公开(公告)号：EP1926138A1

公开(公告)日：2008-05-28

申请号：EP05772572.3

申请日：2005-08-18

申请人： ADVANTEST CORPORATION ,  National University Corporation Tohoku Unversity

发明人： OKAYASU, Toshiyuki ,  SUGAWA, Shigetoshi ,  TERAMOTO, Akinobu

IPC分类号： H01L21/66 ,  H01L21/822 ,  H01L27/04

CPC分类号： H01L23/544 ,  G01R31/31718 ,  G11C2029/4402 ,  H01L21/76254 ,  H01L22/14 ,  H01L2223/5444 ,  H01L2924/0002 ,  Y10T29/49004 ,  H01L2924/00

摘要： Provided is a device identifying method for identifying an electronic device including an actual operation circuit operating at a time of actual operation of the electronic device and a test circuit provided with a plurality of test elements and operating at a time of testing of the electronic device, the device identifying method including: a property measuring step of measuring electric properties respectively of the plurality of test elements; an identification information storing step of storing the electric properties respectively of the plurality of test elements, as identification information of the electronic device; an identification information obtaining step of measuring, in an attempt to identify a target electronic device, electronic properties of a plurality of test elements included in the target electronic device, thereby obtaining identification information of the target electronic device; and a matching step of comparing the identification information obtained in the identification information obtaining step and the identification information stored in the identification information storing step, and judging that, when there is matching in identification information, the target electronic device whose identification information is obtained in the identification information obtaining step is the electronic device whose identification information is stored in the identification information storing step.

摘要翻译： 本发明提供一种设备识别用于电子装置，包括对在电子装置并设置有测试元件的多个测试电路的实际手术的时间操作的实际工作电路的识别与在电子装置的测试的时间操作方法， 该设备识别方法，包括：一个属性测量分别测定试验元件的多个电特性的步骤; 上识别信息存储分别存储测试元件的多个电特性，作为电子装置的识别信息的步骤; 的识别信息在试图识别目标电子设备获取的测量的步骤，在测试元件的多个电子特性包括在目标电子装置中，从而得到所述目标电子装置的标识信息; 并且比较在识别信息获取步骤，并存储在识别信息存储步骤中的识别信息所获得的识别信息，并判断的匹配步骤的是，当存在于识别信息，所述目标电子装置，它的识别信息中所获得的匹配 识别信息取得步骤是将电子装置，它的标识信息被存储在识别信息存储步骤。

公开(公告)号：EP1947539A1

公开(公告)日：2008-07-23

申请号：EP05787747.4

申请日：2005-09-27

申请人： ADVANTEST CORPORATION ,  National University Corporation Tohoku Unversity

发明人： OKAYASU, Toshiyuki ,  SUGAWA, Shigetoshi ,  TERAMOTO, Akinobu

IPC分类号： G05B19/418

CPC分类号： G05B19/4184 ,  G05B2219/31483 ,  G05B2219/45031 ,  H01L22/20 ,  H01L22/34 ,  H01L2924/0002 ,  Y02P90/14 ,  Y02P90/22 ,  H01L2924/00

摘要： Provided is a method for managing manufacturing apparatuses used in a managed production line including a plurality of manufacturing processes for manufacturing an electronic device, each of the apparatuses being used in each of the processes, the method including: acquiring a property of a reference device manufactured in a predetermined reference production line including the manufacturing processes; performing at least one of the manufacturing processes in the managed production line, performing the other manufacturing processes in the reference production line, and manufacturing a comparison device; measuring a property of the comparison device; comparing the measured properties between the reference and the comparison devices; and judging whether the manufacturing apparatus used in the at least one manufacturing process is defective or not, based on a property difference between the reference and the comparison devices.

摘要翻译： 本发明提供一种用于管理包括用于制造电子设备的多个制造过程的管理生产线中的制造设备的方法，每个处理中使用每个设备，该方法包括：获取制造的参考设备的特性 在包括制造工艺的预定参考生产线中; 执行管理生产线中的至少一个制造工艺，在参考生产线中执行其他制造工艺，并制造比较装置; 测量比较装置的特性; 比较参考和比较装置之间的测量属性; 并且基于所述参考和所述比较装置之间的特性差判断所述至少一个制造过程中使用的制造装置是否有缺陷。

公开(公告)号：EP1933215A1

公开(公告)日：2008-06-18

申请号：EP05783449.1

申请日：2005-09-13

申请人： ADVANTEST CORPORATION ,  National University Corporation Tohoku Unversity

发明人： OKAYASU, Toshiyuki ,  SUGAWA, Shigetoshi ,  TERAMOTO, Akinobu

IPC分类号： G05B19/418

CPC分类号： G05B19/41875 ,  G05B2219/32221 ,  G05B2219/45031 ,  H01L22/20 ,  H01L22/34 ,  H01L2924/0002 ,  Y02P90/22 ,  H01L2924/00

摘要： There is provided a manufacturing system for manufacturing an electronic device through a plurality of manufacturing stages. The manufacturing system includes a plurality of manufacturing apparatuses performing processes corresponding to the plurality of manufacturing stages. The manufacturing system includes a manufacturing line that manufactures the electronic device, a manufacturing control section that causes the manufacturing line to manufacture a wafer having therein a test circuit including a plurality of transistors under measurement, a measuring section that measures an electrical characteristic of each of the plurality of transistors under measurement in the test circuit, an identifying section that identifies, among the plurality of manufacturing stages, a manufacturing stage in which a defect is generated, with reference to a distribution, on the wafer, of one or more transistors under measurement whose electrical characteristics do not meet a predetermined standard, and a setting changing section that changes a setting for a manufacturing apparatus that performs a process corresponding to the manufacturing stage in which the defect is generated.

摘要翻译： 提供了一种用于通过多个制造阶段制造电子装置的制造系统。 制造系统包括执行与多个制造阶段对应的处理的多个制造装置。 该制造系统包括制造电子装置的制造线，制造控制部，其使生产线制造其中具有测量电路的测试电路的晶片，测量部分，其测量各个的电特性 在测试电路中测量的多个晶体管，识别部分，在多个制造阶段中，根据晶片上的一个或多个晶体管的分布，识别其中产生缺陷的制造阶段 电气特性不符合预定标准的测量值，以及改变执行与生成缺陷的制造阶段相对应的处理的制造装置的设定的设定变更部。

公开(公告)号：EP0895368B1

公开(公告)日：2006-07-19

申请号：EP98900703.4

申请日：1998-01-22

申请人： ADVANTEST CORPORATION

发明人： OKAYASU, Toshiyuki ,  KISHI, Nobuhito, Advantest Corporation

IPC分类号： H04B10/152 ,  H01S3/10 ,  H04L25/493

CPC分类号： H04B10/508 ,  H04B10/54 ,  H04B10/691

摘要： An optical transmission system which can transmit with high accuracy even such an optical signal that has high timing accuracy and an irregular period and contains a DC component. In this system, a leading edge detecting circuit (1) which detects the leading edge of the waveform of transmission signals, a pulse generating circuit (2) for transmission which generates a pulse signal (b) composed of an inverted paired pulse the polarities of which are inverted each other at the detecting timing of the circuit (1), and a light intensity modulating circuit (3) which generates a light modulated signal (c) based on the pulse signal (b) are provided on the transmission side, and an AC coupling and receiving circuit (4) which receives the light intensity-modulated signal (c) and only fetches the AC component of the signal (c) and a discriminating circuit (5) which discriminates the leading timing from received signals are provided on the reception side. In addition, a similar constitution is provided for transmitting signals related to the falling of the waveform of the transmission signals, and the leading edge and falling edge of the waveform of the original transmission signals are reproduced based on discriminated leading timing and falling timing.

公开(公告)号：EP2136218A1

公开(公告)日：2009-12-23

申请号：EP08720518.3

申请日：2008-03-18

申请人： Advantest Corporation

发明人： WATANABE, Daisuke ,  OKAYASU, Toshiyuki

IPC分类号： G01R31/319 ,  G01R35/00 ,  H04L25/40

CPC分类号： G01R31/3191 ,  G01R31/31937

摘要： A variable delay circuit 42 provides an adjustable delay to a strobe signal S5. An input latch circuit 14 latches each bit data included in internal serial data S2 by a strobe signal S6 delayed by the variable delay circuit 42. A delay set unit 40 adjusts a delay amount τ1 provided to the strobe signal S5 by the variable delay circuit 42. While a calibration operation is being executed in which a known calibration pattern is inputted as serial data, the delay set unit 40 statistically acquires output latch data S3 of the input latch circuit 14, and adjusts the delay amount τ1 such that probabilities of occurrence of 1 and 0 becomes a predetermined ratio.

摘要翻译： 可变延迟电路42为选通信号S5提供可调延迟。 输入锁存电路14将包含在内部串行数据S2中的每个比特数据锁存在由可变延迟电路42延迟的选通信号S6上。延迟设定单元40通过可变延迟电路42调整提供给选通信号S5的延迟量Ä1 当正在执行其中输入已知校准图案作为串行数据的校准操作时，延迟设定单元40统计地获取输入锁存电路14的输出锁存数据S3，并调整延迟量Ä1，使得发生概率 1和0成为预定比例。

公开(公告)号：EP0895368A1

公开(公告)日：1999-02-03

申请号：EP98900703.4

申请日：1998-01-22

申请人： Advantest Corporation

发明人： OKAYASU, Toshiyuki ,  KISHI, Nobuhito, Advantest Corporation

IPC分类号： H04B10/152 ,  H01S3/10

CPC分类号： H04B10/508 ,  H04B10/54 ,  H04B10/691

摘要： An optical transmission system is provided, which permits high-precision optical transmission of a signal even if the signal has a high accurate timing, an indefinite period, and a DC component. The transmitting side is provided with a rise edge detecting circuit 1 for detecting the rise edge of a transmitting signal waveform, a transmitting pulse generating circuit 2 for generating a transmitting pulse signal (b) constituted by a pair of opposite-polarity pulses inverting their polarities at the detected timing, and a light intensity modulation circuit 3 for generating a light intensity modulated signal (c) based on the pulse signal (b). The receiving side is provided with an AC-coupled receiving circuit 4 for receiving the light intensity modulated signal (c) and extracting therefrom only an AC component, and a discrimination circuit 5 for discriminating the rise timing from the received signal. Further, a similar arrangement is provided for transmitting a signal associated with the fall edge of the transmitting signal waveform. On the basis of the discriminated rise timing and the fall timing, the rise edge and the fall edge of the original transmitting signal waveform are regenerated.

摘要翻译： 提供了一种光传输系统，即使信号具有高准确的定时，不确定的周期和直流分量，也允许信号的高精度光传输。 发送侧设置有用于检测发送信号波形的上升沿的上升沿检测电路1，发送脉冲发生电路2，用于生成由一对反极性脉冲信号（b）构成的发送脉冲信号（b） 以及用于基于脉冲信号（b）产生光强度调制信号（c）的光强度调制电路3。 接收侧设置有用于接收光强度调制信号（c）并仅从其中提取AC分量的AC耦合接收电路4，以及用于从接收信号中鉴别上升时间的鉴别电路5。 此外，提供了用于发送与发送信号波形的下降沿相关联的信号的类似布置。 基于鉴别上升时间和下降时间，原始发送信号波形的上升沿和下降沿被再生。

公开(公告)号：EP2133995A1

公开(公告)日：2009-12-16

申请号：EP08720519.1

申请日：2008-03-18

申请人： Advantest Corporation

发明人： WATANABE, Daisuke ,  OKAYASU, Toshiyuki

IPC分类号： H03K5/00 ,  G01R29/02 ,  G01R31/28 ,  H04L7/033 ,  H04L25/02

CPC分类号： H04L7/033 ,  G01R31/31727 ,  G01R31/31937 ,  H03L7/0812 ,  H04L7/0037

摘要： A change-point detection circuit 16 extracts a clock signal S3 from serial data S1, input data. A variable delay circuit 40 provides a delay in accordance with a delay control signal S8a to a reference signal S4 having a predetermined frequency, so that the phase of the reference signal S4 is shifted on the basis of an initial delay. An input latch circuit 14 latches internal serial data S2 by using an output signal of the variable delay circuit 40 as a strobe signal S5. A phase comparator 22 matches the frequencies of the clock signal S3 and the strobe signal S5 with each other, and generates phase difference data S9 in accordance with a phase difference between the two signals. A loop filter 30 integrates the phase difference data S9 generated by the phase comparator 22 and outputs it as the delay control signal S8a. The phase shift amount acquisition unit 50 acquires a phase shift amount based on the delay control signal S8a, the phase shift amount being based on the initial delay provided to the reference signal by the variable delay circuit 40.

摘要翻译： 变化点检测电路16从串行数据S1提取时钟信号S3，输入数据。 可变延迟电路40根据延迟控制信号S8a向具有预定频率的参考信号S4提供延迟，使得基准信号S4的相位基于初始延迟而偏移。 输入锁存电路14通过使用可变延迟电路40的输出信号作为选通信号S5来锁存内部串行数据S2。 相位比较器22将时钟信号S3和选通信号S5的频率相互匹配，并根据两个信号之间的相位差产生相位差数据S9。 环路滤波器30对由相位比较器22产生的相位差数据S9进行积分，并输出作为延迟控制信号S8a。 相移量获取单元50基于延迟控制信号S8a获取相移量，相移量基于由可变延迟电路40提供给参考信号的初始延迟。