250/032 ,  F17C2250/0443 ,  F17C2250/0636 ,  F17C2270/0168 ,  F17C2270/02 ,  F17C2270/0518

公开(公告)号：EP1044055A4

公开(公告)日：2003-04-23

申请号：EP99902085

申请日：1999-01-07

Applicant: ADVANCED TECH MATERIALS

Inventor： DIETZ JAMES ,  MCMANUS JAMES V

IPC: F17C7/00 ,  B01J4/00 ,  B67D3/00 ,  F17C11/00 ,  H01L21/265 ,  B01D53/04

CPC classification number: F17C11/00 ,  Y02E60/321

Abstract: An apparatus for storage and dispensing of a gas, comprising a gas storage and dispensing vessel holding a physical sorbent medium and gas adsorbed on the physical sorbent medium, wherein a carrier gas, e.g., helium, hydrogen, argon, etc., is flowed through the vessel to effect desorption of the sorbate gas and entrainment of the desorbed gas in the carrier gas stream. The storage and dispensing system of the invention may be employed to provide the dispensed sorbate gas to a downstream locus of use in applications such as epitaxial film formation and ion implantation, in the manufacture of semiconductor devices.

Abstract translation: 一种用于储存和分配气体的设备（10），包括容纳物理吸附介质（16）和吸附在物理吸附介质（16）上的气体的气体储存和分配容器（12），其中载气（例如氦气 ，氢气，氩气等通过容器（12）流动，以实现山梨酸盐气体的解吸并将解吸的气体夹带在载气流中。 本发明的储存和分配系统（10）可以用于在半导体器件的制造中将分配的山梨酸盐气体提供给诸如外延膜形成和离子注入等应用中的下游使用场所。

公开(公告)号：EP1017475A4

公开(公告)日：2002-11-13

申请号：EP98924807

申请日：1998-05-20

Applicant: ADVANCED TECH MATERIALS

Inventor： MCMANUS JAMES V ,  BRESTOVANSKY DENNIS F ,  KIRLIN PETER S

IPC: B65D88/12 ,  B01D53/04 ,  F17C11/00

CPC classification number: F17C11/005 ,  B01D53/0407 ,  B01D53/0438 ,  B01D2253/102 ,  B01D2256/26 ,  B01D2259/40088 ,  B01D2259/4009 ,  B01D2259/4525 ,  B01D2259/4533 ,  B01D2259/4566 ,  B01D2259/4575 ,  F17C11/00 ,  F17C2270/0518

Abstract: A fluid storage and dispensing system (200) includes a storage and dispensing vessel (204) containing a solid-phase physical sorbent material (206) for holding a sorbable fluid, and a motive transport assembly associated with the storage and dispensing vessel. The storage and dispensing vessel is arranged for selectively flowing fluid into the vessel for storage, and out of the vessel for dispensing. The sorbable fluid physically adsorbed on the solid-phase physical sorbent medium may be selectively desorbed by pressure differential desorption and/or thermal desorption, to dispense gas when the vessel is in motive transport and/or when the vessel is at rest.

公开(公告)号：EP1093395A4

公开(公告)日：2006-11-15

申请号：EP99925778

申请日：1999-05-21

Applicant: ADVANCED TECH MATERIALS

Inventor： HULTQUIST STEVEN J ,  TOM GLENN M ,  KIRLIN PETER S ,  MCMANUS JAMES V

IPC: B01D53/04 ,  B01D53/22 ,  B01D53/34 ,  F17C11/00

CPC classification number: B01D53/0446 ,  B01D53/229 ,  B01D53/34 ,  B01D2253/102 ,  B01D2253/104 ,  B01D2253/108 ,  B01D2253/202 ,  B01D2256/26 ,  B01D2258/0216 ,  B01D2259/4525 ,  F17C11/00 ,  F17C2223/0123 ,  F17C2270/0518 ,  H01J2237/006 ,  H01J2237/31701 ,  Y10S95/901 ,  Y10S95/902

Abstract: A sorbent-based gas storage and dispensing system includes a storage and dispensing vessel (10) containing a solid-phase physical sorbent medium (17) having a sorbate gas physically adsorbed thereon. A chemisorbent material (138) is provided in the vessel (10) to chemisorb impurities for gas phase removal thereof. Desorbed sorbate gas is discharged from the vessel (10) by a dispensing manifold (12) coupled thereto. The chemisorbent material (138) may be provided in a capsule including an impurity-permeable, but sorbate gas-impermeable membrane (136), and installed in the vessel (10) at the time of the loading of the sorbent medium (17). Semiconductor manufacturing processes and products manufactured by such processes are also described.

公开(公告)号：EP1284806A4

公开(公告)日：2006-03-15

申请号：EP01930952

申请日：2001-04-27

Applicant: ADVANCED TECH MATERIALS

Inventor： TOM GLENN M ,  MCMANUS JAMES V

IPC: B01D53/04 ,  B01D53/22 ,  B01J4/00 ,  B01J20/18 ,  B01J20/26 ,  C23C16/448 ,  F17C7/00 ,  F17C11/00 ,  F17C13/04 ,  F17C13/08 ,  H01L21/02 ,  H01L21/205 ,  H01L21/3065

CPC classification number: F17C7/00 ,  F17C11/00 ,  F17C13/04 ,  F17C13/045 ,  F17C2205/0338 ,  F17C2205/0391 ,  F17C2223/0123 ,  F17C2223/038 ,  F17C2270/0518

Abstract: A gas supply system including a gas cabinet (402) defining an enclosure including therein a gas dispensing manifold (426) and one or more adsorbent-based gas storage and dispensing vessels (433),(460),(462) mounted in the enclosure and joined in gas flow communication with the gas dispensing manifold (426). The enclosure may be maintained under low or negative pressure conditions for enhanced safety in the event of leakage of gas from the gas storage and dispensing vessels (433),(460),(462) in the enclosure. The gas supply system may be coupled to a gas-consuming unit in a semiconductor manufacturing facility, e.g., an ion implanter, an etch chamber, or a chemical vapor deposition reactor.