公开(公告)号：EP2539416A4

公开(公告)日：2017-11-29

申请号：EP11746938

申请日：2011-01-19

Applicant: BASF SE

Inventor： KUJAT CHRISTOF ,  LI YUZHUO ,  RUSHING KENNETH

IPC: C09K3/14

CPC classification number: C09K3/1436 ,  B24B37/245 ,  B24D11/001 ,  H01L21/3212

Abstract: Abrasive articles containing solid abrasive particles (A) selected from the group consisting of inorganic particles, organic particles and inorganic-organic hybrid particles (a1) having an average primary particle size of from 1 to 500 nm as determined by laser light diffraction and having electron donor groups (a2) chemically bonded to their surface are provided. The said solid abrasive particles (A) are distributed throughout or on top of or throughout and on top of a solid matrix (B). A method for manufacturing abrasive articles and a method for processing substrates useful for fabricating electrical and optical devices are provided. The said methods make use of the said abrasive articles.

公开(公告)号：EP2507332A4

公开(公告)日：2017-08-02

申请号：EP10832737

申请日：2010-11-25

Applicant: BASF SE

Inventor： RAMAN VIJAY IMMANUEL ,  LI YUZHUO ,  BRANDS MARIO ,  LAN YONGQING ,  RUSHING KENNETH ,  RAMJI KARPAGAVALLI

IPC: C09G1/02 ,  B01J13/14 ,  C09K3/14 ,  H01L21/321

CPC classification number: H01L21/3212 ,  C09G1/02 ,  C09K3/1436 ,  C09K3/1463

公开(公告)号：EP2688966A4

公开(公告)日：2014-11-12

申请号：EP12760432

申请日：2012-03-19

Applicant: BASF SE

Inventor： NOLLER BASTIAN ,  LAUTER MICHAEL ,  SUGIHARTO ALBERT BUDIMAN ,  LI YUZHUO ,  RUSHING KENNETH ,  FRANZ DIANA ,  BÖHN ROLAND ,  GAO NING

IPC: C09G1/02 ,  H01L21/321

CPC classification number: H01L21/3212 ,  C09G1/02 ,  C09G1/04 ,  C09K3/1463 ,  H01L21/30625