DIVISEUR DE PUISSANCE POUR DISPOSITIF A PLASMA
    5.
    发明公开
    DIVISEUR DE PUISSANCE POUR DISPOSITIF A PLASMA 有权
    配电IN A等离子装置

    公开(公告)号:EP1216493A1

    公开(公告)日:2002-06-26

    申请号:EP00962606.0

    申请日:2000-09-12

    IPC分类号: H01P5/16

    摘要: The invention concerns a system comprising: a microwave generator (10), a rectangular guide (110) coupled with the generator (10), adapted to operate in fundamental (H10) or transverse electrical (TE10) mode, and associated with means providing a standing wave pattern, a plurality of power connectors (116) arranged in the guide (110) at zones of maximum amplitude for one of the components of the electromagnetic field for splitting the generator (10) power, the power connectors (116) being adjusted such that the sum of their reduced admittance levels brought to the splitter input formed by the rectangular guide (110) is in single unit and a plurality of sources (400), respectively coupled to a connector (116) of the guide (110), via an insulating means (200) ensuring a power transmission of the connector (116) to the source (400) without reflecting towards the connector (116) and a device (300) adapting impedance of each source (400), located downstream of the insulating means (200), between the latter and the associated source (400).