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    EVAPORATION UNIT AND VACUUM COATING APPARATUS
    3.
    发明公开
    EVAPORATION UNIT AND VACUUM COATING APPARATUS 审中-公开
    蒸发站和真空镀膜设备

    公开(公告)号：EP2646594A1

    公开(公告)日：2013-10-09

    申请号：EP10784314.6

    申请日：2010-12-01

    申请人： Applied Materials, Inc.

    发明人： HEIN, Stefan ,  HOFFMANN, Gerd

    IPC分类号： C23C14/56

    CPC分类号： C23C14/24 ,  C23C14/562

    摘要： Vacuum coating apparatus for coating a web includes a first rotatable coating drum and a second rotatable coating drum disposed parallel to the first drum with a gap formed between the first and the second coating drums for transporting at least one web. A first evaporator has at least one evaporation source for generating a first evaporation beam, wherein the first evaporator is arranged next to the first coating drum. A second evaporator has at least one evaporation source for generating a second evaporation beam, wherein the second evaporator is arranged next to the second coating drum. The first and the second evaporators are inclined relative to each other.

    GAS SYSTEM FOR REACTIVE DEPOSITION PROCESS
    5.
    发明公开
    GAS SYSTEM FOR REACTIVE DEPOSITION PROCESS 审中-公开
    GASSYSTEMFÜRREAKTIVES ABSCHEIDUNGSVERFAHREN

    公开(公告)号：EP2702184A1

    公开(公告)日：2014-03-05

    申请号：EP11716931.8

    申请日：2011-04-29

    申请人： Applied Materials, Inc.

    发明人： HOFFMANN, Gerd ,  WOLFF, Alexander

    IPC分类号： C23C14/00 ,  C23C14/56

    CPC分类号： C23C14/243 ,  C23C14/0021 ,  C23C14/562 ,  C23C14/564

    摘要： A gas lance unit configured for a reactive deposition process with a plurality of spaced apart crucibles, wherein spaces are provided between the crucibles, is described. The gas lance unit includes a gas guiding tube having one or more outlets for providing a gas for the reactive deposition process, and a condensate guiding element for guiding a condensate, particularly an aluminum condensate, to one or more positions above the spaces.

    摘要翻译： 描述了一种用于具有多个间隔开的坩埚的反应性沉积工艺的气枪单元，其中在坩埚之间设置有空间。 气体喷枪单元包括具有一个或多个出口的气体引导管，用于提供用于反应沉积过程的气体，以及用于将冷凝物，特别是铝冷凝物引导到空间上方一个或多个位置的冷凝物引导元件。

    DEVICES AND METHODS FOR PASSIVATING A FLEXIBLE SUBSTRATE IN A COATING PROCESS
    7.
    发明公开
    DEVICES AND METHODS FOR PASSIVATING A FLEXIBLE SUBSTRATE IN A COATING PROCESS 审中-公开

    公开(公告)号：EP3441503A1

    公开(公告)日：2019-02-13

    申请号：EP18196548.4

    申请日：2011-04-29

    申请人： Applied Materials, Inc.

    发明人： HOFFMANN, Gerd ,  WOLFF, Alexander

    IPC分类号： C23C14/58 ,  C23C14/56 ,  C23C14/20 ,  C23C14/02

    摘要： An apparatus for providing a passivated layer for a coating of a flexible substrate includes a coating chamber for coating the flexible substrate, a chamber separation element, the chamber separation element being arranged for separating the coating chamber from a further chamber and being arranged at the entry side of the coating chamber, wherein the entry side is the side, where the substrate enters into the coating chamber, a coating drum, the coating drum and the chamber separation element forming a gap, and a gas inlet, the gas inlet being arranged within the chamber separation element for supplying oxygen into the gap.

    HEAT EXCHANGER FOR COOLING A HEATING TUBE AND METHOD THEREOF
    9.
    发明公开
    HEAT EXCHANGER FOR COOLING A HEATING TUBE AND METHOD THEREOF 审中-公开
    WÄRMETAUSCHERZUMKÜHLENEINES HEIZROHRES UND VERFAHRENDAFÜR

    公开(公告)号：EP2788704A1

    公开(公告)日：2014-10-15

    申请号：EP11801675.7

    申请日：2011-12-09

    申请人： Applied Materials, Inc.

    发明人： HOFFMANN, Gerd ,  SKUK, Peter

    IPC分类号： F28D5/00 ,  F28D7/00

    CPC分类号： F25B39/02 ,  F28D7/0008 ,  F28D2021/0028 ,  F28F1/00 ,  F28F13/10

    摘要： A heat exchanger for cooling a heating tube is described, comprising at least two cooling pipes, wherein the at least two cooling pipes are arranged such that each of the at least two cooling pipes are configured to be in thermal contact with the heating tube; and a means for generating an aerosol being configured to provide the aerosol in the at least two cooling pipes.

    摘要翻译： 描述了用于冷却加热管的热交换器，其包括至少两个冷却管，其中所述至少两个冷却管被布置成使得所述至少两个冷却管中的每一个被配置为与所述加热管热接触; 以及用于产生气溶胶的装置，其被构造成在所述至少两个冷却管中提供所述气溶胶。