公开(公告)号：EP4094125A1

公开(公告)日：2022-11-30

申请号：EP20838574.0

申请日：2020-12-24

申请人： ASML Holding N.V. ,  ASML Netherlands B.V.

发明人： ALBRIGHT, Ronald, Peter ,  BAL, Kursat ,  BANINE, Vadim, Yevgenyevich ,  BRULS, Richard, Joseph ,  DE VRIES, Sjoerd, Frans ,  FRIJNS, Olav, Waldemar, Vladimir ,  HUANG, Yang-Shan ,  HUANG, Zhuangxiong ,  JACOBS, Johannes, Henricus, Wilhelmus ,  MOORS, Johannes, Hubertus, Josephina ,  NENCHEV, Georgi, Nenchev ,  NIKIPELOV, Andrey ,  RAASVELD, Thomas, Maarten ,  RANJAN, Manish ,  TE SLIGTE, Edwin ,  UMSTADTER, Karl, Robert ,  UZGÖREN, Eray ,  VAN DE KERKHOF, Marcus, Adrianus ,  YAGHOOBI, Parham

IPC分类号： G03F7/20 ,  H05G2/00

公开(公告)号：EP4386478A1

公开(公告)日：2024-06-19

申请号：EP22212752.4

申请日：2022-12-12

申请人： ASML Netherlands B.V.

发明人： JANSEN, Maarten, Mathijs, Marinus ,  VAN EMPEL, Tjarko, Adriaan, Rudolf ,  REIJNEN, Martinus, Cornelis ,  DE VRIES, Sjoerd, Frans

IPC分类号： G03F7/00 ,  H01L21/683

CPC分类号： G03F7/70708 ,  G03F7/70916 ,  H01L21/6833 ,  H01L21/68742

摘要： The disclosure provides an apparatus comprising: at least one substrate table for holding a substrate, the substrate table being provided with an electrostatic clamp for electrostatically clamping the substrate; and at least one reflective surface for reflecting charged particles in a direction away from a front side of the substrate. A method of use comprises the steps of electrostatically clamping at least one substrate table on a substrate table; releasing the clamped substrate; lifting the substrate from the substrate table; and providing at least one reflective surface for reflecting charged particles in a direction away from a front side of the substrate.

公开(公告)号：EP4134748A1

公开(公告)日：2023-02-15

申请号：EP21191135.9

申请日：2021-08-12

申请人： ASML Netherlands B.V.

发明人： HUANG, Zhuangxiong ,  GUAN, Tiannan ,  ENGELEN, Johannes, Bernardus, Charles ,  NAKIBOGLU, Günes ,  KRUIZINGA, Matthias ,  VAN GILS, Petrus, Jacobus, Maria ,  TRALLI, Aldo ,  DE VRIES, Sjoerd, Frans ,  TEUNISSEN, Marcel, Maria, Cornelius, Franciscus ,  BRULS, Richard, Joseph ,  VAN DER MEULEN, Frits

IPC分类号： G03F7/20 ,  H01L21/683

摘要： The invention relates to an electrostatic holder comprising:
- a body, and
- a clamping element attached to the body, said clamping element comprising an electrode for applying an attractive force between the clamping element and a first to be clamped object,
wherein an outer edge of the body is configured to provide a gap between the outer edge of the body and the first to be clamped object, which gap is configured for outputting a fluid for reducing dust particles reaching the first to be clamped object or a second to be clamped object on an opposite side of the holder.