Patent search ap:("BASF SE") AND inv:"BRILL Page Marcel"

1.

发明公开
USE OF COMPOSITIONS COMPRISING A SILOXANE-TYPE ADDITIVE FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW 审中-公开

公开(公告)号：EP3704547A1

公开(公告)日：2020-09-09

申请号：EP18800532.6

申请日：2018-10-29

Applicant: BASF SE

Inventor： LOEFFLER, Daniel , SHEN, Mei Chin , WEI, Sheng Hsuan , PIRRUNG, Frank , ENGELBRECHT, Lothar , BURK, Yeni , KLIPP, Andreas , BRILL, Marcel , CSIHONY, Szilard

IPC: G03F7/40 , C11D1/66 , C11D11/00 , H01L21/02 , H01L21/027

2.

发明公开
COMPOSITION, ITS USE AND A PROCESS FOR SELECTIVELY ETCHING SILICON-GERMANIUM MATERIAL 审中-公开

公开(公告)号：EP3997193A1

公开(公告)日：2022-05-18

申请号：EP20733993.8

申请日：2020-06-19

Applicant: BASF SE

Inventor： LOPEZ VILLANUEVA, Francisco Javier , BURK, Yeni , LOEFFLER, Daniel , MUELLER, Jan Ole , BRILL, Marcel , WILKE, Patrick , LINDNER, Jean-Pierre Berkan , BOYKO, Volodymyr

IPC: C09K13/00 , C09K13/08 , H01L21/306

3.

发明公开
VERFAHREN ZUR HERSTELLUNG EINES POLYBENZAZOLPOLYMERS (P) 审中-公开

公开(公告)号：EP3512905A1

公开(公告)日：2019-07-24

申请号：EP17768393.5

申请日：2017-09-05

Applicant: BASF SE

Inventor： HOECKER, Johannes David , MASSONNE, Klemens , BRILL, Marcel , MERGER, Martin , RUCH, Joachim , FLEISCHEL, Olivier , HERMANUTZ, Frank , UNOLD, Joerg

IPC: C08G75/22 , C07D263/57 , C09K11/00 , C08G61/00 , C08G63/00 , C08G73/00 , D01D4/00 , D01F6/74 , H01B1/00 , H01L51/00

4.

发明公开
COMPOSITION FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW COMPRISING A BORON-TYPE ADDITIVE 审中-公开

公开(公告)号：EP3956729A1

公开(公告)日：2022-02-23

申请号：EP20715884.1

申请日：2020-04-03

Applicant: BASF SE

Inventor： CSIHONY, Szilard , LOEFFLER, Daniel , BRILL, Marcel , PIRRUNG, Frank , ENGELBRECHT, Lothar , BERGELER, Maike , WILKE, Patrick , BURK, Yeni , BOYKO, Volodymyr

IPC: G03F7/40 , B81C1/00 , H01L21/02 , H01L21/027 , H01L21/306 , C11D11/00

5.

发明公开
COMPOSITION COMPRISING AN AMMONIA-ACTIVATED SILOXANE FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW 审中-公开

公开(公告)号：EP3953768A1

公开(公告)日：2022-02-16

申请号：EP20714214.2

申请日：2020-03-27

Applicant: BASF SE

Inventor： KAO, Chi Yueh , SHEN, Mei Chin , WEI, Sheng Hsuan , LOEFFLER, Daniel , KLIPP, Andreas , BRILL, Marcel , CSIHONY, Szilard , PIRRUNG, Frank , HEINE, Niklas Benjamin

IPC: G03F7/40 , C11D11/00

6.

发明公开
USE OF COMPOSITIONS COMPRISING A SOLVENT MIXTURE FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW 审中-公开

公开(公告)号：EP3802768A1

公开(公告)日：2021-04-14

申请号：EP19724427.0

申请日：2019-05-13

Applicant: BASF SE

Inventor： BRILL, Marcel , LOEFFLER, Daniel , BURK, Yeni , PIRRUNG, Frank , ENGELBRECHT, Lothar , CSIHONY, Szilard , BERGELER, Maike , BOYKO, Volodymyr , WILKE, Patrick

IPC: C11D7/50 , C11D11/00 , G03F7/40

7.

发明公开
VERFAHREN ZUR HERSTELLUNG VON FASERN, FOLIEN UND FORMKÖRPERN EINES POLYBENZAZOLPOLYMERS (P) 审中-公开

公开(公告)号：EP3762447A1

公开(公告)日：2021-01-13

申请号：EP19707020.4

申请日：2019-03-01

Applicant: BASF SE

Inventor： BRILL, Marcel , DEBEAUVAIS DE VASCONCELOS, Ines , NOWAK, Maik , FLEISCHEL, Olivier , MERGER, Martin , STAMMER, Achim , RUCH, Joachim , HERMANUTZ, Frank , BEYER, Ronald , BUCHMEISER, Michael R.

IPC: C08G73/22 , C08G75/32

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