摘要:
The invention concerns a system comprising: a microwave generator (10), a rectangular guide (110) coupled with the generator (10), adapted to operate in fundamental (H10) or transverse electrical (TE10) mode, and associated with means providing a standing wave pattern, a plurality of power connectors (116) arranged in the guide (110) at zones of maximum amplitude for one of the components of the electromagnetic field for splitting the generator (10) power, the power connectors (116) being adjusted such that the sum of their reduced admittance levels brought to the splitter input formed by the rectangular guide (110) is in single unit and a plurality of sources (400), respectively coupled to a connector (116) of the guide (110), via an insulating means (200) ensuring a power transmission of the connector (116) to the source (400) without reflecting towards the connector (116) and a device (300) adapting impedance of each source (400), located downstream of the insulating means (200), between the latter and the associated source (400).
摘要:
The invention relates to a device for the production of a plasma (16) within a housing comprising means for the generation of energy in the microwave spectrum, for the excitation of the plasma, said means comprise at least one basic plasma excitation device with a coaxial applicator (4) of microwave energy, one of the ends of which is connected to a production source (7) of microwave energy, the other end (8) of which is directed to the gas to be excited within the housing. The device is characterised in that each basic plasma excitation device is arranged in the wall (3) of the housing, each applicator (4) having a central core (5) which is essentially flush with the wall of the housing. The central core and the thickness of the wall (3) of the housing are separated by a space (6) coaxial to the central core, said space being totally filled, at least at the end of each applicator, by a dielectric material (14), such that said material is essentially flush with the level of the wall of the housing.
摘要:
The invention relates to a device for confinement of a plasma (5) within a housing (1), comprising means for creating a magnetic field, said means being a series of permanent magnets (3) for creation of a magnetic field presenting an alternating multi-polar magnetic structure to the plasma. The invention is characterised in that the magnets (3) restrict the plasma to a large volume, the magnets begin distributed in a discontinuous manner around the volume and said magnets (3) are arranged within the housing at a separation from the walls of the housing by means of support shafts (4).
摘要:
The invention concerns a plasma display device comprising in a screen a chamber (17) containing a discharge gas capable of being excited to generate, alone or in combination with luminophor means (18) themselves designed to be excited by a radiation emitted by said gas, a visible light. The device comprises means for generating on one side of said chamber (17) a uniformly distributed electric field (E) designed to ignite a plasma in the gas, as well as a matrix of controllable elements (19) and means controlling said elements (19) so that they modulate individually the electric field (E) or the radiation emitted by the plasma or the generated visible light thereby generating selectively luminous zones on the screen.
摘要:
The invention concerns a source supplying an adjustable energy electron beam, comprising a plasma chamber (P) consisting of an enclosure (1) having an inner surface of a first value (S1) and an extraction gate (2) having a surface of a second value (S2), the gate potential being different from that of the enclosure and adjustable. The invention is characterized in that the plasma is excited and confined in multipolar or multidipolar magnetic structures, the ratio of the second value (S2) over the first value (S1) being close to: D = 1/β ∑2πme/mi exp (-1/2), wherein:β is the proportion of electrons of the plasma P, me the electron mass, and mi is the mass of positively charged ions.
摘要:
The invention concerns a method for making an extreme ultraviolet microlithography transmission modulator, characterised in that it consists in obtaining adamantine amorphous carbon by a process using a plasma consisting of a mixture of acetylene and argon and maintained by the power of a microwave source; in depositing a thin adamantine amorphous carbon film on a substrate with low absorption in extreme ultraviolet whereto is applied a variable polarisation; in varying the forbidden band between 1 and 2 eV through control of the argon partial pressure and in varying the corresponding extinction coefficient so as to modulate the modulator transmission without modifying the thickness of the deposited film.